DOI: 10.1063/1.115297. Near-field direct-write ultraviolet lithography and shear force microscopic studies of the lithographic process

Near-field direct-write ultraviolet lithography and shear force microscopic studies of the lithographic process

10.1063/1.115297

Crossref journal-article

AIP Publishing

Applied Physics Letters (317)

Abstract

Direct-write lithography on a 100 nm scale has been carried out using the near-field optical interaction between an uncoated tapered fiber tip and a layer of photoresist. This allows both lithography and shear force microscopic examination of the surface, which reveals morphological changes in the photoresist before development.

Bibliography

Smolyaninov, I. I., Mazzoni, D. L., & Davis, C. C. (1995). Near-field direct-write ultraviolet lithography and shear force microscopic studies of the lithographic process. Applied Physics Letters, 67(26), 3859â3861.

Authors 3

Igor I. Smolyaninov (first)
David L. Mazzoni (additional)
Christopher C. Davis (additional)

References 7 Referenced 87

{'key': '2024020310055598900_r1', 'first-page': '651', 'article-title': 'Appl. Phys. Lett.', 'volume': '44', 'year': '1984'} / Appl. Phys. Lett. (1984)
{'key': '2024020310055598900_r2', 'first-page': '1468', 'article-title': 'Science', 'volume': '251', 'year': '1991'} / Science (1991)
{'key': '2024020310055598900_r3', 'first-page': '89', 'article-title': 'Appl. Phys. A', 'volume': '59', 'year': '1994'} / Appl. Phys. A (1994)
{'key': '2024020310055598900_r4', 'first-page': '3793', 'article-title': 'Appl. Opt.', 'volume': '34', 'year': '1995'} / Appl. Opt. (1995)
{'key': '2024020310055598900_r5'}
{'key': '2024020310055598900_r6'}
{'key': '2024020310055598900_r7'}

Dates

Type	When
Created	23 years, 1 month ago (July 26, 2002, 9:40 a.m.)
Deposited	1 year, 7 months ago (Feb. 3, 2024, 5:06 a.m.)
Indexed	1 year, 3 months ago (June 7, 2024, 3:18 a.m.)
Issued	29 years, 8 months ago (Dec. 25, 1995)
Published	29 years, 8 months ago (Dec. 25, 1995)
Published Print	29 years, 8 months ago (Dec. 25, 1995)

Funders 0

None

BibTeX

@article{Smolyaninov_1995, title={Near-field direct-write ultraviolet lithography and shear force microscopic studies of the lithographic process}, volume={67}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.115297}, DOI={10.1063/1.115297}, number={26}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={Smolyaninov, Igor I. and Mazzoni, David L. and Davis, Christopher C.}, year={1995}, month=dec, pages={3859–3861} }

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