DOI: 10.1063/1.1289273. Mechanisms of transition-metal gettering in silicon

Mechanisms of transition-metal gettering in silicon

10.1063/1.1289273

Crossref journal-article

AIP Publishing

Journal of Applied Physics (317)

Abstract

The atomic process, kinetics, and equilibrium thermodynamics underlying the gettering of transition-metal impurities in Si are reviewed. Methods for mathematical modeling of gettering are discussed and illustrated. Needs for further research are considered.

Bibliography

Myers, S. M., Seibt, M., & SchrÃ¶ter, W. (2000). Mechanisms of transition-metal gettering in silicon. Journal of Applied Physics, 88(7), 3795â3819.

Authors 3

S. M. Myers (first)
M. Seibt (additional)
W. Schröter (additional)

References 152 Referenced 244

{'key': '2024020518034863600_r1'}
{'key': '2024020518034863600_r2'}
{'key': '2024020518034863600_r3'}
{'key': '2024020518034863600_r4'}
10.1007/BF00617708 / Appl. Phys. A: Solids Surf. (1983)
{'key': '2024020518034863600_r6'}
{'key': '2024020518034863600_r7'}
10.1103/PhysRevLett.81.1243 / Phys. Rev. Lett. (1998)
{'key': '2024020518034863600_r9'}
10.1063/1.366643 / J. Appl. Phys. (1998)
10.1002/(SICI)1521-396X(199901)171:1<301::AID-PSSA301>3.0.CO;2-P / Phys. Status Solidi A (1999)
10.1103/PhysRevLett.64.196 / Phys. Rev. Lett. (1990)
10.1149/1.1838948 / J. Electrochem. Soc. (1998)
10.1103/PhysRevB.41.5770 / Phys. Rev. B (1990)
10.1063/1.116754 / Appl. Phys. Lett. (1996)
10.1063/1.121964 / Appl. Phys. Lett. (1998)
10.1063/1.93565 / Appl. Phys. Lett. (1982)
10.1063/1.357339 / J. Appl. Phys. (1994)
{'key': '2024020518034863600_r19'}
10.1063/1.354021 / J. Appl. Phys. (1993)
10.1103/PhysRevB.55.9577 / Phys. Rev. B (1997)
10.1007/s003390050968 / Appl. Phys. A: Mater. Sci. Process. (1999)
{'key': '2024020518034863600_r23', 'first-page': '1991', 'volume': '196–201', 'year': '1995', 'journal-title': 'Mater. Sci. Forum'} / Mater. Sci. Forum (1995)
{'key': '2024020518034863600_r24'}
10.1063/1.368438 / J. Appl. Phys. (1998)
10.1063/1.357285 / J. Appl. Phys. (1994)
10.1063/1.118718 / Appl. Phys. Lett. (1997)
10.1063/1.363183 / J. Appl. Phys. (1996)
10.1063/1.113246 / Appl. Phys. Lett. (1995)
10.1063/1.363322 / J. Appl. Phys. (1996)
10.1063/1.89340 / Appl. Phys. Lett. (1977)
{'key': '2024020518034863600_r32', 'first-page': '144', 'volume': '12', 'year': '1989', 'journal-title': 'Semicond. Int.'} / Semicond. Int. (1989)
{'key': '2024020518034863600_r32a', 'first-page': '154', 'volume': '12', 'year': '1989', 'journal-title': 'Semicond. Int.'} / Semicond. Int. (1989)
10.1063/1.359479 / J. Appl. Phys. (1995)
10.4028/www.scientific.net/DDF.75.121 / Defect Diffus. Forum (1991)
10.1103/PhysRevB.45.13345 / Phys. Rev. B (1992)
10.1149/1.2069180 / J. Electrochem. Soc. (1992)
10.1103/PhysRevB.57.7015 / Phys. Rev. B (1998)
10.1143/JJAP.28.1282 / Jpn. J. Appl. Phys., Part 1 (1989)
10.1063/1.104938 / Appl. Phys. Lett. (1991)
{'key': '2024020518034863600_r40', 'first-page': '227', 'volume': '83–87', 'year': '1992', 'journal-title': 'Mater. Sci. Forum'} / Mater. Sci. Forum (1992)
10.1063/1.91097 / Appl. Phys. Lett. (1979)
10.1063/1.332941 / J. Appl. Phys. (1984)
10.1063/1.343349 / J. Appl. Phys. (1989)
10.1063/1.113411 / Appl. Phys. Lett. (1995)
10.1080/01418618908205063 / Philos. Mag. A (1989)
10.1103/PhysRevB.43.6510 / Phys. Rev. B (1991)
{'key': '2024020518034863600_r47'}
10.1063/1.100446 / Appl. Phys. Lett. (1988)
10.1016/0038-1101(79)90130-8 / Solid-State Electron. (1979)
10.1063/1.105154 / Appl. Phys. Lett. (1991)
10.1063/1.337042 / J. Appl. Phys. (1986)
10.1143/JJAP.16.857 / Jpn. J. Appl. Phys. (1977)
{'key': '2024020518034863600_r53', 'first-page': '2055', 'volume': '242', 'year': '1968', 'journal-title': 'Trans. Soc. Min. Eng. AIME'} / Trans. Soc. Min. Eng. AIME (1968)
10.1007/BF00323437 / Appl. Phys. A: Solids Surf. (1991)
10.1016/0038-1101(75)90030-1 / Solid-State Electron. (1975)
10.1063/1.365796 / J. Appl. Phys. (1997)
{'key': '2024020518034863600_r57', 'first-page': '707', 'volume': '38–41', 'year': '1989', 'journal-title': 'Mater. Sci. Forum'} / Mater. Sci. Forum (1989)
10.1016/0022-3697(58)90053-2 / J. Phys. Chem. Solids (1958)
10.1063/1.450975 / J. Chem. Phys. (1986)
10.1103/PhysRevB.35.248 / Phys. Rev. B (1987)
{'key': '2024020518034863600_r61'}
10.1002/(SICI)1521-396X(199803)166:1<171::AID-PSSA171>3.0.CO;2-2 / Phys. Status Solidi A (1998)
10.1016/S0921-5107(99)00514-0 / Mater. Sci. Eng. B (2000)
10.1149/1.1838889 / J. Electrochem. Soc. (1998)
{'key': '2024020518034863600_r65', 'first-page': '1389', 'volume': '7', 'year': '1997', 'journal-title': 'J. Phys. III'} / J. Phys. III (1997)
10.1103/PhysRevB.52.13726 / Phys. Rev. B (1995)
10.1016/0168-583X(95)00745-8 / Nucl. Instrum. Methods Phys. Res. B (1995)
10.1063/1.340164 / J. Appl. Phys. (1988)
{'key': '2024020518034863600_r68a', 'first-page': '215', 'volume': '104', 'year': '1988', 'journal-title': 'Mater. Res. Soc. Symp. Proc.'} / Mater. Res. Soc. Symp. Proc. (1988)
10.1143/JJAP.37.1689 / Jpn. J. Appl. Phys., Part 1 (1998)
10.1063/1.368127 / J. Appl. Phys. (1998)
10.1063/1.89385 / Appl. Phys. Lett. (1977)
10.1557/PROC-262-945 / Mater. Res. Soc. Symp. Proc. (1992)
10.1063/1.357285 / J. Appl. Phys. (1994)
10.1063/1.118718 / Appl. Phys. Lett. (1997)
