DOI: 10.1063/1.125311. Reconstruction of three-dimensional chemistry and geometry using focused ion beam microscopy

Reconstruction of three-dimensional chemistry and geometry using focused ion beam microscopy

10.1063/1.125311

Crossref journal-article

AIP Publishing

Applied Physics Letters (317)

Abstract

A technique to reconstruct high resolution three-dimensional structural images and chemical maps using focused ion beam microscopy is presented. A focused ion beam microscope is used to collect secondary electron images and secondary ion mass spectroscopy elemental maps as a function of depth. These images and elemental maps are then used to reconstruct volume image and chemical maps with 20 nm lateral and depth resolutions. Methods to improve lateral resolution and to reduce uncertainties due to differential sputtering are also discussed.

Bibliography

Dunn, D. N., & Hull, R. (1999). Reconstruction of three-dimensional chemistry and geometry using focused ion beam microscopy. Applied Physics Letters, 75(21), 3414â3416.

Authors 2

D. N. Dunn (first)
R. Hull (additional)

References 15 Referenced 82

10.1063/1.1144104 / Rev. Sci. Instrum. (1993)
10.1116/1.571234 / J. Vac. Sci. Technol. (1981)
10.1021/ac00238a005 / Anal. Chem. (1982)
{'key': '2024020317141732700_r4', 'first-page': '25', 'volume': '18', 'year': '1985', 'journal-title': 'Beitr. Eletronemenmkrosk. Direktabb. Oberfl.'} / Beitr. Eletronemenmkrosk. Direktabb. Oberfl. (1985)
10.1007/978-3-7091-3943-1_9 / Mikrochim. Acta Suppl (1983)
10.1007/BF01244467 / Mikrochim. Acta (1992)
10.1007/BF00321252 / Fresenius J. Anal. Chem. (1993)
10.1002/sia.740210303 / Surf. Interface Anal. (1994)
{'key': '2024020317141732700_r9', 'first-page': '1028', 'volume': '136', 'year': '1998', 'journal-title': 'Nucl. Instrum. Methods Phys. Res. B'} / Nucl. Instrum. Methods Phys. Res. B (1998)
10.1002/(SICI)1096-9918(199709)25:10<788::AID-SIA300>3.0.CO;2-W / Surf. Interface Anal. (1997)
10.1016/0304-3991(88)90305-1 / Ultramicroscopy (1988)
{'key': '2024020317141732700_r12'}
10.1103/PhysRev.184.383 / Phys. Rev. (1969)
10.1080/00337577008235052 / Radiat. Eff. (1970)
{'key': '2024020317141732700_r15'}

Dates

Type	When
Created	23 years, 1 month ago (July 26, 2002, 9:29 a.m.)
Deposited	1 year, 6 months ago (Feb. 3, 2024, 12:14 p.m.)
Indexed	2 months, 1 week ago (June 21, 2025, 8:24 a.m.)
Issued	25 years, 9 months ago (Nov. 22, 1999)
Published	25 years, 9 months ago (Nov. 22, 1999)
Published Print	25 years, 9 months ago (Nov. 22, 1999)

