DOI: 10.1063/1.120918. Quantitative imaging of sheet resistance with a scanning near-field microwave microscope

Quantitative imaging of sheet resistance with a scanning near-field microwave microscope

10.1063/1.120918

Crossref journal-article

AIP Publishing

Applied Physics Letters (317)

Abstract

We describe quantitative imaging of the sheet resistance of metallic thin films by monitoring frequency shift and quality factor in a resonant scanning near-field microwave microscope. This technique allows fast acquisition of images at approximately 10 ms per pixel over a frequency range from 0.1 to 50 GHz. In its current configuration, the system can resolve changes in sheet resistance as small as 0.6 Ω/□ for 100 Ω/□ films. We demonstrate its use at 7.5 GHz by generating a quantitative sheet resistance image of a YBa2Cu3O7−δ thin film on a 5 cm diam sapphire wafer.

Bibliography

Steinhauer, D. E., Vlahacos, C. P., Dutta, S. K., Feenstra, B. J., Wellstood, F. C., & Anlage, S. M. (1998). Quantitative imaging of sheet resistance with a scanning near-field microwave microscope. Applied Physics Letters, 72(7), 861â863.

Authors 6

D. E. Steinhauer (first)
C. P. Vlahacos (additional)
S. K. Dutta (additional)
B. J. Feenstra (additional)
F. C. Wellstood (additional)
Steven M. Anlage (additional)

References 16 Referenced 104

10.1063/1.90899 / Appl. Phys. Lett. (1979)
10.1063/1.104821 / Appl. Phys. Lett. (1991)
{'key': '2024020313584569900_r3', 'first-page': '1579', 'volume': '282–287', 'year': '1997', 'journal-title': 'Physica C'} / Physica C (1997)
10.1109/77.233621 / IEEE Trans. Appl. Supercond. (1993)
10.1063/1.1719404 / Rev. Sci. Instrum. (1965)
10.1063/1.119776 / Appl. Phys. Lett. (1997)
10.1088/0957-0233/4/5/007 / Meas. Sci. Technol. (1993)
10.1109/22.508246 / IEEE Trans. Microwave Theory Tech. (1996)
{'key': '2024020313584569900_r9'}
{'key': '2024020313584569900_r10', 'first-page': '3274', 'volume': '69', 'year': '1996', 'journal-title': 'Appl. Phys. Lett.'} / Appl. Phys. Lett. (1996)
10.1109/77.622218 / IEEE Trans. Appl. Supercond. (1997)
10.1063/1.120020 / Appl. Phys. Lett. (1997)
{'key': '2024020313584569900_r13', 'first-page': '855', 'volume': '123', 'year': '1976', 'journal-title': 'Proc. IEE'} / Proc. IEE (1976)
{'key': '2024020313584569900_r14'}
{'key': '2024020313584569900_r15'}
{'key': '2024020313584569900_r16'}

Dates

Type	When
Created	23 years, 1 month ago (July 26, 2002, 8:27 a.m.)
Deposited	1 year, 6 months ago (Feb. 3, 2024, 8:58 a.m.)
Indexed	3 weeks, 3 days ago (Aug. 6, 2025, 10 a.m.)
Issued	27 years, 6 months ago (Feb. 16, 1998)
Published	27 years, 6 months ago (Feb. 16, 1998)
Published Print	27 years, 6 months ago (Feb. 16, 1998)

