DOI: 10.1063/1.1328371. Amorphization and anisotropic fracture dynamics during nanoindentation of silicon nitride: A multimillion atom molecular dynamics study

Amorphization and anisotropic fracture dynamics during nanoindentation of silicon nitride: A multimillion atom molecular dynamics study

10.1063/1.1328371

Crossref journal-article

AIP Publishing

Applied Physics Letters (317)

Abstract

Molecular dynamics simulations of nanoindentation of 10 million atom α-Si3N4 films using a rigid indenter are reported. Local pressure distributions and configuration images of the plastically deformed region are presented. Residual tensile pressures correspond to voids and cracks that separate regions of compacted, plastically deformed material and elastically recovered crystalline material. Structural analysis shows that pile-up material on the surface and deformed material under the indenter is amorphous. With this indenter geometry, Si3N4 deforms primarily by amorphization, which is arrested by cracking at the indenter corners and piling-up of material along the indenter sides. Indentation fracture exhibits anisotropic behavior consistent with the orientation-dependent fracture toughness values.

Bibliography

Walsh, P., Kalia, R. K., Nakano, A., Vashishta, P., & Saini, S. (2000). Amorphization and anisotropic fracture dynamics during nanoindentation of silicon nitride: A multimillion atom molecular dynamics study. Applied Physics Letters, 77(26), 4332â4334.

Authors 5

Phillip Walsh (first)
Rajiv K. Kalia (additional)
Aiichiro Nakano (additional)
Priya Vashishta (additional)
Subhash Saini (additional)

References 19 Referenced 44

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Dates

Type	When
Created	23 years ago (July 26, 2002, 10:13 a.m.)
Deposited	1 year, 6 months ago (Feb. 3, 2024, 2:22 p.m.)
Indexed	2 months, 4 weeks ago (May 27, 2025, 1:45 a.m.)
Issued	24 years, 8 months ago (Dec. 25, 2000)
Published	24 years, 8 months ago (Dec. 25, 2000)
Published Print	24 years, 8 months ago (Dec. 25, 2000)

