DOI: 10.1063/1.1361285. High-efficiency nickel phase zone plates with 20 nm minimum outermost zone width

High-efficiency nickel phase zone plates with 20 nm minimum outermost zone width

10.1063/1.1361285

Crossref journal-article

AIP Publishing

Applied Physics Letters (317)

Abstract

Fresnel zone plates for high-resolution imaging in the soft x-ray regime were fabricated in nickel by a trilevel process, which makes use of electron-beam lithography, reactive-ion etching, and electrodeposition. In order to improve the zone plate’s resolution, which is determined by its outermost zone width, ZEP-7000 electron-beam resist was employed. Residues, which arose during pattern transfer by reactive-ion etching, and which hindered etching in small structures, were suppressed by a cleaning procedure. For improved electrodeposition process control, a nickel electroplating bath was optimized. Zone plates with minimum outermost zone widths of 20, 25 and 30 nm were fabricated, yielding 9.2%, 16.2% and 18.0% first-order diffraction efficiency, respectively, at λ=2.4 nm.

Bibliography

Peuker, M. (2001). High-efficiency nickel phase zone plates with 20 nm minimum outermost zone width. Applied Physics Letters, 78(15), 2208â2210.

Authors 1

M. Peuker (first)

References 16 Referenced 47

10.1006/jsbi.1998.4017 / J. Struct. Biol. (1998)
10.1007/BFb0118132 / Prog. Colloid Polym. Sci. (1998)
10.1088/0022-3727/31/6/012 / J. Phys. D (1998)
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10.1063/1.120069 / Appl. Phys. Lett. (1997)
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Dates

Type	When
Created	23 years, 1 month ago (July 26, 2002, 10:16 a.m.)
Deposited	1 year, 6 months ago (Feb. 3, 2024, 2:53 p.m.)
Indexed	1 year, 6 months ago (Feb. 6, 2024, 3:56 a.m.)
Issued	24 years, 4 months ago (April 9, 2001)
Published	24 years, 4 months ago (April 9, 2001)
Published Print	24 years, 4 months ago (April 9, 2001)

Funders 0

None

BibTeX

@article{Peuker_2001, title={High-efficiency nickel phase zone plates with 20 nm minimum outermost zone width}, volume={78}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.1361285}, DOI={10.1063/1.1361285}, number={15}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={Peuker, M.}, year={2001}, month=apr, pages={2208–2210} }

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