DOI: 10.1063/1.1371525. Strain-driven self-positioning of micromachined structures

Strain-driven self-positioning of micromachined structures

10.1063/1.1371525

Crossref journal-article

AIP Publishing

Applied Physics Letters (317)

Abstract

We introduce a method to make self-positioned micromachined structures by using the strain in a pair of lattice-mismatched epitaxial layers. This method allows the fabrication of simple and robust hinges for movable parts, and it can be applied to any pair of lattice-mismatched epitaxial layers, in semiconductors or metals. As an application example, a standing mirror was fabricated. A multilayer structure including an AlGaAs/GaAs dielectric mirror and an InGaAs strained layer was grown by molecular-beam epitaxy on a GaAs substrate. After releasing the multilayer structure from the substrate by selective etching, it moved to its final position powered by the strain release in the InGaAs layer.

Bibliography

Vaccaro, P. O., Kubota, K., & Aida, T. (2001). Strain-driven self-positioning of micromachined structures. Applied Physics Letters, 78(19), 2852â2854.

Authors 3

Pablo O. Vaccaro (first)
Kazuyoshi Kubota (additional)
Tahito Aida (additional)

References 9 Referenced 128

{'key': '2024020320033902000_r1'}
10.1016/S0921-5107(97)00282-1 / Mater. Sci. Eng., B (1998)
10.1109/16.324588 / IEEE Trans. Electron Devices (1994)
10.1016/0167-9317(95)00282-0 / Microelectron. Eng. (1996)
{'key': '2024020320033902000_r5'}
{'key': '2024020320033902000_r6'}
10.1088/0022-3719/6/13/011 / J. Phys. C (1973)
{'key': '2024020320033902000_r8'}
{'key': '2024020320033902000_r9', 'first-page': '118', 'volume': '27', 'year': '1974', 'journal-title': 'J. Cryst. Growth'} / J. Cryst. Growth (1974)

Dates

Type	When
Created	23 years, 1 month ago (July 26, 2002, 10:17 a.m.)
Deposited	1 year, 7 months ago (Feb. 3, 2024, 3:03 p.m.)
Indexed	4 weeks, 1 day ago (Aug. 7, 2025, 4:59 p.m.)
Issued	24 years, 3 months ago (May 7, 2001)
Published	24 years, 3 months ago (May 7, 2001)
Published Print	24 years, 3 months ago (May 7, 2001)

Funders 0

None

BibTeX

@article{Vaccaro_2001, title={Strain-driven self-positioning of micromachined structures}, volume={78}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.1371525}, DOI={10.1063/1.1371525}, number={19}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={Vaccaro, Pablo O. and Kubota, Kazuyoshi and Aida, Tahito}, year={2001}, month=may, pages={2852–2854} }

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