DOI: 10.1063/1.125484. Analysis of the stress-induced leakage current and related trap distribution

Analysis of the stress-induced leakage current and related trap distribution

10.1063/1.125484

Crossref journal-article

AIP Publishing

Applied Physics Letters (317)

Abstract

The amplitudes of stress-induced leakage currents (SILC) generated for a constant injected dose are measured for oxide thicknesses between 3.5 and 9 nm. Then, the doses necessary to generate the same amplitude of SILC for all oxide thicknesses at 6 MV/cm are measured. The analysis of these results, considering that the SILC is due to a trap-assisted tunneling mechanism, demonstrates that a uniform trap distribution throughout the oxide cannot explain the thickness dependence of the SILC, indicating that the trap distribution is an important feature in the understanding of the oxide thickness dependence of the SILC.

Bibliography

Riess, P., Ghibaudo, G., & Pananakakis, G. (1999). Analysis of the stress-induced leakage current and related trap distribution. Applied Physics Letters, 75(24), 3871â3873.

Authors 3

P. Riess (first)
G. Ghibaudo (additional)
G. Pananakakis (additional)

References 8 Referenced 14

{'key': '2024020317222156300_r1'}
10.1109/16.557724 / IEEE Trans. Electron Devices (1997)
{'key': '2024020317222156300_r3', 'first-page': '323', 'volume-title': 'Tech. Dig. Int. Electron Devices Meet.', 'year': '1996'} / Tech. Dig. Int. Electron Devices Meet. (1996)
10.1109/16.701488 / IEEE Trans. Electron Devices (1998)
{'key': '2024020317222156300_r5'}
10.1063/1.111789 / Appl. Phys. Lett. (1994)
10.1063/1.119186 / Appl. Phys. Lett. (1997)
10.1016/S0026-2714(99)00104-3 / Microelectron. Reliab. (1999)

Dates

Type	When
Created	23 years, 1 month ago (July 26, 2002, 9:36 a.m.)
Deposited	1 year, 6 months ago (Feb. 3, 2024, 12:22 p.m.)
Indexed	4 months, 4 weeks ago (April 2, 2025, 6:23 a.m.)
Issued	25 years, 8 months ago (Dec. 13, 1999)
Published	25 years, 8 months ago (Dec. 13, 1999)
Published Print	25 years, 8 months ago (Dec. 13, 1999)

Funders 0

None

BibTeX

@article{Riess_1999, title={Analysis of the stress-induced leakage current and related trap distribution}, volume={75}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.125484}, DOI={10.1063/1.125484}, number={24}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={Riess, P. and Ghibaudo, G. and Pananakakis, G.}, year={1999}, month=dec, pages={3871–3873} }

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