DOI: 10.1063/1.125149. Silicon dopant imaging by dissipation force microscopy

Silicon dopant imaging by dissipation force microscopy

10.1063/1.125149

Crossref journal-article

AIP Publishing

Applied Physics Letters (317)

Abstract

Noncontact damping of a cantilever vibrating near a silicon surface was used to measure localized electrical dissipation. The dependence of the damping on tip-sample distance, applied voltage, carrier mobility, and dopant density was studied for n- and p-type silicon samples with dopant densities of 1014–1018 cm−3. Dopant imaging with 150 nm spatial resolution was demonstrated.

Bibliography

Stowe, T. D., Kenny, T. W., Thomson, D. J., & Rugar, D. (1999). Silicon dopant imaging by dissipation force microscopy. Applied Physics Letters, 75(18), 2785â2787.

Authors 4

T. D. Stowe (first)
T. W. Kenny (additional)
D. J. Thomson (additional)
D. Rugar (additional)

References 13 Referenced 77

10.1063/1.106088 / Appl. Phys. Lett. (1991)
10.1007/s003390051173 / Appl. Phys. A: Solids Surf. (1998)
10.1063/1.367456 / J. Appl. Phys. (1998)
10.1063/1.119519 / Appl. Phys. Lett. (1997)
10.1142/S0218625X9700122X / Surf. Rev. Lett. (1997)
10.1063/1.108321 / Appl. Phys. Lett. (1992)
10.1063/1.119522 / Appl. Phys. Lett. (1997)
10.1063/1.347347 / J. Appl. Phys. (1991)
10.1063/1.365726 / J. Appl. Phys. (1997)
{'key': '2024020317082342200_r10'}
{'key': '2024020317082342200_r11'}
10.1116/1.590760 / J. Vac. Sci. Technol. B (1999)
10.1063/1.102096 / Appl. Phys. Lett. (1989)

Dates

Type	When
Created	23 years ago (July 26, 2002, 9:36 a.m.)
Deposited	1 year, 6 months ago (Feb. 3, 2024, 12:08 p.m.)
Indexed	4 months ago (April 17, 2025, 1:49 a.m.)
Issued	25 years, 9 months ago (Nov. 1, 1999)
Published	25 years, 9 months ago (Nov. 1, 1999)
Published Print	25 years, 9 months ago (Nov. 1, 1999)

Funders 0

None

BibTeX

@article{Stowe_1999, title={Silicon dopant imaging by dissipation force microscopy}, volume={75}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.125149}, DOI={10.1063/1.125149}, number={18}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={Stowe, T. D. and Kenny, T. W. and Thomson, D. J. and Rugar, D.}, year={1999}, month=nov, pages={2785–2787} }

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