DOI: 10.1063/1.121064. Independent detection of vertical and lateral forces with a sidewall-implanted dual-axis piezoresistive cantilever

Independent detection of vertical and lateral forces with a sidewall-implanted dual-axis piezoresistive cantilever

10.1063/1.121064

Crossref journal-article

AIP Publishing

Applied Physics Letters (317)

Abstract

A dual-axis atomic force microscope (AFM) cantilever with independent piezoresistive sensors has been developed for simultaneous detection of vertical and lateral forces. The cantilever consists of a flat, triangular probe connected to a base by four tall, narrow ribs. The vertically compliant triangular probe and the laterally compliant ribs incorporate separate piezoresistors for vertical and lateral force sensing. In the fabrication process, a special oblique ion implant technique is used to produce electrical elements on vertical sidewalls and horizontal surfaces of the cantilever structure at the same time. The dual-axis cantilever has been used to perform microfriction measurements as well as obtain simultaneous vertical-force and lateral-force AFM images.

Bibliography

Chui, B. W., Kenny, T. W., Mamin, H. J., Terris, B. D., & Rugar, D. (1998). Independent detection of vertical and lateral forces with a sidewall-implanted dual-axis piezoresistive cantilever. Applied Physics Letters, 72(11), 1388â1390.

Authors 5

B. W. Chui (first)
T. W. Kenny (additional)
H. J. Mamin (additional)
B. D. Terris (additional)
D. Rugar (additional)

References 15 Referenced 96

10.1103/PhysRevLett.56.930 / Phys. Rev. Lett. (1986)
{'key': '2024020314055575000_r2', 'first-page': '23', 'volume': '43', 'year': '1990', 'journal-title': 'Phys. Today'} / Phys. Today (1990)
{'key': '2024020314055575000_r3'}
10.1103/PhysRevLett.59.1942 / Phys. Rev. Lett. (1987)
{'key': '2024020314055575000_r5'}
{'key': '2024020314055575000_r6'}
{'key': '2024020314055575000_r7'}
{'key': '2024020314055575000_r8'}
10.1016/0924-4247(92)85002-J / Sens. Actuators A (1992)
10.1063/1.117669 / Appl. Phys. Lett. (1996)
{'key': '2024020314055575000_r11'}
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{'key': '2024020314055575000_r13'}
{'key': '2024020314055575000_r14'}
{'key': '2024020314055575000_r15'}

Dates

Type	When
Created	23 years, 1 month ago (July 26, 2002, 8:27 a.m.)
Deposited	1 year, 7 months ago (Feb. 3, 2024, 9:06 a.m.)
Indexed	4 months, 3 weeks ago (April 10, 2025, 1:45 a.m.)
Issued	27 years, 5 months ago (March 16, 1998)
Published	27 years, 5 months ago (March 16, 1998)
Published Print	27 years, 5 months ago (March 16, 1998)

Funders 0

None

BibTeX

@article{Chui_1998, title={Independent detection of vertical and lateral forces with a sidewall-implanted dual-axis piezoresistive cantilever}, volume={72}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.121064}, DOI={10.1063/1.121064}, number={11}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={Chui, B. W. and Kenny, T. W. and Mamin, H. J. and Terris, B. D. and Rugar, D.}, year={1998}, month=mar, pages={1388–1390} }

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