DOI: 10.1063/1.117752. Remote infrared radiation detection using piezoresistive microcantilevers

Remote infrared radiation detection using piezoresistive microcantilevers

10.1063/1.117752

Crossref journal-article

AIP Publishing

Applied Physics Letters (317)

Abstract

A novel micromechanical infrared (IR) radiation sensor has been developed using commercially available piezoresistive microcantilevers. Microcantilevers coated with a heat absorbing layer undergo bending due to the differential stress between the top layer (coating) and the substrate. The bending causes a change in the piezoresistance and is proportional to the amount of heat absorbed. The microcantilever IR sensor exhibits two distinct thermal responses: a fast one (&lt;ms) and a slower one (∼10 ms). A noise equivalent power (at a modulation frequency of 30 Hz) was estimated to be ∼70 nW/Hz1/2. This value can be further reduced by designing microcantilevers with better thermal isolation that can allow microcantilevers to be used as uncooled IR radiation detectors.

Bibliography

Datskos, P. G., Oden, P. I., Thundat, T., Wachter, E. A., Warmack, R. J., & Hunter, S. R. (1996). Remote infrared radiation detection using piezoresistive microcantilevers. Applied Physics Letters, 69(20), 2986â2988.

Authors 6

P. G. Datskos (first)
P. I. Oden (additional)
T. Thundat (additional)
E. A. Wachter (additional)
R. J. Warmack (additional)
S. R. Hunter (additional)

References 27 Referenced 76

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Dates

Type	When
Created	23 years, 1 month ago (July 26, 2002, 9:07 a.m.)
Deposited	1 year, 6 months ago (Feb. 3, 2024, 6:44 a.m.)
Indexed	5 months, 1 week ago (March 22, 2025, 4:31 a.m.)
Issued	28 years, 9 months ago (Nov. 11, 1996)
Published	28 years, 9 months ago (Nov. 11, 1996)
Published Print	28 years, 9 months ago (Nov. 11, 1996)

Funders 0

None

BibTeX

@article{Datskos_1996, title={Remote infrared radiation detection using piezoresistive microcantilevers}, volume={69}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.117752}, DOI={10.1063/1.117752}, number={20}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={Datskos, P. G. and Oden, P. I. and Thundat, T. and Wachter, E. A. and Warmack, R. J. and Hunter, S. R.}, year={1996}, month=nov, pages={2986–2988} }

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