DOI: 10.1063/1.122912. Growth of highly oriented carbon nanotubes by plasma-enhanced hot filament chemical vapor deposition

Growth of highly oriented carbon nanotubes by plasma-enhanced hot filament chemical vapor deposition

10.1063/1.122912

Crossref journal-article

AIP Publishing

Applied Physics Letters (317)

Abstract

Highly oriented, multiwalled carbon nanotubes were grown on polished polycrystalline and single crystal nickel substrates by plasma enhanced hot filament chemical vapor deposition at temperatures below 666 °C. The carbon nanotubes range from 10 to 500 nm in diameter and 0.1 to 50 μm in length depending on growth conditions. Acetylene is used as the carbon source for the growth of the carbon nanotubes and ammonia is used for dilution gas and catalysis. The plasma intensity, acetylene to ammonia gas ratio, and their flow rates, etc. affect the diameters and uniformity of the carbon nanotubes.

Bibliography

Huang, Z. P., Xu, J. W., Ren, Z. F., Wang, J. H., Siegal, M. P., & Provencio, P. N. (1998). Growth of highly oriented carbon nanotubes by plasma-enhanced hot filament chemical vapor deposition. Applied Physics Letters, 73(26), 3845â3847.

Authors 6

Z. P. Huang (first)
J. W. Xu (additional)
Z. F. Ren (additional)
J. H. Wang (additional)
M. P. Siegal (additional)
P. N. Provencio (additional)

References 17 Referenced 239

10.1038/354056a0 / Nature (London) (1991)
{'key': '2024020315290118400_r2'}
10.1126/science.273.5274.483 / Science (1996)
10.1038/41972 / Nature (London) (1997)
10.1063/1.118055 / Appl. Phys. Lett. (1996)
10.1126/science.274.5293.1701 / Science (1996)
{'key': '2024020315290118400_r7', 'first-page': '646', 'volume': '275', 'year': '1997', 'journal-title': 'Science'} / Science (1997)
10.1063/1.118700 / Appl. Phys. Lett. (1997)
10.1126/science.265.5176.1212 / Science (1994)
10.1103/PhysRevB.55.9391 / Phys. Rev. B (1997)
10.1063/1.118978 / Appl. Phys. Lett. (1997)
10.1063/1.117638 / Appl. Phys. Lett. (1996)
10.1126/science.269.5230.1550 / Science (1995)
10.1126/science.270.5239.1179 / Science (1995)
10.1126/science.278.5335.100 / Science (1997)
10.1126/science.282.5391.1105 / Science (1998)
{'key': '2024020315290118400_r17'}

Dates

Type	When
Created	23 years, 1 month ago (July 26, 2002, 9:31 a.m.)
Deposited	1 year, 7 months ago (Feb. 3, 2024, 10:29 a.m.)
Indexed	1 month, 2 weeks ago (July 16, 2025, 8:09 a.m.)
Issued	26 years, 8 months ago (Dec. 28, 1998)
Published	26 years, 8 months ago (Dec. 28, 1998)
Published Print	26 years, 8 months ago (Dec. 28, 1998)