{'key': '2024020518034863600_r75'}
10.1063/1.1654228 / Appl. Phys. Lett. (1972)
10.1063/1.321664 / J. Appl. Phys. (1975)
{'key': '2024020518034863600_r78', 'first-page': '303', 'volume': '32', 'year': '1993', 'journal-title': 'Jpn. J. Appl. Phys., Part 1'} / Jpn. J. Appl. Phys., Part 1 (1993)
10.1063/1.359953 / J. Appl. Phys. (1995)
10.1016/0254-0584(95)01673-I / Mater. Chem. Phys. (1996)
10.1103/PhysRevB.53.16637 / Phys. Rev. B (1996)
10.1063/1.368462 / J. Appl. Phys. (1998)
10.1016/0920-2307(91)90007-A / Mater. Sci. Rep. (1991)
10.1063/1.365193 / J. Appl. Phys. (1997)
10.1063/1.346643 / J. Appl. Phys. (1990)
{'key': '2024020518034863600_r86', 'first-page': '97', 'volume': '320', 'year': '1994', 'journal-title': 'Mater. Res. Soc. Symp. Proc.'} / Mater. Res. Soc. Symp. Proc. (1994)
10.1016/0168-583X(94)00494-3 / Nucl. Instrum. Methods Phys. Res. B (1995)
10.1007/BF02666189 / J. Electron. Mater. (1996)
10.1103/PhysRevB.59.7990 / Phys. Rev. B (1999)
10.1063/1.333210 / J. Appl. Phys. (1984)
10.1016/0921-5107(90)90009-Z / Mater. Sci. Eng., B (1990)
10.1063/1.110880 / Appl. Phys. Lett. (1994)
{'key': '2024020518034863600_r93', 'first-page': '1337', 'volume': '5', 'year': '1995', 'journal-title': 'J. Phys. III'} / J. Phys. III (1995)
10.1063/1.358563 / J. Appl. Phys. (1995)
{'key': '2024020518034863600_r95', 'first-page': '291', 'volume': '127–128', 'year': '1997', 'journal-title': 'Nucl. Instrum. Methods Phys. Res. B'} / Nucl. Instrum. Methods Phys. Res. B (1997)
{'key': '2024020518034863600_r96'}
10.1209/epl/i1998-00529-8 / Europhys. Lett. (1998)
{'key': '2024020518034863600_r98'}
10.1021/cr00102a003 / Chem. Rev. (1990)
{'key': '2024020518034863600_r100'}
10.1016/0304-3991(91)90078-K / Ultramicroscopy (1991)
{'key': '2024020518034863600_r102'}
{'key': '2024020518034863600_r103', 'first-page': '1786', 'volume': '13', 'year': '1988', 'journal-title': 'J. Mater. Res.'} / J. Mater. Res. (1988)
{'key': '2024020518034863600_r104', 'first-page': '33', 'volume': '316', 'year': '1994', 'journal-title': 'Mater. Res. Soc. Symp. Proc.'} / Mater. Res. Soc. Symp. Proc. (1994)
10.1063/1.113311 / Appl. Phys. Lett. (1995)
10.1016/0168-583X(94)00495-1 / Nucl. Instrum. Methods Phys. Res. B (1995)
10.1063/1.363381 / J. Appl. Phys. (1996)
10.1063/1.116839 / Appl. Phys. Lett. (1996)
10.1139/p96-868 / Can. J. Phys. (1996)
10.1063/1.361031 / J. Appl. Phys. (1996)
{'key': '2024020518034863600_r111', 'first-page': '297', 'volume': '127–128', 'year': '1997', 'journal-title': 'Nucl. Instrum. Methods Phys. Res. B'} / Nucl. Instrum. Methods Phys. Res. B (1997)
10.1016/S0040-6090(96)09515-6 / Thin Solid Films (1997)
10.1149/1.1838472 / J. Electrochem. Soc. (1998)
10.1063/1.123692 / Appl. Phys. Lett. (1999)
10.1063/1.369426 / J. Appl. Phys. (1999)
10.1016/S0039-6028(97)00029-0 / Surf. Sci. (1997)
{'key': '2024020518034863600_r117', 'first-page': '493', 'volume': '440', 'year': '1997', 'journal-title': 'Mater. Res. Soc. Symp. Proc.'} / Mater. Res. Soc. Symp. Proc. (1997)
10.1063/1.108760 / Appl. Phys. Lett. (1993)
10.1103/PhysRevLett.70.1643 / Phys. Rev. Lett. (1993)
{'key': '2024020518034863600_r120', 'first-page': '63', 'volume': '57–58', 'year': '1997', 'journal-title': 'Solid State Phenom.'} / Solid State Phenom. (1997)
10.1002/pssa.2210950118 / Phys. Status Solidi A (1986)
{'key': '2024020518034863600_r122', 'first-page': '235', 'volume': '69–70', 'year': '1999', 'journal-title': 'Solid State Phenom.'} / Solid State Phenom. (1999)
10.1002/pssa.2210640123 / Phys. Status Solidi A (1981)
10.1016/0378-4363(83)90263-2 / Physica B (1983)
{'key': '2024020518034863600_r125'}
{'key': '2024020518034863600_r126', 'first-page': '2458', 'volume': '50', 'year': '1994', 'journal-title': 'Phys. Rev. B'} / Phys. Rev. B (1994)
{'key': '2024020518034863600_r127', 'first-page': '355', 'volume': '57–58', 'year': '1997', 'journal-title': 'Solid State Phenom.'} / Solid State Phenom. (1997)
10.1063/1.365440 / J. Appl. Phys. (1997)
10.1143/JJAP.36.L380 / Jpn. J. Appl. Phys., Part 2 (1997)
10.1063/1.363236 / J. Appl. Phys. (1996)
10.1002/pssa.2210760126 / Phys. Status Solidi A (1983)
10.1016/S0921-5107(98)00287-6 / Mater. Sci. Eng., B (1999)
10.1103/PhysRevB.31.7979 / Phys. Rev. B (1985)
10.1149/1.2401685 / J. Electrochem. Soc. (1974)
{'key': '2024020518034863600_r135', 'first-page': '313', 'volume': '2', 'year': '1992', 'journal-title': 'J. Phys. III'} / J. Phys. III (1992)
10.1002/pssa.2211510215 / Phys. Status Solidi A (1995)
10.1109/16.704378 / IEEE Trans. Electron Devices (1998)
{'key': '2024020518034863600_r138', 'first-page': '151', 'volume': '10–12', 'year': '1986', 'journal-title': 'Mater. Sci. Forum'} / Mater. Sci. Forum (1986)
{'key': '2024020518034863600_r138a'}
10.1016/S0921-5107(99)00370-0 / Mater. Sci. Eng., B (2000)
{'key': '2024020518034863600_r140'}
10.1016/0927-796X(94)90009-4 / Mater. Sci. Eng., R. (1994)
10.1063/1.96980 / Appl. Phys. Lett. (1986)
10.1063/1.98650 / Appl. Phys. Lett. (1987)
10.1063/1.99975 / Appl. Phys. Lett. (1988)
10.1007/BF00343418 / Appl. Phys. A: Solids Surf. (1990)
10.1063/1.95364 / Appl. Phys. Lett. (1984)
10.1063/1.361040 / J. Appl. Phys. (1996)
10.1080/01418617808239224 / Philos. Mag. A (1978)
10.1063/1.322897 / J. Appl. Phys. (1976)

