DOI: 10.1063/1.122605. Combined millimeter-wave near-field microscope and capacitance distance control for the quantitative mapping of sheet resistance of conducting layers

Combined millimeter-wave near-field microscope and capacitance distance control for the quantitative mapping of sheet resistance of conducting layers

10.1063/1.122605

Crossref journal-article

AIP Publishing

Applied Physics Letters (317)

Abstract

We present a dual-frequency electromagnetic scanning probe and apply it for quantitative mapping of the sheet resistance of conducting films. The high-frequency (82 GHz) mode is used for image acquisition, while the low-frequency (5 MHz) mode is used for distance control. We measure magnitude and phase of the near-field microwave reflectivity from conducting films of varying thickness and develop a model which accounts fairly well for our results. This brings us to a quantitative understanding of the contrast in the microwave near-field imaging using an aperture probe, and allows us to achieve quantitative contactless characterization of conducting layers with sheet resistance even below 2 Ω.

Bibliography

Lann, A. F., Golosovsky, M., Davidov, D., & Frenkel, A. (1998). Combined millimeter-wave near-field microscope and capacitance distance control for the quantitative mapping of sheet resistance of conducting layers. Applied Physics Letters, 73(19), 2832â2834.

Authors 4

A. F. Lann (first)
M. Golosovsky (additional)
D. Davidov (additional)
A. Frenkel (additional)

References 16 Referenced 40

10.1063/1.119255 / Appl. Phys. Lett. (1997)
10.1063/1.120020 / Appl. Phys. Lett. (1997)
10.1063/1.119772 / Appl. Phys. Lett. (1997)
10.1016/0030-4018(89)90103-X / Opt. Commun. (1989)
{'key': '2024020315151079900_r5', 'first-page': '1414', 'volume': '14', 'year': '1996', 'journal-title': 'J. Vac. Sci. Technol. B'} / J. Vac. Sci. Technol. B (1996)
10.1063/1.118272 / Appl. Phys. Lett. (1997)
10.1063/1.116685 / Appl. Phys. Lett. (1996)
10.1109/22.508246 / IEEE Trans. Microwave Theory Tech. (1996)
{'key': '2024020315151079900_r7'}
10.1063/1.120397 / Appl. Phys. Lett. (1997)
{'key': '2024020315151079900_r9', 'first-page': '1579', 'volume': '282–287', 'year': '1997', 'journal-title': 'Physica C'} / Physica C (1997)
10.1109/22.277431 / IEEE Trans. Microwave Theory Tech. (1994)
10.1016/0040-6090(94)90863-X / Thin Solid Films (1994)
10.1103/PhysRevB.54.3530 / Phys. Rev. B (1996)
10.1088/0957-0233/4/5/007 / Meas. Sci. Technol. (1993)
10.1088/0953-2048/9/11/003 / Supercond. Sci. Technol. (1996)

Dates

Type	When
Created	23 years ago (July 26, 2002, 9:31 a.m.)
Deposited	1 year, 6 months ago (Feb. 3, 2024, 10:15 a.m.)
Indexed	2 months, 4 weeks ago (May 26, 2025, 9:44 a.m.)
Issued	26 years, 9 months ago (Nov. 9, 1998)
Published	26 years, 9 months ago (Nov. 9, 1998)
Published Print	26 years, 9 months ago (Nov. 9, 1998)

