DOI: 10.1063/1.121453. Scanning thermal microscopy using batch fabricated thermocouple probes

Scanning thermal microscopy using batch fabricated thermocouple probes

10.1063/1.121453

Crossref journal-article

AIP Publishing

Applied Physics Letters (317)

Abstract

We have developed scanning thermal microscopy probes for high resolution analysis of thermal properties in an atomic force microscope (AFM). Electron beam lithography and silicon micromachining have been used to batch fabricate Au/Pd thermocouples situated at the end of Si3N4 cantilevers. The cantilevers are patterned on the side of traditional style pyramidal AFM tips, giving a new shape of probe which is favorable for access to specimens containing significant topographic variation. Tip radius is approximately 50 nm and the probe has a macroscopic opening angle of 70°. The probes were scanned in the repulsive mode using a conventional AFM. Force feedback was optically employed to give topographic and thermal maps simultaneously by maintaining a constant force of approximately 5 nN. During initial scans using a photothermal test specimen, 80 nm period metal gratings were thermally resolved.

Bibliography

Mills, G., Zhou, H., Midha, A., Donaldson, L., & Weaver, J. M. R. (1998). Scanning thermal microscopy using batch fabricated thermocouple probes. Applied Physics Letters, 72(22), 2900â2902.

Authors 5

G. Mills (first)
H. Zhou (additional)
A. Midha (additional)
L. Donaldson (additional)
J. M. R. Weaver (additional)

References 12 Referenced 104

10.1103/PhysRevLett.56.930 / Phys. Rev. Lett. (1986)
10.1063/1.97288 / Appl. Phys. Lett. (1986)
{'key': '2024020314253685800_r3', 'first-page': '1587', 'volume': '49', 'year': '1989', 'journal-title': 'Appl. Phys. Lett.'} / Appl. Phys. Lett. (1989)
10.1116/1.588094 / J. Vac. Sci. Technol. B (1995)
10.1088/0957-0233/7/2/004 / Meas. Sci. Technol. (1996)
10.1063/1.109335 / Appl. Phys. Lett. (1993)
10.1109/55.388718 / IEEE Electron Device Lett. (1995)
10.1063/1.114102 / Appl. Phys. Lett. (1995)
10.1088/0026-1394/33/4/7 / Metrologia (1996)
10.1016/0167-9317(95)00278-2 / Microelectron. Eng. (1996)
{'key': '2024020314253685800_r11'}
{'key': '2024020314253685800_r12'}

Dates

Type	When
Created	23 years, 1 month ago (July 26, 2002, 8:46 a.m.)
Deposited	1 year, 7 months ago (Feb. 3, 2024, 9:25 a.m.)
Indexed	4 months, 2 weeks ago (April 21, 2025, 12:25 a.m.)
Issued	27 years, 3 months ago (June 1, 1998)
Published	27 years, 3 months ago (June 1, 1998)
Published Print	27 years, 3 months ago (June 1, 1998)

Funders 0

None

BibTeX

@article{Mills_1998, title={Scanning thermal microscopy using batch fabricated thermocouple probes}, volume={72}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.121453}, DOI={10.1063/1.121453}, number={22}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={Mills, G. and Zhou, H. and Midha, A. and Donaldson, L. and Weaver, J. M. R.}, year={1998}, month=jun, pages={2900–2902} }

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