Dates

Type	When
Created	23 years, 1 month ago (July 26, 2002, 8:40 a.m.)
Deposited	1 year, 6 months ago (Feb. 5, 2024, 2:24 p.m.)
Indexed	1 month, 1 week ago (July 19, 2025, 11:44 p.m.)
Issued	24 years, 10 months ago (Oct. 1, 2000)
Published	24 years, 10 months ago (Oct. 1, 2000)
Published Print	24 years, 10 months ago (Oct. 1, 2000)

Funders 0

None

BibTeX

@article{Myers_2000, title={Mechanisms of transition-metal gettering in silicon}, volume={88}, ISSN={1089-7550}, url={http://dx.doi.org/10.1063/1.1289273}, DOI={10.1063/1.1289273}, number={7}, journal={Journal of Applied Physics}, publisher={AIP Publishing}, author={Myers, S. M. and Seibt, M. and Schröter, W.}, year={2000}, month=oct, pages={3795–3819} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        7,
        20
      ]
    ],
    "date-time": "2025-07-20T03:44:54Z",
    "timestamp": 1752983094022
  },
  "reference-count": 152,
  "publisher": "AIP Publishing",
  "issue": "7",
  "content-domain": {
    "domain": [
      "pubs.aip.org"
    ],
    "crossmark-restriction": true
  },
  "published-print": {
    "date-parts": [
      [
        2000,
        10,
        1
      ]
    ]
  },
  "abstract": "<jats:p>The atomic process, kinetics, and equilibrium thermodynamics underlying the gettering of transition-metal impurities in Si are reviewed. Methods for mathematical modeling of gettering are discussed and illustrated. Needs for further research are considered.</jats:p>",
  "DOI": "10.1063/1.1289273",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2002,
        7,
        26
      ]
    ],
    "date-time": "2002-07-26T12:40:45Z",
    "timestamp": 1027687245000
  },
  "page": "3795-3819",
  "update-policy": "http://dx.doi.org/10.1063/aip-crossmark-policy-page",
  "source": "Crossref",
  "is-referenced-by-count": 244,
  "title": "Mechanisms of transition-metal gettering in silicon",
  "prefix": "10.1063",
  "volume": "88",
  "author": [
    {
      "given": "S. M.",
      "family": "Myers",
      "sequence": "first",
      "affiliation": [
        {
          "name": "Sandia National Laboratories, Albuquerque, New Mexico, 87185-1056"
        }
      ]
    },
    {
      "given": "M.",
      "family": "Seibt",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "IV. Physikalisches Institut der Universit\u00e4t G\u00f6ttingen, Bunsenstrasse 13-15, D-37073\u2009G\u00f6ttingen, Germany"
        }
      ]
    },
    {
      "given": "W.",
      "family": "Schr\u00f6ter",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "IV. Physikalisches Institut der Universit\u00e4t G\u00f6ttingen, Bunsenstrasse 13-15, D-37073\u2009G\u00f6ttingen, Germany"
        }
      ]
    }
  ],
  "member": "317",
  "reference": [
    {
      "key": "2024020518034863600_r1"
    },
    {
      "key": "2024020518034863600_r2"
    },
    {
      "key": "2024020518034863600_r3"
    },
    {
      "key": "2024020518034863600_r4"
    },
    {
      "key": "2024020518034863600_r5",
      "doi-asserted-by": "crossref",
      "first-page": "1",
      "DOI": "10.1007/BF00617708",
      "volume": "30",
      "year": "1983",
      "journal-title": "Appl. Phys. A: Solids Surf."
    },
    {
      "key": "2024020518034863600_r6"
    },
    {
      "key": "2024020518034863600_r7"
    },
    {
      "key": "2024020518034863600_r8",
      "doi-asserted-by": "crossref",
      "first-page": "1243",
      "DOI": "10.1103/PhysRevLett.81.1243",
      "volume": "81",
      "year": "1998",
      "journal-title": "Phys. Rev. Lett."
    },
    {
      "key": "2024020518034863600_r9"
    },
    {
      "key": "2024020518034863600_r10",
      "doi-asserted-by": "crossref",
      "first-page": "580",
      "DOI": "10.1063/1.366643",
      "volume": "83",
      "year": "1998",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2024020518034863600_r11",
      "doi-asserted-by": "crossref",
      "first-page": "301",
      "DOI": "10.1002/(SICI)1521-396X(199901)171:1<301::AID-PSSA301>3.0.CO;2-P",
      "volume": "171",
      "year": "1999",
      "journal-title": "Phys. Status Solidi A"
    },
    {
      "key": "2024020518034863600_r12",
      "doi-asserted-by": "crossref",
      "first-page": "196",
      "DOI": "10.1103/PhysRevLett.64.196",
      "volume": "64",
      "year": "1990",
      "journal-title": "Phys. Rev. Lett."
    },
    {
      "key": "2024020518034863600_r13",
      "doi-asserted-by": "crossref",
      "first-page": "4259",
      "DOI": "10.1149/1.1838948",
      "volume": "145",
      "year": "1998",
      "journal-title": "J. Electrochem. Soc."
    },
    {
      "key": "2024020518034863600_r14",
      "doi-asserted-by": "crossref",
      "first-page": "5770",
      "DOI": "10.1103/PhysRevB.41.5770",
      "volume": "41",
      "year": "1990",
      "journal-title": "Phys. Rev. B"
    },
    {
      "key": "2024020518034863600_r15",
      "doi-asserted-by": "crossref",
      "first-page": "51",
      "DOI": "10.1063/1.116754",
      "volume": "68",
      "year": "1996",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020518034863600_r16",
      "doi-asserted-by": "crossref",
      "first-page": "1424",
      "DOI": "10.1063/1.121964",
      "volume": "73",
      "year": "1998",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020518034863600_r17",
      "doi-asserted-by": "crossref",
      "first-page": "440",
      "DOI": "10.1063/1.93565",
      "volume": "41",
      "year": "1982",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020518034863600_r18",
      "doi-asserted-by": "crossref",
      "first-page": "4432",
      "DOI": "10.1063/1.357339",
      "volume": "76",
      "year": "1994",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2024020518034863600_r19"
    },
    {
      "key": "2024020518034863600_r20",
      "doi-asserted-by": "crossref",
