Abstract
Single-walled carbon nanotubes are synthesized by chemical vapor deposition of methane at controlled locations on a substrate using patterned catalytic islands. The combined synthesis and microfabrication technique presented here allows a large number of ohmically contacted nanotube devices with controllable length to be placed on a single substrate. Transport studies demonstrate ohmic contacting, giving two-terminal resistances as low as 20 kΩ at low temperatures.
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@article{Soh_1999, title={Integrated nanotube circuits: Controlled growth and ohmic contacting of single-walled carbon nanotubes}, volume={75}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.124462}, DOI={10.1063/1.124462}, number={5}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={Soh, Hyongsok T. and Quate, Calvin F. and Morpurgo, Alberto F. and Marcus, Charles M. and Kong, Jing and Dai, Hongjie}, year={1999}, month=aug, pages={627–629} }