Funders 0

None

BibTeX

@article{Lann_1998, title={Combined millimeter-wave near-field microscope and capacitance distance control for the quantitative mapping of sheet resistance of conducting layers}, volume={73}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.122605}, DOI={10.1063/1.122605}, number={19}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={Lann, A. F. and Golosovsky, M. and Davidov, D. and Frenkel, A.}, year={1998}, month=nov, pages={2832–2834} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        5,
        26
      ]
    ],
    "date-time": "2025-05-26T13:44:51Z",
    "timestamp": 1748267091169
  },
  "reference-count": 16,
  "publisher": "AIP Publishing",
  "issue": "19",
  "content-domain": {
    "domain": [
      "pubs.aip.org"
    ],
    "crossmark-restriction": true
  },
  "published-print": {
    "date-parts": [
      [
        1998,
        11,
        9
      ]
    ]
  },
  "abstract": "<jats:p>We present a dual-frequency electromagnetic scanning probe and apply it for quantitative mapping of the sheet resistance of conducting films. The high-frequency (82 GHz) mode is used for image acquisition, while the low-frequency (5 MHz) mode is used for distance control. We measure magnitude and phase of the near-field microwave reflectivity from conducting films of varying thickness and develop a model which accounts fairly well for our results. This brings us to a quantitative understanding of the contrast in the microwave near-field imaging using an aperture probe, and allows us to achieve quantitative contactless characterization of conducting layers with sheet resistance even below 2 \u03a9.</jats:p>",
  "DOI": "10.1063/1.122605",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2002,
        7,
        26
      ]
    ],
    "date-time": "2002-07-26T13:31:27Z",
    "timestamp": 1027690287000
  },
  "page": "2832-2834",
  "update-policy": "http://dx.doi.org/10.1063/aip-crossmark-policy-page",
  "source": "Crossref",
  "is-referenced-by-count": 40,
  "title": "Combined millimeter-wave near-field microscope and capacitance distance control for the quantitative mapping of sheet resistance of conducting layers",
  "prefix": "10.1063",
  "volume": "73",
  "author": [
    {
      "given": "A. F.",
      "family": "Lann",
      "sequence": "first",
      "affiliation": [
        {
          "name": "Racah Institute of Physics, Hebrew University of Jerusalem, 91904, Israel"
        }
      ]
    },
    {
      "given": "M.",
      "family": "Golosovsky",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Racah Institute of Physics, Hebrew University of Jerusalem, 91904, Israel"
        }
      ]
    },
    {
      "given": "D.",
      "family": "Davidov",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Racah Institute of Physics, Hebrew University of Jerusalem, 91904, Israel"
        }
      ]
    },
    {
      "given": "A.",
      "family": "Frenkel",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "MSI Engineering Software Ltd. Tel-Aviv, Israel"
        }
      ]
    }
  ],
  "member": "317",
  "reference": [
    {
      "key": "2024020315151079900_r1",
      "doi-asserted-by": "crossref",
      "first-page": "2667",
      "DOI": "10.1063/1.119255",
      "volume": "70",
      "year": "1997",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020315151079900_r2",
      "doi-asserted-by": "crossref",
      "first-page": "1736",
      "DOI": "10.1063/1.120020",
      "volume": "71",
      "year": "1997",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020315151079900_r3",
      "doi-asserted-by": "crossref",
      "first-page": "2014",
      "DOI": "10.1063/1.119772",
      "volume": "71",
      "year": "1997",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020315151079900_r4",
      "doi-asserted-by": "crossref",
      "first-page": "219",
      "DOI": "10.1016/0030-4018(89)90103-X",
      "volume": "69",
      "year": "1989",
      "journal-title": "Opt. Commun."
    },
    {
      "key": "2024020315151079900_r5",
      "first-page": "1414",
      "volume": "14",
      "year": "1996",
      "journal-title": "J. Vac. Sci. Technol. B"
    },
    {
      "key": "2024020315151079900_r5a",
      "doi-asserted-by": "crossref",
      "first-page": "677",
      "DOI": "10.1063/1.118272",
      "volume": "70",
      "year": "1997",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020315151079900_r6",
      "doi-asserted-by": "crossref",
      "first-page": "1579",
      "DOI": "10.1063/1.116685",
      "volume": "68",
      "year": "1996",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020315151079900_r6a",
      "doi-asserted-by": "crossref",
      "first-page": "1390",
      "DOI": "10.1109/22.508246",
      "volume": "44",
      "year": "1996",
      "journal-title": "IEEE Trans. Microwave Theory Tech."
    },
    {
      "key": "2024020315151079900_r7"
    },
    {
      "key": "2024020315151079900_r8",
      "doi-asserted-by": "crossref",
      "first-page": "3581",
      "DOI": "10.1063/1.120397",
      "volume": "71",
      "year": "1997",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020315151079900_r9",
      "first-page": "1579",
      "volume": "282\u2013287",
      "year": "1997",
      "journal-title": "Physica C"
    },
    {
      "key": "2024020315151079900_r10",
      "doi-asserted-by": "crossref",
      "first-page": "389",
      "DOI": "10.1109/22.277431",
      "volume": "42",
      "year": "1994",
      "journal-title": "IEEE Trans. Microwave Theory Tech."
    },
    {
      "key": "2024020315151079900_r11",
      "doi-asserted-by": "crossref",
      "first-page": "272",
      "DOI": "10.1016/0040-6090(94)90863-X",
      "volume": "239",
      "year": "1994",
      "journal-title": "Thin Solid Films"
    },
    {
      "key": "2024020315151079900_r12",
      "doi-asserted-by": "crossref",
      "first-page": "3530",
      "DOI": "10.1103/PhysRevB.54.3530",
      "volume": "54",
      "year": "1996",
      "journal-title": "Phys. Rev. B"
    },
    {
      "key": "2024020315151079900_r13",
      "doi-asserted-by": "crossref",
      "first-page": "583",
      "DOI": "10.1088/0957-0233/4/5/007",
      "volume": "4",
      "year": "1993",
      "journal-title": "Meas. Sci. Technol."
    },
    {
      "key": "2024020315151079900_r14",
      "doi-asserted-by": "crossref",
      "first-page": "934",
      "DOI": "10.1088/0953-2048/9/11/003",
      "volume": "9",
      "year": "1996",
      "journal-title": "Supercond. Sci. Technol."
    }
  ],
  "container-title": "Applied Physics Letters",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://pubs.aip.org/aip/apl/article-pdf/73/19/2832/18537726/2832_1_online.pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "syndication"
    },
    {
      "URL": "https://pubs.aip.org/aip/apl/article-pdf/73/19/2832/18537726/2832_1_online.pdf",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2024,
        2,
        3
      ]
    ],
    "date-time": "2024-02-03T15:15:25Z",
    "timestamp": 1706973325000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://pubs.aip.org/apl/article/73/19/2832/519960/Combined-millimeter-wave-near-field-microscope-and"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        1998,
        11,
        9
      ]
    ]
  },
  "references-count": 16,
  "journal-issue": {
    "issue": "19",
    "published-print": {
      "date-parts": [
        [
          1998,
          11,
          9
        ]
      ]
    }
  },
  "URL": "http://dx.doi.org/10.1063/1.122605",
  "relation": {},
  "ISSN": [
    "0003-6951",
    "1077-3118"
  ],
  "subject": [],
  "published-other": {
    "date-parts": [
      [
        1998,
        11,
        9
      ]
    ]
  },
  "published": {
    "date-parts": [
      [
        1998,
        11,
        9
      ]
    ]
  }
}