      "first-page": "7311",
      "DOI": "10.1063/1.354021",
      "volume": "73",
      "year": "1993",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2024020518034863600_r21",
      "doi-asserted-by": "crossref",
      "first-page": "9577",
      "DOI": "10.1103/PhysRevB.55.9577",
      "volume": "55",
      "year": "1997",
      "journal-title": "Phys. Rev. B"
    },
    {
      "key": "2024020518034863600_r22",
      "doi-asserted-by": "crossref",
      "first-page": "13",
      "DOI": "10.1007/s003390050968",
      "volume": "69",
      "year": "1999",
      "journal-title": "Appl. Phys. A: Mater. Sci. Process."
    },
    {
      "key": "2024020518034863600_r23",
      "first-page": "1991",
      "volume": "196\u2013201",
      "year": "1995",
      "journal-title": "Mater. Sci. Forum"
    },
    {
      "key": "2024020518034863600_r24"
    },
    {
      "key": "2024020518034863600_r25",
      "doi-asserted-by": "crossref",
      "first-page": "2459",
      "DOI": "10.1063/1.368438",
      "volume": "84",
      "year": "1998",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2024020518034863600_r26",
      "doi-asserted-by": "crossref",
      "first-page": "4540",
      "DOI": "10.1063/1.357285",
      "volume": "76",
      "year": "1994",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2024020518034863600_r27",
      "doi-asserted-by": "crossref",
      "first-page": "1876",
      "DOI": "10.1063/1.118718",
      "volume": "70",
      "year": "1997",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020518034863600_r28",
      "doi-asserted-by": "crossref",
      "first-page": "2665",
      "DOI": "10.1063/1.363183",
      "volume": "80",
      "year": "1996",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2024020518034863600_r29",
      "doi-asserted-by": "crossref",
      "first-page": "1231",
      "DOI": "10.1063/1.113246",
      "volume": "66",
      "year": "1995",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020518034863600_r30",
      "doi-asserted-by": "crossref",
      "first-page": "3717",
      "DOI": "10.1063/1.363322",
      "volume": "80",
      "year": "1996",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2024020518034863600_r31",
      "doi-asserted-by": "crossref",
      "first-page": "175",
      "DOI": "10.1063/1.89340",
      "volume": "30",
      "year": "1977",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020518034863600_r32",
      "first-page": "144",
      "volume": "12",
      "year": "1989",
      "journal-title": "Semicond. Int."
    },
    {
      "key": "2024020518034863600_r32a",
      "first-page": "154",
      "volume": "12",
      "year": "1989",
      "journal-title": "Semicond. Int."
    },
    {
      "key": "2024020518034863600_r33",
      "doi-asserted-by": "crossref",
      "first-page": "4169",
      "DOI": "10.1063/1.359479",
      "volume": "77",
      "year": "1995",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2024020518034863600_r34",
      "doi-asserted-by": "crossref",
      "first-page": "121",
      "DOI": "10.4028/www.scientific.net/DDF.75.121",
      "volume": "75",
      "year": "1991",
      "journal-title": "Defect Diffus. Forum"
    },
    {
      "key": "2024020518034863600_r35",
      "doi-asserted-by": "crossref",
      "first-page": "13345",
      "DOI": "10.1103/PhysRevB.45.13345",
      "volume": "45",
      "year": "1992",
      "journal-title": "Phys. Rev. B"
    },
    {
      "key": "2024020518034863600_r36",
      "doi-asserted-by": "crossref",
      "first-page": "256",
      "DOI": "10.1149/1.2069180",
      "volume": "139",
      "year": "1992",
      "journal-title": "J. Electrochem. Soc."
    },
    {
      "key": "2024020518034863600_r37",
      "doi-asserted-by": "crossref",
      "first-page": "7015",
      "DOI": "10.1103/PhysRevB.57.7015",
      "volume": "57",
      "year": "1998",
      "journal-title": "Phys. Rev. B"
    },
    {
      "key": "2024020518034863600_r38",
      "doi-asserted-by": "crossref",
      "first-page": "1282",
      "DOI": "10.1143/JJAP.28.1282",
      "volume": "28",
      "year": "1989",
      "journal-title": "Jpn. J. Appl. Phys., Part 1"
    },
    {
      "key": "2024020518034863600_r39",
      "doi-asserted-by": "crossref",
      "first-page": "2240",
      "DOI": "10.1063/1.104938",
      "volume": "58",
      "year": "1991",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020518034863600_r40",
      "first-page": "227",
      "volume": "83\u201387",
      "year": "1992",
      "journal-title": "Mater. Sci. Forum"
    },
    {
      "key": "2024020518034863600_r41",
      "doi-asserted-by": "crossref",
      "first-page": "211",
      "DOI": "10.1063/1.91097",
      "volume": "35",
      "year": "1979",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020518034863600_r42",
      "doi-asserted-by": "crossref",
      "first-page": "3518",
      "DOI": "10.1063/1.332941",
      "volume": "55",
      "year": "1984",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2024020518034863600_r43",
      "doi-asserted-by": "crossref",
      "first-page": "3868",
      "DOI": "10.1063/1.343349",
      "volume": "65",
      "year": "1989",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2024020518034863600_r44",
      "doi-asserted-by": "crossref",
      "first-page": "860",
      "DOI": "10.1063/1.113411",
      "volume": "66",
      "year": "1995",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020518034863600_r45",
      "doi-asserted-by": "crossref",
      "first-page": "337",
      "DOI": "10.1080/01418618908205063",
      "volume": "59",
      "year": "1989",
      "journal-title": "Philos. Mag. A"
    },
    {
      "key": "2024020518034863600_r46",
      "doi-asserted-by": "crossref",
      "first-page": "6510",
      "DOI": "10.1103/PhysRevB.43.6510",