Funders 0

None

BibTeX

@article{Huang_1998, title={Growth of highly oriented carbon nanotubes by plasma-enhanced hot filament chemical vapor deposition}, volume={73}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.122912}, DOI={10.1063/1.122912}, number={26}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={Huang, Z. P. and Xu, J. W. and Ren, Z. F. and Wang, J. H. and Siegal, M. P. and Provencio, P. N.}, year={1998}, month=dec, pages={3845–3847} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        7,
        16
      ]
    ],
    "date-time": "2025-07-16T12:09:58Z",
    "timestamp": 1752667798383
  },
  "reference-count": 17,
  "publisher": "AIP Publishing",
  "issue": "26",
  "content-domain": {
    "domain": [
      "pubs.aip.org"
    ],
    "crossmark-restriction": true
  },
  "published-print": {
    "date-parts": [
      [
        1998,
        12,
        28
      ]
    ]
  },
  "abstract": "<jats:p>Highly oriented, multiwalled carbon nanotubes were grown on polished polycrystalline and single crystal nickel substrates by plasma enhanced hot filament chemical vapor deposition at temperatures below 666\u200a\u00b0C. The carbon nanotubes range from 10 to 500 nm in diameter and 0.1 to 50 \u03bcm in length depending on growth conditions. Acetylene is used as the carbon source for the growth of the carbon nanotubes and ammonia is used for dilution gas and catalysis. The plasma intensity, acetylene to ammonia gas ratio, and their flow rates, etc. affect the diameters and uniformity of the carbon nanotubes.</jats:p>",
  "DOI": "10.1063/1.122912",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2002,
        7,
        26
      ]
    ],
    "date-time": "2002-07-26T13:31:27Z",
    "timestamp": 1027690287000
  },
  "page": "3845-3847",
  "update-policy": "http://dx.doi.org/10.1063/aip-crossmark-policy-page",
  "source": "Crossref",
  "is-referenced-by-count": 239,
  "title": "Growth of highly oriented carbon nanotubes by plasma-enhanced hot filament chemical vapor deposition",
  "prefix": "10.1063",
  "volume": "73",
  "author": [
    {
      "given": "Z. P.",
      "family": "Huang",
      "sequence": "first",
      "affiliation": [
        {
          "name": "Materials Synthesis Laboratory, Departments of Physics and Chemistry, and Center for Advanced Photonic and Electronic Materials (CAPEM), State University of New York at Buffalo, Buffalo, New York\u200914260"
        }
      ]
    },
    {
      "given": "J. W.",
      "family": "Xu",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Materials Synthesis Laboratory, Departments of Physics and Chemistry, and Center for Advanced Photonic and Electronic Materials (CAPEM), State University of New York at Buffalo, Buffalo, New York\u200914260"
        }
      ]
    },
    {
      "given": "Z. F.",
      "family": "Ren",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Materials Synthesis Laboratory, Departments of Physics and Chemistry, and Center for Advanced Photonic and Electronic Materials (CAPEM), State University of New York at Buffalo, Buffalo, New York\u200914260"
        }
      ]
    },
    {
      "given": "J. H.",
      "family": "Wang",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Materials Synthesis Laboratory, Departments of Physics and Chemistry, and Center for Advanced Photonic and Electronic Materials (CAPEM), State University of New York at Buffalo, Buffalo, New York\u200914260"
        }
      ]
    },
    {
      "given": "M. P.",
      "family": "Siegal",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Sandia National Laboratories, Albuquerque, New Mexico\u200987185-1421"
        }
      ]
    },
    {
      "given": "P. N.",
      "family": "Provencio",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Sandia National Laboratories, Albuquerque, New Mexico\u200987185-1421"
        }
      ]
    }
  ],
  "member": "317",
  "reference": [
    {
      "key": "2024020315290118400_r1",
      "doi-asserted-by": "crossref",
      "first-page": "56",
      "DOI": "10.1038/354056a0",
      "volume": "354",
      "year": "1991",
      "journal-title": "Nature (London)"
    },
    {
      "key": "2024020315290118400_r2"
    },
    {
      "key": "2024020315290118400_r3",
      "doi-asserted-by": "crossref",
      "first-page": "483",
      "DOI": "10.1126/science.273.5274.483",
