DOI: 10.1063/1.1306638. Focused nanoparticle-beam deposition of patterned microstructures

Focused nanoparticle-beam deposition of patterned microstructures

10.1063/1.1306638

Crossref journal-article

AIP Publishing

Applied Physics Letters (317)

Abstract

A method was developed for fabricating nanocrystalline microstructures. This method involves synthesizing nanoparticles in a thermal plasma expanded through a nozzle, and then focusing the nanoparticles to a collimated beam by means of aerodynamic lenses. High-aspect-ratio structures of silicon carbide and titanium were deposited on stationary substrates, and lines and two-dimensional patterns were deposited on translated substrates. Linewidths equalled approximately 50 μm. This approach allows the use of much larger nozzles than in previously developed micronozzle methods, and also allows size selection of the particles that are deposited.

Bibliography

Di Fonzo, F., Gidwani, A., Fan, M. H., Neumann, D., Iordanoglou, D. I., Heberlein, J. V. R., McMurry, P. H., Girshick, S. L., Tymiak, N., Gerberich, W. W., & Rao, N. P. (2000). Focused nanoparticle-beam deposition of patterned microstructures. Applied Physics Letters, 77(6), 910â912.

Authors 11

F. Di Fonzo (first)
A. Gidwani (additional)
M. H. Fan (additional)
D. Neumann (additional)
D. I. Iordanoglou (additional)
J. V. R. Heberlein (additional)
P. H. McMurry (additional)
S. L. Girshick (additional)
N. Tymiak (additional)
W. W. Gerberich (additional)
N. P. Rao (additional)

References 13 Referenced 86

10.1016/S0965-9773(97)00035-4 / Nanostruct. Mater. (1997)
10.1016/S0021-8502(97)10015-5 / J. Aerosol Sci. (1998)
{'key': '2024020318341232700_r3'}
10.1109/27.763025 / IEEE Trans. Plasma Sci. (1999)
10.1023/A:1010033413357 / J. Nanoparticle Res. (1999)
10.1016/0021-8502(90)90002-F / J. Aerosol Sci. (1990)
10.1080/02786829408959748 / Aerosol. Sci. Technol. (1995)
10.1080/02786829408959749 / Aerosol. Sci. Technol. (1995)
10.1143/JJAP.23.L910 / Jpn. J. Appl. Phys., Part 2 (1984)
{'key': '2024020318341232700_r10', 'first-page': '121', 'volume': '286', 'year': '1993', 'journal-title': 'Mater. Res. Soc. Symp. Proc.'} / Mater. Res. Soc. Symp. Proc. (1993)
10.1143/JJAP.37.5342 / Jpn. J. Appl. Phys., Part 1 (1998)
10.1143/JJAP.38.5397 / Jpn. J. Appl. Phys., Part 1 (1999)
10.1016/S0924-4247(98)00059-4 / Sens. Actuators A (1998)

Dates

Type	When
Created	23 years, 1 month ago (July 26, 2002, 9:31 a.m.)
Deposited	1 year, 7 months ago (Feb. 3, 2024, 1:34 p.m.)
Indexed	2 months, 2 weeks ago (June 16, 2025, 5:44 p.m.)
Issued	25 years ago (Aug. 7, 2000)
Published	25 years ago (Aug. 7, 2000)
Published Print	25 years ago (Aug. 7, 2000)

Funders 0

None

BibTeX

@article{Di_Fonzo_2000, title={Focused nanoparticle-beam deposition of patterned microstructures}, volume={77}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.1306638}, DOI={10.1063/1.1306638}, number={6}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={Di Fonzo, F. and Gidwani, A. and Fan, M. H. and Neumann, D. and Iordanoglou, D. I. and Heberlein, J. V. R. and McMurry, P. H. and Girshick, S. L. and Tymiak, N. and Gerberich, W. W. and Rao, N. P.}, year={2000}, month=aug, pages={910–912} }

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