      "volume": "43",
      "year": "1991",
      "journal-title": "Phys. Rev. B"
    },
    {
      "key": "2024020518034863600_r47"
    },
    {
      "key": "2024020518034863600_r48",
      "doi-asserted-by": "crossref",
      "first-page": "1269",
      "DOI": "10.1063/1.100446",
      "volume": "53",
      "year": "1988",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020518034863600_r49",
      "doi-asserted-by": "crossref",
      "first-page": "801",
      "DOI": "10.1016/0038-1101(79)90130-8",
      "volume": "22",
      "year": "1979",
      "journal-title": "Solid-State Electron."
    },
    {
      "key": "2024020518034863600_r50",
      "doi-asserted-by": "crossref",
      "first-page": "1653",
      "DOI": "10.1063/1.105154",
      "volume": "58",
      "year": "1991",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020518034863600_r51",
      "doi-asserted-by": "crossref",
      "first-page": "3590",
      "DOI": "10.1063/1.337042",
      "volume": "59",
      "year": "1986",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2024020518034863600_r52",
      "doi-asserted-by": "crossref",
      "first-page": "857",
      "DOI": "10.1143/JJAP.16.857",
      "volume": "16",
      "year": "1977",
      "journal-title": "Jpn. J. Appl. Phys."
    },
    {
      "key": "2024020518034863600_r53",
      "first-page": "2055",
      "volume": "242",
      "year": "1968",
      "journal-title": "Trans. Soc. Min. Eng. AIME"
    },
    {
      "key": "2024020518034863600_r54",
      "doi-asserted-by": "crossref",
      "first-page": "65",
      "DOI": "10.1007/BF00323437",
      "volume": "53",
      "year": "1991",
      "journal-title": "Appl. Phys. A: Solids Surf."
    },
    {
      "key": "2024020518034863600_r55",
      "doi-asserted-by": "crossref",
      "first-page": "533",
      "DOI": "10.1016/0038-1101(75)90030-1",
      "volume": "18",
      "year": "1975",
      "journal-title": "Solid-State Electron."
    },
    {
      "key": "2024020518034863600_r56",
      "doi-asserted-by": "crossref",
      "first-page": "182",
      "DOI": "10.1063/1.365796",
      "volume": "82",
      "year": "1997",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2024020518034863600_r57",
      "first-page": "707",
      "volume": "38\u201341",
      "year": "1989",
      "journal-title": "Mater. Sci. Forum"
    },
    {
      "key": "2024020518034863600_r58",
      "doi-asserted-by": "crossref",
      "first-page": "335",
      "DOI": "10.1016/0022-3697(58)90053-2",
      "volume": "6",
      "year": "1958",
      "journal-title": "J. Phys. Chem. Solids"
    },
    {
      "key": "2024020518034863600_r59",
      "doi-asserted-by": "crossref",
      "first-page": "3520",
      "DOI": "10.1063/1.450975",
      "volume": "85",
      "year": "1986",
      "journal-title": "J. Chem. Phys."
    },
    {
      "key": "2024020518034863600_r60",
      "doi-asserted-by": "crossref",
      "first-page": "248",
      "DOI": "10.1103/PhysRevB.35.248",
      "volume": "35",
      "year": "1987",
      "journal-title": "Phys. Rev. B"
    },
    {
      "key": "2024020518034863600_r61"
    },
    {
      "key": "2024020518034863600_r62",
      "doi-asserted-by": "crossref",
      "first-page": "171",
      "DOI": "10.1002/(SICI)1521-396X(199803)166:1<171::AID-PSSA171>3.0.CO;2-2",
      "volume": "166",
      "year": "1998",
      "journal-title": "Phys. Status Solidi A"
    },
    {
      "key": "2024020518034863600_r63",
      "doi-asserted-by": "crossref",
      "first-page": "99",
      "DOI": "10.1016/S0921-5107(99)00514-0",
      "volume": "72",
      "year": "2000",
      "journal-title": "Mater. Sci. Eng. B"
    },
    {
      "key": "2024020518034863600_r64",
      "doi-asserted-by": "crossref",
      "first-page": "3889",
      "DOI": "10.1149/1.1838889",
      "volume": "145",
      "year": "1998",
      "journal-title": "J. Electrochem. Soc."
    },
    {
      "key": "2024020518034863600_r65",
      "first-page": "1389",
      "volume": "7",
      "year": "1997",
      "journal-title": "J. Phys. III"
    },
    {
      "key": "2024020518034863600_r66",
      "doi-asserted-by": "crossref",
      "first-page": "13726",
      "DOI": "10.1103/PhysRevB.52.13726",
      "volume": "52",
      "year": "1995",
      "journal-title": "Phys. Rev. B"
    },
    {
      "key": "2024020518034863600_r67",
      "doi-asserted-by": "crossref",
      "first-page": "424",
      "DOI": "10.1016/0168-583X(95)00745-8",
      "volume": "106",
      "year": "1995",
      "journal-title": "Nucl. Instrum. Methods Phys. Res. B"
    },
    {
      "key": "2024020518034863600_r68",
      "doi-asserted-by": "crossref",
      "first-page": "4444",
      "DOI": "10.1063/1.340164",
      "volume": "63",
      "year": "1988",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2024020518034863600_r68a",
      "first-page": "215",
      "volume": "104",
      "year": "1988",
      "journal-title": "Mater. Res. Soc. Symp. Proc."
    },
    {
      "key": "2024020518034863600_r69",
      "doi-asserted-by": "crossref",
      "first-page": "1689",
      "DOI": "10.1143/JJAP.37.1689",
      "volume": "37",
      "year": "1998",
      "journal-title": "Jpn. J. Appl. Phys., Part 1"
    },
    {
      "key": "2024020518034863600_r70",
      "doi-asserted-by": "crossref",
      "first-page": "713",
      "DOI": "10.1063/1.368127",
      "volume": "84",
      "year": "1998",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2024020518034863600_r71",
      "doi-asserted-by": "crossref",
      "first-page": "325",
      "DOI": "10.1063/1.89385",
      "volume": "30",
      "year": "1977",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020518034863600_r72",
      "doi-asserted-by": "crossref",
      "first-page": "945",