Funders 0

None

BibTeX

@article{Walsh_2000, title={Amorphization and anisotropic fracture dynamics during nanoindentation of silicon nitride: A multimillion atom molecular dynamics study}, volume={77}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.1328371}, DOI={10.1063/1.1328371}, number={26}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={Walsh, Phillip and Kalia, Rajiv K. and Nakano, Aiichiro and Vashishta, Priya and Saini, Subhash}, year={2000}, month=dec, pages={4332–4334} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        5,
        27
      ]
    ],
    "date-time": "2025-05-27T05:45:34Z",
    "timestamp": 1748324734993
  },
  "reference-count": 19,
  "publisher": "AIP Publishing",
  "issue": "26",
  "content-domain": {
    "domain": [
      "pubs.aip.org"
    ],
    "crossmark-restriction": true
  },
  "published-print": {
    "date-parts": [
      [
        2000,
        12,
        25
      ]
    ]
  },
  "abstract": "<jats:p>Molecular dynamics simulations of nanoindentation of 10 million atom \u03b1-Si3N4 films using a rigid indenter are reported. Local pressure distributions and configuration images of the plastically deformed region are presented. Residual tensile pressures correspond to voids and cracks that separate regions of compacted, plastically deformed material and elastically recovered crystalline material. Structural analysis shows that pile-up material on the surface and deformed material under the indenter is amorphous. With this indenter geometry, Si3N4 deforms primarily by amorphization, which is arrested by cracking at the indenter corners and piling-up of material along the indenter sides. Indentation fracture exhibits anisotropic behavior consistent with the orientation-dependent fracture toughness values.</jats:p>",
  "DOI": "10.1063/1.1328371",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2002,
        7,
        26
      ]
    ],
    "date-time": "2002-07-26T14:13:37Z",
    "timestamp": 1027692817000
  },
  "page": "4332-4334",
  "update-policy": "http://dx.doi.org/10.1063/aip-crossmark-policy-page",
  "source": "Crossref",
  "is-referenced-by-count": 44,
  "title": "Amorphization and anisotropic fracture dynamics during nanoindentation of silicon nitride: A multimillion atom molecular dynamics study",
  "prefix": "10.1063",
  "volume": "77",
  "author": [
    {
      "given": "Phillip",
      "family": "Walsh",
      "sequence": "first",
      "affiliation": [
        {
          "name": "Concurrent Computing Laboratory for Materials Simulations, Department of Physics & Astronomy and Department of Computer Science, Louisiana State University, Baton Rouge, Louisiana\u200970803-4001"
        }
      ]
    },
    {
      "given": "Rajiv K.",
      "family": "Kalia",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Concurrent Computing Laboratory for Materials Simulations, Department of Physics & Astronomy and Department of Computer Science, Louisiana State University, Baton Rouge, Louisiana\u200970803-4001"
        }
      ]
    },
    {
      "given": "Aiichiro",
      "family": "Nakano",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Concurrent Computing Laboratory for Materials Simulations, Department of Physics & Astronomy and Department of Computer Science, Louisiana State University, Baton Rouge, Louisiana\u200970803-4001"
        }
      ]
    },
    {
      "given": "Priya",
      "family": "Vashishta",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Concurrent Computing Laboratory for Materials Simulations, Department of Physics & Astronomy and Department of Computer Science, Louisiana State University, Baton Rouge, Louisiana\u200970803-4001"
        }
      ]
    },
    {
      "given": "Subhash",
      "family": "Saini",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Numerical Aerospace Simulation Facility, Nasa\u2013Ames Research Center, Moffett Field, California\u200994035"
        }
      ]
    }
  ],
  "member": "317",
  "reference": [
    {
      "key": "2024020319220812200_r1",
      "doi-asserted-by": "crossref",
      "first-page": "433",
      "DOI": "10.1111/j.1151-2916.1998.tb02354.x",
      "volume": "81",
      "year": "1998",
      "journal-title": "J. Am. Ceram. Soc."
    },
    {
      "key": "2024020319220812200_r2"
    },
    {
      "key": "2024020319220812200_r3",
      "doi-asserted-by": "crossref",
      "first-page": "793",
      "DOI": "10.1116/1.586117",
      "volume": "10",
      "year": "1992",
      "journal-title": "J. Vac. Sci. Technol. B"
    },
    {
      "key": "2024020319220812200_r4",
      "doi-asserted-by": "crossref",
      "first-page": "57",
      "DOI": "10.1016/0039-6028(92)90861-Y",
      "volume": "271",
      "year": "1992",
      "journal-title": "Surf. Sci."
    },
    {
      "key": "2024020319220812200_r5",
      "first-page": "55",
      "volume": "18",
      "year": "1993",
      "journal-title": "Mater. Res. Bull."
    },
    {
      "key": "2024020319220812200_r6",
      "doi-asserted-by": "crossref",
      "first-page": "454",
      "DOI": "10.1126/science.248.4954.454",
      "volume": "248",
      "year": "1990",
      "journal-title": "Science"
    },
    {
      "key": "2024020319220812200_r7",
      "doi-asserted-by": "crossref",
      "first-page": "1260",
      "DOI": "10.1103/PhysRevLett.84.1260",
      "volume": "84",
      "year": "2000",
      "journal-title": "Phys. Rev. Lett."
    },
    {
      "key": "2024020319220812200_r8",
      "doi-asserted-by": "crossref",
      "first-page": "7705",
      "DOI": "10.1103/PhysRevB.47.7705",
      "volume": "47",
      "year": "1993",
      "journal-title": "Phys. Rev. B"
    },
    {
      "key": "2024020319220812200_r9"
    },
    {
      "key": "2024020319220812200_r10",
      "doi-asserted-by": "crossref",
      "first-page": "3138",
      "DOI": "10.1103/PhysRevLett.75.3138",
      "volume": "75",
      "year": "1995",
      "journal-title": "Phys. Rev. Lett."
    },
    {
      "key": "2024020319220812200_r11",
      "doi-asserted-by": "crossref",
      "first-page": "858",
      "DOI": "10.1103/PhysRevLett.75.858",
      "volume": "75",
      "year": "1995",
      "journal-title": "Phys. Rev. Lett."
    },
    {
      "key": "2024020319220812200_r12"
    },
    {
      "key": "2024020319220812200_r13",
      "doi-asserted-by": "crossref",
      "first-page": "1949",
      "DOI": "10.1016/0036-9748(89)90488-2",
      "volume": "23",
      "year": "1989",
      "journal-title": "Scr. Metall."
    },
    {
      "key": "2024020319220812200_r14",
      "doi-asserted-by": "crossref",
      "first-page": "1129",
      "DOI": "10.1557/JMR.1991.1129",
      "volume": "6",
      "year": "1991",
      "journal-title": "J. Mater. Res."
    },
    {
      "key": "2024020319220812200_r15",
      "doi-asserted-by": "crossref",
      "first-page": "2156",
      "DOI": "10.1103/PhysRevLett.60.2156",
      "volume": "60",
      "year": "1988",
      "journal-title": "Phys. Rev. Lett."
    },
    {
      "key": "2024020319220812200_r16",
      "doi-asserted-by": "crossref",
      "first-page": "83",
      "DOI": "10.1103/PhysRevLett.68.83",
      "volume": "68",
      "year": "1992",
      "journal-title": "Phys. Rev. Lett."
    },
    {
      "key": "2024020319220812200_r17",
      "doi-asserted-by": "crossref",
      "first-page": "647",
      "DOI": "10.1126/science.249.4969.647",
      "volume": "249",
      "year": "1990",
      "journal-title": "Science"
    },
    {
      "key": "2024020319220812200_r18",
      "doi-asserted-by": "crossref",
      "first-page": "2149",
      "DOI": "10.1103/PhysRevLett.80.2149",
      "volume": "80",
      "year": "1998",
      "journal-title": "Phys. Rev. Lett."
    },
    {
      "key": "2024020319220812200_r19",
      "doi-asserted-by": "crossref",
      "first-page": "1559",
      "DOI": "10.1126/science.255.5051.1559",
      "volume": "255",
      "year": "1992",
      "journal-title": "Science"
    }
  ],
  "container-title": "Applied Physics Letters",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://pubs.aip.org/aip/apl/article-pdf/77/26/4332/18554683/4332_1_online.pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "syndication"
    },
    {
      "URL": "https://pubs.aip.org/aip/apl/article-pdf/77/26/4332/18554683/4332_1_online.pdf",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2024,
        2,
        3
      ]
    ],
    "date-time": "2024-02-03T19:22:19Z",
    "timestamp": 1706988139000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://pubs.aip.org/apl/article/77/26/4332/514874/Amorphization-and-anisotropic-fracture-dynamics"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        2000,
        12,
        25
      ]
    ]
  },
  "references-count": 19,
  "journal-issue": {
    "issue": "26",
    "published-print": {
      "date-parts": [
        [
          2000,
          12,
          25
        ]
      ]
    }
  },
  "URL": "http://dx.doi.org/10.1063/1.1328371",
  "relation": {},
  "ISSN": [
    "0003-6951",
    "1077-3118"
  ],
  "subject": [],
  "published-other": {
    "date-parts": [
      [
        2000,
        12,
        25
      ]
    ]
  },
  "published": {
    "date-parts": [
      [
        2000,
        12,
        25
      ]
    ]
  }
}