DOI: 10.1063/1.125536. Feasibility of transmission x-ray microscopy at 4 keV with spatial resolutions below 150 nm

Feasibility of transmission x-ray microscopy at 4 keV with spatial resolutions below 150 nm

10.1063/1.125536

Crossref journal-article

AIP Publishing

Applied Physics Letters (317)

Abstract

The feasibility of a transmission x-ray microscope operating in the 3-7 keV photon energy range using phase zone plates (ZPs) has been tested. It has been demonstrated that, at a photon energy of 4 keV, structures smaller than 150 nm can be resolved with good contrast using exposure times in the second to minute range. A large diameter gold ZP was used as condenser and a tungsten ZP with an outermost zone width of 128 nm was used as a high spatial resolution imaging objective lens. Images with a field size of 10×10 μm2 were acquired using a charge coupled device camera optically coupled to a phosphor screen. The corresponding pixel size in the object plane was 70 nm.

Bibliography

Kaulich, B., Oestreich, S., Salome, M., Barrett, R., Susini, J., Wilhein, T., Di Fabrizio, E., Gentili, M., & Charalambous, P. (1999). Feasibility of transmission x-ray microscopy at 4 keV with spatial resolutions below 150 nm. Applied Physics Letters, 75(26), 4061â4063.

Authors 9

B. Kaulich (first)
S. Oestreich (additional)
M. Salome (additional)
R. Barrett (additional)
J. Susini (additional)
T. Wilhein (additional)
E. Di Fabrizio (additional)
M. Gentili (additional)
P. Charalambous (additional)

References 14 Referenced 18

{'key': '2024020317263932100_r1', 'first-page': '29', 'volume': '8', 'year': '1995', 'journal-title': 'Synchrotron Radiation News'} / Synchrotron Radiation News (1995)
{'key': '2024020317263932100_r2', 'first-page': '95', 'volume': '93', 'year': '1994', 'journal-title': 'Optik (Stuttgart)'} / Optik (Stuttgart) (1994)
10.1080/08940889808260940 / Synchrotron Radiation News (1998)
{'key': '2024020317263932100_r4'}
{'key': '2024020317263932100_r5', 'first-page': '374', 'volume': '4', 'year': '1998', 'journal-title': 'Microsc. Anal.'} / Microsc. Anal. (1998)
10.1063/1.1149690 / Rev. Sci. Instrum. (1999)
{'key': '2024020317263932100_r7', 'first-page': '3855', 'volume': '14', 'year': '1998', 'journal-title': 'J. Vac. Sci. Technol. B'} / J. Vac. Sci. Technol. B (1998)
10.1038/44791 / Nature (London) (1999)
{'key': '2024020317263932100_r9'}
{'key': '2024020317263932100_r10', 'first-page': '417', 'volume': '2708', 'year': '1996', 'journal-title': 'SPIE'} / SPIE (1996)
10.1118/1.598736 / Med. Phys. (1999)
{'key': '2024020317263932100_r12', 'first-page': '1737', 'volume': '67', 'year': '1999', 'journal-title': 'Rev. Sci. Instrum.'} / Rev. Sci. Instrum. (1999)
{'key': '2024020317263932100_r13'}
{'key': '2024020317263932100_r14'}

Dates

Type	When
Created	23 years, 1 month ago (July 26, 2002, 9:29 a.m.)
Deposited	1 year, 6 months ago (Feb. 3, 2024, 12:26 p.m.)
Indexed	1 year, 6 months ago (Feb. 6, 2024, 10:22 p.m.)
Issued	25 years, 8 months ago (Dec. 27, 1999)
Published	25 years, 8 months ago (Dec. 27, 1999)
Published Print	25 years, 8 months ago (Dec. 27, 1999)

Funders 0

None

BibTeX

@article{Kaulich_1999, title={Feasibility of transmission x-ray microscopy at 4 keV with spatial resolutions below 150 nm}, volume={75}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.125536}, DOI={10.1063/1.125536}, number={26}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={Kaulich, B. and Oestreich, S. and Salome, M. and Barrett, R. and Susini, J. and Wilhein, T. and Di Fabrizio, E. and Gentili, M. and Charalambous, P.}, year={1999}, month=dec, pages={4061–4063} }

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