      "DOI": "10.1557/PROC-262-945",
      "volume": "262",
      "year": "1992",
      "journal-title": "Mater. Res. Soc. Symp. Proc."
    },
    {
      "key": "2024020518034863600_r73",
      "doi-asserted-by": "crossref",
      "first-page": "4540",
      "DOI": "10.1063/1.357285",
      "volume": "76",
      "year": "1994",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2024020518034863600_r74",
      "doi-asserted-by": "crossref",
      "first-page": "1876",
      "DOI": "10.1063/1.118718",
      "volume": "70",
      "year": "1997",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020518034863600_r75"
    },
    {
      "key": "2024020518034863600_r76",
      "doi-asserted-by": "crossref",
      "first-page": "485",
      "DOI": "10.1063/1.1654228",
      "volume": "21",
      "year": "1972",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020518034863600_r77",
      "doi-asserted-by": "crossref",
      "first-page": "600",
      "DOI": "10.1063/1.321664",
      "volume": "46",
      "year": "1975",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2024020518034863600_r78",
      "first-page": "303",
      "volume": "32",
      "year": "1993",
      "journal-title": "Jpn. J. Appl. Phys., Part 1"
    },
    {
      "key": "2024020518034863600_r79",
      "doi-asserted-by": "crossref",
      "first-page": "3727",
      "DOI": "10.1063/1.359953",
      "volume": "78",
      "year": "1995",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2024020518034863600_r80",
      "doi-asserted-by": "crossref",
      "first-page": "101",
      "DOI": "10.1016/0254-0584(95)01673-I",
      "volume": "44",
      "year": "1996",
      "journal-title": "Mater. Chem. Phys."
    },
    {
      "key": "2024020518034863600_r81",
      "doi-asserted-by": "crossref",
      "first-page": "16637",
      "DOI": "10.1103/PhysRevB.53.16637",
      "volume": "53",
      "year": "1996",
      "journal-title": "Phys. Rev. B"
    },
    {
      "key": "2024020518034863600_r82",
      "doi-asserted-by": "crossref",
      "first-page": "3078",
      "DOI": "10.1063/1.368462",
      "volume": "84",
      "year": "1998",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2024020518034863600_r83",
      "doi-asserted-by": "crossref",
      "first-page": "141",
      "DOI": "10.1016/0920-2307(91)90007-A",
      "volume": "6",
      "year": "1991",
      "journal-title": "Mater. Sci. Rep."
    },
    {
      "key": "2024020518034863600_r84",
      "doi-asserted-by": "crossref",
      "first-page": "6513",
      "DOI": "10.1063/1.365193",
      "volume": "81",
      "year": "1997",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2024020518034863600_r85",
      "doi-asserted-by": "crossref",
      "first-page": "1629",
      "DOI": "10.1063/1.346643",
      "volume": "68",
      "year": "1990",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2024020518034863600_r86",
      "first-page": "97",
      "volume": "320",
      "year": "1994",
      "journal-title": "Mater. Res. Soc. Symp. Proc."
    },
    {
      "key": "2024020518034863600_r87",
      "doi-asserted-by": "crossref",
      "first-page": "253",
      "DOI": "10.1016/0168-583X(94)00494-3",
      "volume": "96",
      "year": "1995",
      "journal-title": "Nucl. Instrum. Methods Phys. Res. B"
    },
    {
      "key": "2024020518034863600_r88",
      "doi-asserted-by": "crossref",
      "first-page": "151",
      "DOI": "10.1007/BF02666189",
      "volume": "25",
      "year": "1996",
      "journal-title": "J. Electron. Mater."
    },
    {
      "key": "2024020518034863600_r89",
      "doi-asserted-by": "crossref",
      "first-page": "7990",
      "DOI": "10.1103/PhysRevB.59.7990",
      "volume": "59",
      "year": "1999",
      "journal-title": "Phys. Rev. B"
    },
    {
      "key": "2024020518034863600_r90",
      "doi-asserted-by": "crossref",
      "first-page": "1162",
      "DOI": "10.1063/1.333210",
      "volume": "55",
      "year": "1984",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2024020518034863600_r91",
      "doi-asserted-by": "crossref",
      "first-page": "49",
      "DOI": "10.1016/0921-5107(90)90009-Z",
      "volume": "7",
      "year": "1990",
      "journal-title": "Mater. Sci. Eng., B"
    },
    {
      "key": "2024020518034863600_r92",
      "doi-asserted-by": "crossref",
      "first-page": "97",
      "DOI": "10.1063/1.110880",
      "volume": "64",
      "year": "1994",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020518034863600_r93",
      "first-page": "1337",
      "volume": "5",
      "year": "1995",
      "journal-title": "J. Phys. III"
    },
    {
      "key": "2024020518034863600_r94",
      "doi-asserted-by": "crossref",
      "first-page": "3858",
      "DOI": "10.1063/1.358563",
      "volume": "77",
      "year": "1995",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2024020518034863600_r95",
      "first-page": "291",
      "volume": "127\u2013128",
      "year": "1997",
      "journal-title": "Nucl. Instrum. Methods Phys. Res. B"
    },
    {
      "key": "2024020518034863600_r96"
    },
    {
      "key": "2024020518034863600_r97",
      "doi-asserted-by": "crossref",
      "first-page": "707",
      "DOI": "10.1209/epl/i1998-00529-8",
      "volume": "44",
      "year": "1998",
      "journal-title": "Europhys. Lett."
    },
    {
      "key": "2024020518034863600_r98"
    },
    {
      "key": "2024020518034863600_r99",
      "doi-asserted-by": "crossref",
      "first-page": "607",
      "DOI": "10.1021/cr00102a003",
      "volume": "90",
      "year": "1990",
      "journal-title": "Chem. Rev."
    },
    {
      "key": "2024020518034863600_r100"
    },
    {
      "key": "2024020518034863600_r101",
      "doi-asserted-by": "crossref",
      "first-page": "265",
      "DOI": "10.1016/0304-3991(91)90078-K",
