DOI: 10.1063/1.124305. High-quality near-field optical probes by tube etching

High-quality near-field optical probes by tube etching

10.1063/1.124305

Crossref journal-article

AIP Publishing

Applied Physics Letters (317)

Abstract

A method called tube etching for the fabrication of near-field optical probes is presented. Tip formation occurs inside a cylindrical cavity formed by the polymer coating of an optical fiber which is not stripped away prior to etching in hydrofluoric acid. The influence of temperature, etchant concentration, and fiber type on the tip quality is studied. A tip formation mechanism for the given geometry is proposed. The procedure overcomes drawbacks of the conventional etching techniques while still producing large cone angles: (i) tips with reproducible shapes are formed in a high yield, (ii) the surface roughness on the taper is drastically reduced, and (iii) the tip quality is insensitive to vibrations and temperature fluctuations during the etching process. After aluminum coating, optical probes with well-defined apertures are obtained. Due to the smooth glass surface the aluminum coating is virtually free of pinholes.

Bibliography

StÃ¶ckle, R., Fokas, C., Deckert, V., Zenobi, R., Sick, B., Hecht, B., & Wild, U. P. (1999). High-quality near-field optical probes by tube etching. Applied Physics Letters, 75(2), 160â162.

Authors 7

Raoul Stöckle (first)
Christian Fokas (additional)
Volker Deckert (additional)
Renato Zenobi (additional)
Beate Sick (additional)
Bert Hecht (additional)
Urs P. Wild (additional)

References 17 Referenced 246

10.1016/B978-0-12-029912-6.50009-9 / Adv. Opt. Electron. Microsc. (1991)
10.1063/1.106940 / Appl. Phys. Lett. (1992)
10.1364/OL.20.000970 / Opt. Lett. (1995)
10.1016/0304-3991(95)00122-0 / Ultramicroscopy (1995)
{'key': '2024020316294269200_r5', 'first-page': '2941', 'volume': '68', 'year': '1996', 'journal-title': 'Appl. Phys. Lett.'} / Appl. Phys. Lett. (1996)
10.1063/1.122387 / Appl. Phys. Lett. (1998)
10.1063/1.121564 / Appl. Phys. Lett. (1998)
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10.1364/AO.34.001215 / Appl. Opt. (1995)
10.1046/j.1365-2818.1997.00173.x / J. Microsc. (1997)
10.1063/1.118540 / Appl. Phys. Lett. (1997)
{'key': '2024020316294269200_r12'}
10.1063/1.1149045 / Rev. Sci. Instrum. (1998)
{'key': '2024020316294269200_r14'}
{'key': '2024020316294269200_r15'}
{'key': '2024020316294269200_r16'}
10.1364/AO.37.007289 / Appl. Opt. (1998)

Dates

Type	When
Created	23 years, 1 month ago (July 26, 2002, 9:29 a.m.)
Deposited	1 year, 7 months ago (Feb. 3, 2024, 11:29 a.m.)
Indexed	1 month ago (Aug. 5, 2025, 8:32 a.m.)
Issued	26 years, 1 month ago (July 12, 1999)
Published	26 years, 1 month ago (July 12, 1999)
Published Print	26 years, 1 month ago (July 12, 1999)

Funders 0

None

BibTeX

@article{St_ckle_1999, title={High-quality near-field optical probes by tube etching}, volume={75}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.124305}, DOI={10.1063/1.124305}, number={2}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={Stöckle, Raoul and Fokas, Christian and Deckert, Volker and Zenobi, Renato and Sick, Beate and Hecht, Bert and Wild, Urs P.}, year={1999}, month=jul, pages={160–162} }

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