DOI: 10.1063/1.124350. High-sensitivity piezoresistive cantilevers under 1000 Å thick

High-sensitivity piezoresistive cantilevers under 1000 Å thick

10.1063/1.124350

Crossref journal-article

AIP Publishing

Applied Physics Letters (317)

Abstract

Ultrathin, high-sensitivity piezoresistive cantilevers were constructed using vapor-phase epitaxy to grow the conducting layer. A fourfold reduction in thickness was achieved over the thinnest implanted piezoresistive cantilevers, allowing improved force or displacement sensitivity and increased bandwidth. In cantilevers 890 Å thick, the dopant is well confined to the surface, and the sensitivity is 70% of the theoretical maximum. A cantilever fabricated for high force resolution has a minimum detectable force of 8.6 fN/Hz in air. Additionally, the 1/f noise is shown to follow the relation proposed by Hooge [Phys. Lett A 29, 139 (1969)], increasing in inverse proportion to the number of carriers.

Bibliography

Harley, J. A., & Kenny, T. W. (1999). High-sensitivity piezoresistive cantilevers under 1000 Ã thick. Applied Physics Letters, 75(2), 289â291.

Authors 2

J. A. Harley (first)
T. W. Kenny (additional)

References 15 Referenced 162

{'key': '2024020316325071200_r1'}
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10.1063/1.1145232 / Rev. Sci. Instrum. (1994)
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{'key': '2024020316325071200_r7'}
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Dates

Type	When
Created	23 years, 1 month ago (July 26, 2002, 8:42 a.m.)
Deposited	1 year, 6 months ago (Feb. 3, 2024, 11:33 a.m.)
Indexed	2 months, 2 weeks ago (June 10, 2025, 2:44 p.m.)
Issued	26 years, 1 month ago (July 12, 1999)
Published	26 years, 1 month ago (July 12, 1999)
Published Print	26 years, 1 month ago (July 12, 1999)

Funders 0

None

BibTeX

@article{Harley_1999, title={High-sensitivity piezoresistive cantilevers under 1000 Å thick}, volume={75}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.124350}, DOI={10.1063/1.124350}, number={2}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={Harley, J. A. and Kenny, T. W.}, year={1999}, month=jul, pages={289–291} }

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