      "volume": "35",
      "year": "1991",
      "journal-title": "Ultramicroscopy"
    },
    {
      "key": "2024020518034863600_r102"
    },
    {
      "key": "2024020518034863600_r103",
      "first-page": "1786",
      "volume": "13",
      "year": "1988",
      "journal-title": "J. Mater. Res."
    },
    {
      "key": "2024020518034863600_r104",
      "first-page": "33",
      "volume": "316",
      "year": "1994",
      "journal-title": "Mater. Res. Soc. Symp. Proc."
    },
    {
      "key": "2024020518034863600_r105",
      "doi-asserted-by": "crossref",
      "first-page": "1889",
      "DOI": "10.1063/1.113311",
      "volume": "66",
      "year": "1995",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020518034863600_r106",
      "doi-asserted-by": "crossref",
      "first-page": "257",
      "DOI": "10.1016/0168-583X(94)00495-1",
      "volume": "96",
      "year": "1995",
      "journal-title": "Nucl. Instrum. Methods Phys. Res. B"
    },
    {
      "key": "2024020518034863600_r107",
      "doi-asserted-by": "crossref",
      "first-page": "4322",
      "DOI": "10.1063/1.363381",
      "volume": "80",
      "year": "1996",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2024020518034863600_r108",
      "doi-asserted-by": "crossref",
      "first-page": "3060",
      "DOI": "10.1063/1.116839",
      "volume": "69",
      "year": "1996",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020518034863600_r109",
      "doi-asserted-by": "crossref",
      "first-page": "S248",
      "DOI": "10.1139/p96-868",
      "volume": "74",
      "year": "1996",
      "journal-title": "Can. J. Phys."
    },
    {
      "key": "2024020518034863600_r110",
      "doi-asserted-by": "crossref",
      "first-page": "1337",
      "DOI": "10.1063/1.361031",
      "volume": "79",
      "year": "1996",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2024020518034863600_r111",
      "first-page": "297",
      "volume": "127\u2013128",
      "year": "1997",
      "journal-title": "Nucl. Instrum. Methods Phys. Res. B"
    },
    {
      "key": "2024020518034863600_r112",
      "doi-asserted-by": "crossref",
      "first-page": "64",
      "DOI": "10.1016/S0040-6090(96)09515-6",
      "volume": "300",
      "year": "1997",
      "journal-title": "Thin Solid Films"
    },
    {
      "key": "2024020518034863600_r113",
      "doi-asserted-by": "crossref",
      "first-page": "1400",
      "DOI": "10.1149/1.1838472",
      "volume": "145",
      "year": "1998",
      "journal-title": "J. Electrochem. Soc."
    },
    {
      "key": "2024020518034863600_r114",
      "doi-asserted-by": "crossref",
      "first-page": "1857",
      "DOI": "10.1063/1.123692",
      "volume": "74",
      "year": "1999",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020518034863600_r115",
      "doi-asserted-by": "crossref",
      "first-page": "94",
      "DOI": "10.1063/1.369426",
      "volume": "85",
      "year": "1999",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2024020518034863600_r116",
      "doi-asserted-by": "crossref",
      "first-page": "497",
      "DOI": "10.1016/S0039-6028(97)00029-0",
      "volume": "380",
      "year": "1997",
      "journal-title": "Surf. Sci."
    },
    {
      "key": "2024020518034863600_r117",
      "first-page": "493",
      "volume": "440",
      "year": "1997",
      "journal-title": "Mater. Res. Soc. Symp. Proc."
    },
    {
      "key": "2024020518034863600_r118",
      "doi-asserted-by": "crossref",
      "first-page": "1116",
      "DOI": "10.1063/1.108760",
      "volume": "62",
      "year": "1993",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020518034863600_r119",
      "doi-asserted-by": "crossref",
      "first-page": "1643",
      "DOI": "10.1103/PhysRevLett.70.1643",
      "volume": "70",
      "year": "1993",
      "journal-title": "Phys. Rev. Lett."
    },
    {
      "key": "2024020518034863600_r120",
      "first-page": "63",
      "volume": "57\u201358",
      "year": "1997",
      "journal-title": "Solid State Phenom."
    },
    {
      "key": "2024020518034863600_r121",
      "doi-asserted-by": "crossref",
      "first-page": "149",
      "DOI": "10.1002/pssa.2210950118",
      "volume": "95",
      "year": "1986",
      "journal-title": "Phys. Status Solidi A"
    },
    {
      "key": "2024020518034863600_r122",
      "first-page": "235",
      "volume": "69\u201370",
      "year": "1999",
      "journal-title": "Solid State Phenom."
    },
    {
      "key": "2024020518034863600_r123",
      "doi-asserted-by": "crossref",
      "first-page": "215",
      "DOI": "10.1002/pssa.2210640123",
      "volume": "64",
      "year": "1981",
      "journal-title": "Phys. Status Solidi A"
    },
    {
      "key": "2024020518034863600_r124",
      "doi-asserted-by": "crossref",
      "first-page": "297",
      "DOI": "10.1016/0378-4363(83)90263-2",
      "volume": "116",
      "year": "1983",
      "journal-title": "Physica B"
    },
    {
      "key": "2024020518034863600_r125"
    },
    {
      "key": "2024020518034863600_r126",
      "first-page": "2458",
      "volume": "50",
      "year": "1994",
      "journal-title": "Phys. Rev. B"
    },
    {
      "key": "2024020518034863600_r127",
      "first-page": "355",
      "volume": "57\u201358",
      "year": "1997",
      "journal-title": "Solid State Phenom."
    },
    {
      "key": "2024020518034863600_r128",
      "doi-asserted-by": "crossref",
      "first-page": "7345",
      "DOI": "10.1063/1.365440",
      "volume": "81",
      "year": "1997",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2024020518034863600_r129",
      "doi-asserted-by": "crossref",
      "first-page": "L380",
      "DOI": "10.1143/JJAP.36.L380",
      "volume": "36",
      "year": "1997",