Funders 0

None

BibTeX

@article{Steinhauer_1998, title={Quantitative imaging of sheet resistance with a scanning near-field microwave microscope}, volume={72}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.120918}, DOI={10.1063/1.120918}, number={7}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={Steinhauer, D. E. and Vlahacos, C. P. and Dutta, S. K. and Feenstra, B. J. and Wellstood, F. C. and Anlage, Steven M.}, year={1998}, month=feb, pages={861–863} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        8,
        6
      ]
    ],
    "date-time": "2025-08-06T14:00:33Z",
    "timestamp": 1754488833750
  },
  "reference-count": 16,
  "publisher": "AIP Publishing",
  "issue": "7",
  "content-domain": {
    "domain": [
      "pubs.aip.org"
    ],
    "crossmark-restriction": true
  },
  "published-print": {
    "date-parts": [
      [
        1998,
        2,
        16
      ]
    ]
  },
  "abstract": "<jats:p>We describe quantitative imaging of the sheet resistance of metallic thin films by monitoring frequency shift and quality factor in a resonant scanning near-field microwave microscope. This technique allows fast acquisition of images at approximately 10 ms per pixel over a frequency range from 0.1 to 50 GHz. In its current configuration, the system can resolve changes in sheet resistance as small as 0.6 \u03a9/\u25a1 for 100 \u03a9/\u25a1 films. We demonstrate its use at 7.5 GHz by generating a quantitative sheet resistance image of a YBa2Cu3O7\u2212\u03b4 thin film on a 5 cm diam sapphire wafer.</jats:p>",
  "DOI": "10.1063/1.120918",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2002,
        7,
        26
      ]
    ],
    "date-time": "2002-07-26T12:27:32Z",
    "timestamp": 1027686452000
  },
  "page": "861-863",
  "update-policy": "http://dx.doi.org/10.1063/aip-crossmark-policy-page",
  "source": "Crossref",
  "is-referenced-by-count": 104,
  "title": "Quantitative imaging of sheet resistance with a scanning near-field microwave microscope",
  "prefix": "10.1063",
  "volume": "72",
  "author": [
    {
      "given": "D. E.",
      "family": "Steinhauer",
      "sequence": "first",
      "affiliation": [
        {
          "name": "Department of Physics, Center for Superconductivity Research, University of Maryland, College Park, Maryland\u200920742-4111"
        }
      ]
    },
    {
      "given": "C. P.",
      "family": "Vlahacos",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Department of Physics, Center for Superconductivity Research, University of Maryland, College Park, Maryland\u200920742-4111"
        }
      ]
    },
    {
      "given": "S. K.",
      "family": "Dutta",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Department of Physics, Center for Superconductivity Research, University of Maryland, College Park, Maryland\u200920742-4111"
        }
      ]
    },
    {
      "given": "B. J.",
      "family": "Feenstra",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Department of Physics, Center for Superconductivity Research, University of Maryland, College Park, Maryland\u200920742-4111"
        }
      ]
    },
    {
      "given": "F. C.",
      "family": "Wellstood",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Department of Physics, Center for Superconductivity Research, University of Maryland, College Park, Maryland\u200920742-4111"
        }
      ]
    },
    {
      "given": "Steven M.",
      "family": "Anlage",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Department of Physics, Center for Superconductivity Research, University of Maryland, College Park, Maryland\u200920742-4111"
        }
      ]
    }
  ],
  "member": "317",
  "reference": [
    {
      "key": "2024020313584569900_r1",
      "doi-asserted-by": "crossref",
      "first-page": "77",
      "DOI": "10.1063/1.90899",
      "volume": "35",
      "year": "1979",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020313584569900_r2",
      "doi-asserted-by": "crossref",
      "first-page": "2543",
      "DOI": "10.1063/1.104821",
      "volume": "58",
      "year": "1991",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020313584569900_r3",
      "first-page": "1579",
      "volume": "282\u2013287",
      "year": "1997",
      "journal-title": "Physica C"
    },
    {
      "key": "2024020313584569900_r4",
      "doi-asserted-by": "crossref",
      "first-page": "1457",
      "DOI": "10.1109/77.233621",
      "volume": "3",
      "year": "1993",
      "journal-title": "IEEE Trans. Appl. Supercond."
    },
    {
      "key": "2024020313584569900_r5",
      "doi-asserted-by": "crossref",
      "first-page": "1614",
      "DOI": "10.1063/1.1719404",
      "volume": "36",
      "year": "1965",
      "journal-title": "Rev. Sci. Instrum."
    },
    {
      "key": "2024020313584569900_r6",
      "doi-asserted-by": "crossref",
      "first-page": "2026",
      "DOI": "10.1063/1.119776",
      "volume": "71",
      "year": "1997",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020313584569900_r7",
      "doi-asserted-by": "crossref",
      "first-page": "583",
      "DOI": "10.1088/0957-0233/4/5/007",
      "volume": "4",
      "year": "1993",
      "journal-title": "Meas. Sci. Technol."
    },
    {
      "key": "2024020313584569900_r8",
      "doi-asserted-by": "crossref",
      "first-page": "1390",
      "DOI": "10.1109/22.508246",
      "volume": "44",
      "year": "1996",
      "journal-title": "IEEE Trans. Microwave Theory Tech."
    },
    {
      "key": "2024020313584569900_r9"
    },
    {
      "key": "2024020313584569900_r10",
      "first-page": "3274",
      "volume": "69",
      "year": "1996",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020313584569900_r11",
      "doi-asserted-by": "crossref",
      "first-page": "3686",
      "DOI": "10.1109/77.622218",
      "volume": "7",
      "year": "1997",
      "journal-title": "IEEE Trans. Appl. Supercond."
    },
    {
      "key": "2024020313584569900_r12",
      "doi-asserted-by": "crossref",
      "first-page": "1736",
      "DOI": "10.1063/1.120020",
      "volume": "71",
      "year": "1997",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020313584569900_r13",
      "first-page": "855",
      "volume": "123",
      "year": "1976",
      "journal-title": "Proc. IEE"
    },
    {
      "key": "2024020313584569900_r14"
    },
    {
      "key": "2024020313584569900_r15"
    },
    {
      "key": "2024020313584569900_r16"
    }
  ],
  "container-title": "Applied Physics Letters",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://pubs.aip.org/aip/apl/article-pdf/72/7/861/18532201/861_1_online.pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "syndication"
    },
    {
      "URL": "https://pubs.aip.org/aip/apl/article-pdf/72/7/861/18532201/861_1_online.pdf",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2024,
        2,
        3
      ]
    ],
    "date-time": "2024-02-03T13:58:55Z",
    "timestamp": 1706968735000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://pubs.aip.org/apl/article/72/7/861/518273/Quantitative-imaging-of-sheet-resistance-with-a"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        1998,
        2,
        16
      ]
    ]
  },
  "references-count": 16,
  "journal-issue": {
    "issue": "7",
    "published-print": {
      "date-parts": [
        [
          1998,
          2,
          16
        ]
      ]
    }
  },
  "URL": "http://dx.doi.org/10.1063/1.120918",
  "relation": {},
  "ISSN": [
    "0003-6951",
    "1077-3118"
  ],
  "subject": [],
  "published-other": {
    "date-parts": [
      [
        1998,
        2,
        16
      ]
    ]
  },
  "published": {
    "date-parts": [
      [
        1998,
        2,
        16
      ]
    ]
  }
}