DOI: 10.1063/1.122948. High-speed force sensor for force microscopy and profilometry utilizing a quartz tuning fork

High-speed force sensor for force microscopy and profilometry utilizing a quartz tuning fork

10.1063/1.122948

Crossref journal-article

AIP Publishing

Applied Physics Letters (317)

Abstract

Force sensors are key elements of atomic force microscopes and surface profilometers. Sensors with an integrated deflection meter are particularly desirable. Here, quartz tuning forks as used in watches are utilized as force sensors. A novel technique is employed which simplifies the interpretation of the data and increases the imaging speed by at least one order of magnitude compared to previous implementations. The variation of the imaging signal with distance fits well to a Hertzian contact model. Images of compact discs and calibration gratings, which have been obtained with scanning speeds up to 230 μm/s, are presented.

Bibliography

Giessibl, F. J. (1998). High-speed force sensor for force microscopy and profilometry utilizing a quartz tuning fork. Applied Physics Letters, 73(26), 3956â3958.

Authors 1

Franz J. Giessibl (first)

References 20 Referenced 546

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{'key': '2024020315264707700_r2', 'first-page': '21', 'volume': '182', 'year': '1967', 'journal-title': 'Proc. Inst. Mech. Eng.'} / Proc. Inst. Mech. Eng. (1967)
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Dates

Type	When
Created	23 years, 1 month ago (July 26, 2002, 8:49 a.m.)
Deposited	1 year, 6 months ago (Feb. 3, 2024, 10:26 a.m.)
Indexed	3 days, 22 hours ago (Aug. 23, 2025, 9:49 p.m.)
Issued	26 years, 7 months ago (Dec. 28, 1998)
Published	26 years, 7 months ago (Dec. 28, 1998)
Published Print	26 years, 7 months ago (Dec. 28, 1998)

Funders 0

None

BibTeX

@article{Giessibl_1998, title={High-speed force sensor for force microscopy and profilometry utilizing a quartz tuning fork}, volume={73}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.122948}, DOI={10.1063/1.122948}, number={26}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={Giessibl, Franz J.}, year={1998}, month=dec, pages={3956–3958} }

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