DOI: 10.1063/1.123677. Non-Arrhenius temperature dependence of reliability in ultrathin silicon dioxide films

Non-Arrhenius temperature dependence of reliability in ultrathin silicon dioxide films

10.1063/1.123677

Crossref journal-article

AIP Publishing

Applied Physics Letters (317)

Abstract

The non-Arrhenius temperature dependence observed in the charge-to-breakdown data in thin oxides is related to the temperature dependence of the defect buildup in the same films. For each temperature, this defect buildup is studied as a function of the defect generation probability and the total number of defects at breakdown. Each of these quantities is shown to have its own unique temperature dependence, which when combined gives the results observed for the charge-to-breakdown data. As the oxide layers are made thinner, the temperature dependence of the defect generation probability dominates these observations.

Bibliography

DiMaria, D. J., & Stathis, J. H. (1999). Non-Arrhenius temperature dependence of reliability in ultrathin silicon dioxide films. Applied Physics Letters, 74(12), 1752â1754.

Authors 2

D. J. DiMaria (first)
J. H. Stathis (additional)

References 10 Referenced 102

{'key': '2024020315540729700_r1'}
10.1063/1.120299 / Appl. Phys. Lett. (1997)
10.1063/1.116678 / Appl. Phys. Lett. (1996)
10.1063/1.118999 / Appl. Phys. Lett. (1997)
10.1063/1.359905 / J. Appl. Phys. (1995)
10.1063/1.352936 / J. Appl. Phys. (1993)
10.1063/1.342824 / J. Appl. Phys. (1989)
10.1557/PROC-380-187 / Mater. Res. Soc. Symp. Proc. (1995)
{'key': '2024020315540729700_r9', 'first-page': '4404', 'volume': '35', 'year': '1987', 'journal-title': 'Phys. Rev. B'} / Phys. Rev. B (1987)
{'key': '2024020315540729700_r10'}

Dates

Type	When
Created	23 years, 1 month ago (July 26, 2002, 9:31 a.m.)
Deposited	1 year, 6 months ago (Feb. 3, 2024, 10:54 a.m.)
Indexed	4 months, 2 weeks ago (April 16, 2025, 2:12 a.m.)
Issued	26 years, 5 months ago (March 22, 1999)
Published	26 years, 5 months ago (March 22, 1999)
Published Print	26 years, 5 months ago (March 22, 1999)

Funders 0

None

BibTeX

@article{DiMaria_1999, title={Non-Arrhenius temperature dependence of reliability in ultrathin silicon dioxide films}, volume={74}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.123677}, DOI={10.1063/1.123677}, number={12}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={DiMaria, D. J. and Stathis, J. H.}, year={1999}, month=mar, pages={1752–1754} }

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