      "volume": "273",
      "year": "1996",
      "journal-title": "Science"
    },
    {
      "key": "2024020315290118400_r4",
      "doi-asserted-by": "crossref",
      "first-page": "756",
      "DOI": "10.1038/41972",
      "volume": "388",
      "year": "1997",
      "journal-title": "Nature (London)"
    },
    {
      "key": "2024020315290118400_r5",
      "doi-asserted-by": "crossref",
      "first-page": "345",
      "DOI": "10.1063/1.118055",
      "volume": "69",
      "year": "1996",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020315290118400_r6",
      "doi-asserted-by": "crossref",
      "first-page": "1701",
      "DOI": "10.1126/science.274.5293.1701",
      "volume": "274",
      "year": "1996",
      "journal-title": "Science"
    },
    {
      "key": "2024020315290118400_r7",
      "first-page": "646",
      "volume": "275",
      "year": "1997",
      "journal-title": "Science"
    },
    {
      "key": "2024020315290118400_r8",
      "doi-asserted-by": "crossref",
      "first-page": "1817",
      "DOI": "10.1063/1.118700",
      "volume": "70",
      "year": "1997",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020315290118400_r9",
      "doi-asserted-by": "crossref",
      "first-page": "1212",
      "DOI": "10.1126/science.265.5176.1212",
      "volume": "265",
      "year": "1994",
      "journal-title": "Science"
    },
    {
      "key": "2024020315290118400_r10",
      "doi-asserted-by": "crossref",
      "first-page": "9391",
      "DOI": "10.1103/PhysRevB.55.9391",
      "volume": "55",
      "year": "1997",
      "journal-title": "Phys. Rev. B"
    },
    {
      "key": "2024020315290118400_r11",
      "doi-asserted-by": "crossref",
      "first-page": "2679",
      "DOI": "10.1063/1.118978",
      "volume": "70",
      "year": "1997",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020315290118400_r12",
      "doi-asserted-by": "crossref",
      "first-page": "1969",
      "DOI": "10.1063/1.117638",
      "volume": "69",
      "year": "1996",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020315290118400_r13",
      "doi-asserted-by": "crossref",
      "first-page": "1550",
      "DOI": "10.1126/science.269.5230.1550",
      "volume": "269",
      "year": "1995",
      "journal-title": "Science"
    },
    {
      "key": "2024020315290118400_r14",
      "doi-asserted-by": "crossref",
      "first-page": "1179",
      "DOI": "10.1126/science.270.5239.1179",
      "volume": "270",
      "year": "1995",
      "journal-title": "Science"
    },
    {
      "key": "2024020315290118400_r15",
      "doi-asserted-by": "crossref",
      "first-page": "100",
      "DOI": "10.1126/science.278.5335.100",
      "volume": "278",
      "year": "1997",
      "journal-title": "Science"
    },
    {
      "key": "2024020315290118400_r16",
      "doi-asserted-by": "crossref",
      "first-page": "1105",
      "DOI": "10.1126/science.282.5391.1105",
      "volume": "282",
      "year": "1998",
      "journal-title": "Science"
    },
    {
      "key": "2024020315290118400_r17"
    }
  ],
  "container-title": "Applied Physics Letters",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://pubs.aip.org/aip/apl/article-pdf/73/26/3845/18538736/3845_1_online.pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "syndication"
    },
    {
      "URL": "https://pubs.aip.org/aip/apl/article-pdf/73/26/3845/18538736/3845_1_online.pdf",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2024,
        2,
        3
      ]
    ],
    "date-time": "2024-02-03T15:29:16Z",
    "timestamp": 1706974156000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://pubs.aip.org/apl/article/73/26/3845/69876/Growth-of-highly-oriented-carbon-nanotubes-by"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        1998,
        12,
        28
      ]
    ]
  },
  "references-count": 17,
  "journal-issue": {
    "issue": "26",
    "published-print": {
      "date-parts": [
        [
          1998,
          12,
          28
        ]
      ]
    }
  },
  "URL": "http://dx.doi.org/10.1063/1.122912",
  "relation": {},
  "ISSN": [
    "0003-6951",
    "1077-3118"
  ],
  "subject": [],
  "published-other": {
    "date-parts": [
      [
        1998,
        12,
        28
      ]
    ]
  },
  "published": {
    "date-parts": [
      [
        1998,
        12,
        28
      ]
    ]
  }
}