Funders 0

None

BibTeX

@article{Dunn_1999, title={Reconstruction of three-dimensional chemistry and geometry using focused ion beam microscopy}, volume={75}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.125311}, DOI={10.1063/1.125311}, number={21}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={Dunn, D. N. and Hull, R.}, year={1999}, month=nov, pages={3414–3416} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        6,
        21
      ]
    ],
    "date-time": "2025-06-21T12:24:22Z",
    "timestamp": 1750508662805
  },
  "reference-count": 15,
  "publisher": "AIP Publishing",
  "issue": "21",
  "content-domain": {
    "domain": [
      "pubs.aip.org"
    ],
    "crossmark-restriction": true
  },
  "published-print": {
    "date-parts": [
      [
        1999,
        11,
        22
      ]
    ]
  },
  "abstract": "<jats:p>A technique to reconstruct high resolution three-dimensional structural images and chemical maps using focused ion beam microscopy is presented. A focused ion beam microscope is used to collect secondary electron images and secondary ion mass spectroscopy elemental maps as a function of depth. These images and elemental maps are then used to reconstruct volume image and chemical maps with 20 nm lateral and depth resolutions. Methods to improve lateral resolution and to reduce uncertainties due to differential sputtering are also discussed.</jats:p>",
  "DOI": "10.1063/1.125311",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2002,
        7,
        26
      ]
    ],
    "date-time": "2002-07-26T13:29:08Z",
    "timestamp": 1027690148000
  },
  "page": "3414-3416",
  "update-policy": "http://dx.doi.org/10.1063/aip-crossmark-policy-page",
  "source": "Crossref",
  "is-referenced-by-count": 82,
  "title": "Reconstruction of three-dimensional chemistry and geometry using focused ion beam microscopy",
  "prefix": "10.1063",
  "volume": "75",
  "author": [
    {
      "given": "D. N.",
      "family": "Dunn",
      "sequence": "first",
      "affiliation": [
        {
          "name": "Department of Materials Science and Engineering, University of Virginia, Charlottesville, Virginia\u200922903"
        }
      ]
    },
    {
      "given": "R.",
      "family": "Hull",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Department of Materials Science and Engineering, University of Virginia, Charlottesville, Virginia\u200922903"
        }
      ]
    }
  ],
  "member": "317",
  "reference": [
    {
      "key": "2024020317141732700_r1",
      "doi-asserted-by": "crossref",
      "first-page": "1105",
      "DOI": "10.1063/1.1144104",
      "volume": "64",
      "year": "1993",
      "journal-title": "Rev. Sci. Instrum."
    },
    {
      "key": "2024020317141732700_r2",
      "doi-asserted-by": "crossref",
      "first-page": "1158",
      "DOI": "10.1116/1.571234",
      "volume": "19",
      "year": "1981",
      "journal-title": "J. Vac. Sci. Technol."
    },
    {
      "key": "2024020317141732700_r3",
      "doi-asserted-by": "crossref",
      "first-page": "2",
      "DOI": "10.1021/ac00238a005",
      "volume": "54",
      "year": "1982",
      "journal-title": "Anal. Chem."
    },
    {
      "key": "2024020317141732700_r4",
      "first-page": "25",
      "volume": "18",
      "year": "1985",
      "journal-title": "Beitr. Eletronemenmkrosk. Direktabb. Oberfl."
    },
    {
      "key": "2024020317141732700_r5",
      "doi-asserted-by": "crossref",
      "first-page": "111",
      "DOI": "10.1007/978-3-7091-3943-1_9",
      "volume": "10",
      "year": "1983",
      "journal-title": "Mikrochim. Acta Suppl"
    },
    {
      "key": "2024020317141732700_r6",
      "doi-asserted-by": "crossref",
      "first-page": "137",
      "DOI": "10.1007/BF01244467",
      "volume": "107",
      "year": "1992",
      "journal-title": "Mikrochim. Acta"
    },
    {
      "key": "2024020317141732700_r7",
      "doi-asserted-by": "crossref",
      "first-page": "594",
      "DOI": "10.1007/BF00321252",
      "volume": "346",
      "year": "1993",
      "journal-title": "Fresenius J. Anal. Chem."
    },
    {
      "key": "2024020317141732700_r8",
      "doi-asserted-by": "crossref",
      "first-page": "177",
      "DOI": "10.1002/sia.740210303",
      "volume": "21",
      "year": "1994",
      "journal-title": "Surf. Interface Anal."
    },
    {
      "key": "2024020317141732700_r9",
      "first-page": "1028",
      "volume": "136",
      "year": "1998",
      "journal-title": "Nucl. Instrum. Methods Phys. Res. B"
    },
    {
      "key": "2024020317141732700_r10",
      "doi-asserted-by": "crossref",
      "first-page": "788",
      "DOI": "10.1002/(SICI)1096-9918(199709)25:10<788::AID-SIA300>3.0.CO;2-W",
      "volume": "25",
      "year": "1997",
      "journal-title": "Surf. Interface Anal."
    },
    {
      "key": "2024020317141732700_r11",
      "doi-asserted-by": "crossref",
      "first-page": "115",
      "DOI": "10.1016/0304-3991(88)90305-1",
      "volume": "24",
      "year": "1988",
      "journal-title": "Ultramicroscopy"
    },
    {
      "key": "2024020317141732700_r12"
    },
    {
      "key": "2024020317141732700_r13",
      "doi-asserted-by": "crossref",
      "first-page": "383",
      "DOI": "10.1103/PhysRev.184.383",
      "volume": "184",
      "year": "1969",
      "journal-title": "Phys. Rev."
    },
    {
      "key": "2024020317141732700_r14",
      "doi-asserted-by": "crossref",
      "first-page": "107",
      "DOI": "10.1080/00337577008235052",
      "volume": "6",
      "year": "1970",
      "journal-title": "Radiat. Eff."
    },
    {
      "key": "2024020317141732700_r15"
    }
  ],
  "container-title": "Applied Physics Letters",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://pubs.aip.org/aip/apl/article-pdf/75/21/3414/18545866/3414_1_online.pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "syndication"
    },
    {
      "URL": "https://pubs.aip.org/aip/apl/article-pdf/75/21/3414/18545866/3414_1_online.pdf",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2024,
        2,
        3
      ]
    ],
    "date-time": "2024-02-03T17:14:28Z",
    "timestamp": 1706980468000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://pubs.aip.org/apl/article/75/21/3414/516141/Reconstruction-of-three-dimensional-chemistry-and"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        1999,
        11,
        22
      ]
    ]
  },
  "references-count": 15,
  "journal-issue": {
    "issue": "21",
    "published-print": {
      "date-parts": [
        [
          1999,
          11,
          22
        ]
      ]
    }
  },
  "URL": "http://dx.doi.org/10.1063/1.125311",
  "relation": {},
  "ISSN": [
    "0003-6951",
    "1077-3118"
  ],
  "subject": [],
  "published-other": {
    "date-parts": [
      [
        1999,
        11,
        22
      ]
    ]
  },
  "published": {
    "date-parts": [
      [
        1999,
        11,
        22
      ]
    ]
  }
}