      "journal-title": "Jpn. J. Appl. Phys., Part 2"
    },
    {
      "key": "2024020518034863600_r130",
      "doi-asserted-by": "crossref",
      "first-page": "3275",
      "DOI": "10.1063/1.363236",
      "volume": "80",
      "year": "1996",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2024020518034863600_r131",
      "doi-asserted-by": "crossref",
      "first-page": "223",
      "DOI": "10.1002/pssa.2210760126",
      "volume": "76",
      "year": "1983",
      "journal-title": "Phys. Status Solidi A"
    },
    {
      "key": "2024020518034863600_r132",
      "doi-asserted-by": "crossref",
      "first-page": "149",
      "DOI": "10.1016/S0921-5107(98)00287-6",
      "volume": "58",
      "year": "1999",
      "journal-title": "Mater. Sci. Eng., B"
    },
    {
      "key": "2024020518034863600_r133",
      "doi-asserted-by": "crossref",
      "first-page": "7979",
      "DOI": "10.1103/PhysRevB.31.7979",
      "volume": "31",
      "year": "1985",
      "journal-title": "Phys. Rev. B"
    },
    {
      "key": "2024020518034863600_r134",
      "doi-asserted-by": "crossref",
      "first-page": "1350",
      "DOI": "10.1149/1.2401685",
      "volume": "121",
      "year": "1974",
      "journal-title": "J. Electrochem. Soc."
    },
    {
      "key": "2024020518034863600_r135",
      "first-page": "313",
      "volume": "2",
      "year": "1992",
      "journal-title": "J. Phys. III"
    },
    {
      "key": "2024020518034863600_r136",
      "doi-asserted-by": "crossref",
      "first-page": "379",
      "DOI": "10.1002/pssa.2211510215",
      "volume": "151",
      "year": "1995",
      "journal-title": "Phys. Status Solidi A"
    },
    {
      "key": "2024020518034863600_r137",
      "doi-asserted-by": "crossref",
      "first-page": "1776",
      "DOI": "10.1109/16.704378",
      "volume": "45",
      "year": "1998",
      "journal-title": "IEEE Trans. Electron Devices"
    },
    {
      "key": "2024020518034863600_r138",
      "first-page": "151",
      "volume": "10\u201312",
      "year": "1986",
      "journal-title": "Mater. Sci. Forum"
    },
    {
      "key": "2024020518034863600_r138a"
    },
    {
      "key": "2024020518034863600_r139",
      "doi-asserted-by": "crossref",
      "first-page": "175",
      "DOI": "10.1016/S0921-5107(99)00370-0",
      "volume": "71",
      "year": "2000",
      "journal-title": "Mater. Sci. Eng., B"
    },
    {
      "key": "2024020518034863600_r140"
    },
    {
      "key": "2024020518034863600_r141",
      "doi-asserted-by": "crossref",
      "first-page": "105",
      "DOI": "10.1016/0927-796X(94)90009-4",
      "volume": "13",
      "year": "1994",
      "journal-title": "Mater. Sci. Eng., R."
    },
    {
      "key": "2024020518034863600_r142",
      "doi-asserted-by": "crossref",
      "first-page": "151",
      "DOI": "10.1063/1.96980",
      "volume": "48",
      "year": "1986",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020518034863600_r143",
      "doi-asserted-by": "crossref",
      "first-page": "1439",
      "DOI": "10.1063/1.98650",
      "volume": "51",
      "year": "1987",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020518034863600_r144",
      "doi-asserted-by": "crossref",
      "first-page": "1323",
      "DOI": "10.1063/1.99975",
      "volume": "53",
      "year": "1988",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020518034863600_r145",
      "doi-asserted-by": "crossref",
      "first-page": "197",
      "DOI": "10.1007/BF00343418",
      "volume": "50",
      "year": "1990",
      "journal-title": "Appl. Phys. A: Solids Surf."
    },
    {
      "key": "2024020518034863600_r146",
      "doi-asserted-by": "crossref",
      "first-page": "781",
      "DOI": "10.1063/1.95364",
      "volume": "45",
      "year": "1984",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020518034863600_r147",
      "doi-asserted-by": "crossref",
      "first-page": "2145",
      "DOI": "10.1063/1.361040",
      "volume": "79",
      "year": "1996",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2024020518034863600_r148",
      "doi-asserted-by": "crossref",
      "first-page": "131",
      "DOI": "10.1080/01418617808239224",
      "volume": "38",
      "year": "1978",
      "journal-title": "Philos. Mag. A"
    },
    {
      "key": "2024020518034863600_r149",
      "doi-asserted-by": "crossref",
      "first-page": "1812",
      "DOI": "10.1063/1.322897",
      "volume": "47",
      "year": "1976",
      "journal-title": "J. Appl. Phys."
    }
  ],
  "container-title": "Journal of Applied Physics",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://pubs.aip.org/aip/jap/article-pdf/88/7/3795/19135088/3795_1_online.pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "syndication"
    },
    {
      "URL": "https://pubs.aip.org/aip/jap/article-pdf/88/7/3795/19135088/3795_1_online.pdf",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2024,
        2,
        5
      ]
    ],
    "date-time": "2024-02-05T19:24:38Z",
    "timestamp": 1707161078000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://pubs.aip.org/jap/article/88/7/3795/291324/Mechanisms-of-transition-metal-gettering-in"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        2000,
        10,
        1
      ]
    ]
  },
  "references-count": 152,
  "journal-issue": {
    "issue": "7",
    "published-print": {
      "date-parts": [
        [
          2000,
          10,
          1
        ]
      ]
    }
  },
  "URL": "http://dx.doi.org/10.1063/1.1289273",
  "relation": {},
  "ISSN": [
    "0021-8979",
    "1089-7550"
  ],
  "subject": [],
  "published-other": {
    "date-parts": [
      [
        2000,
        10,
        1
      ]
    ]
  },
  "published": {
    "date-parts": [
      [
        2000,
        10,
        1
      ]
    ]
  }
}