DOI: 10.1063/1.1149658. 0.4 μm spatial resolution with 1 GHz (λ=30 cm) evanescent microwave probe

0.4 μm spatial resolution with 1 GHz (λ=30 cm) evanescent microwave probe

10.1063/1.1149658

Crossref journal-article

AIP Publishing

Review of Scientific Instruments (317)

Abstract

In this article we describe evanescent field imaging of material nonuniformities with a record resolution of 0.4 μm at 1 GHz (λg/750 000), using a resonant stripline scanning microwave probe. A chemically etched tip is used as a point-like evanescent field emitter and a probe–sample distance modulation is employed to improve the signal-to-noise ratio. Images obtained by evanescent microwave probe, by optical microscope, and by scanning tunneling microscope are presented for comparison. Probe was calibrated to perform quantitative conductivity measurements. The principal factors affecting the ultimate resolution of evanescent microwave probe are also discussed.

Bibliography

Tabib-Azar, M., Su, D.-P., Pohar, A., LeClair, S. R., & Ponchak, G. (1999). 0.4 Î¼m spatial resolution with 1 GHz (Î»=30âcm) evanescent microwave probe. Review of Scientific Instruments, 70(3), 1725â1729.

Authors 5

M. Tabib-Azar (first)
D.-P. Su (additional)
A. Pohar (additional)
S. R. LeClair (additional)
G. Ponchak (additional)

References 5 Referenced 101

10.1038/237510a0 / Nature (London) (1972)
{'key': '2024020616394107500_r2', 'first-page': '583', 'volume': '3', 'year': '1993', 'journal-title': 'Meas. Sci. Technol.'} / Meas. Sci. Technol. (1993)
10.1063/1.120020 / Appl. Phys. Lett. (1997)
10.1063/1.120444 / Appl. Phys. Lett. (1997)
{'key': '2024020616394107500_r5'}

Dates

Type	When
Created	23 years ago (July 26, 2002, 8:04 a.m.)
Deposited	1 year, 6 months ago (Feb. 6, 2024, 3:42 p.m.)
Indexed	1 month, 2 weeks ago (July 5, 2025, 9:27 p.m.)
Issued	26 years, 5 months ago (March 1, 1999)
Published	26 years, 5 months ago (March 1, 1999)
Published Print	26 years, 5 months ago (March 1, 1999)

Funders 0

None

BibTeX

@article{Tabib_Azar_1999, title={0.4 μm spatial resolution with 1 GHz (λ=30 cm) evanescent microwave probe}, volume={70}, ISSN={1089-7623}, url={http://dx.doi.org/10.1063/1.1149658}, DOI={10.1063/1.1149658}, number={3}, journal={Review of Scientific Instruments}, publisher={AIP Publishing}, author={Tabib-Azar, M. and Su, D.-P. and Pohar, A. and LeClair, S. R. and Ponchak, G.}, year={1999}, month=mar, pages={1725–1729} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        7,
        6
      ]
    ],
    "date-time": "2025-07-06T01:27:14Z",
    "timestamp": 1751765234203
  },
  "reference-count": 5,
  "publisher": "AIP Publishing",
  "issue": "3",
  "content-domain": {
    "domain": [
      "pubs.aip.org"
    ],
    "crossmark-restriction": true
  },
  "published-print": {
    "date-parts": [
      [
        1999,
        3,
        1
      ]
    ]
  },
  "abstract": "<jats:p>In this article we describe evanescent field imaging of material nonuniformities with a record resolution of 0.4 \u03bcm at 1 GHz (\u03bbg/750\u200a000), using a resonant stripline scanning microwave probe. A chemically etched tip is used as a point-like evanescent field emitter and a probe\u2013sample distance modulation is employed to improve the signal-to-noise ratio. Images obtained by evanescent microwave probe, by optical microscope, and by scanning tunneling microscope are presented for comparison. Probe was calibrated to perform quantitative conductivity measurements. The principal factors affecting the ultimate resolution of evanescent microwave probe are also discussed.</jats:p>",
  "DOI": "10.1063/1.1149658",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2002,
        7,
        26
      ]
    ],
    "date-time": "2002-07-26T12:04:50Z",
    "timestamp": 1027685090000
  },
  "page": "1725-1729",
  "update-policy": "http://dx.doi.org/10.1063/aip-crossmark-policy-page",
  "source": "Crossref",
  "is-referenced-by-count": 101,
  "title": "0.4 \u03bcm spatial resolution with 1 GHz (\u03bb=30\u200acm) evanescent microwave probe",
  "prefix": "10.1063",
  "volume": "70",
  "author": [
    {
      "given": "M.",
      "family": "Tabib-Azar",
      "sequence": "first",
      "affiliation": [
        {
          "name": "Electrical Engineering and Applied Physics, Case Western Reserve University, Cleveland, Ohio 44106-7221"
        }
      ]
    },
    {
      "given": "D.-P.",
      "family": "Su",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Electrical Engineering and Applied Physics, Case Western Reserve University, Cleveland, Ohio 44106-7221"
        }
      ]
    },
    {
      "given": "A.",
      "family": "Pohar",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Electrical Engineering and Applied Physics, Case Western Reserve University, Cleveland, Ohio 44106-7221"
        }
      ]
    },
    {
      "given": "S. R.",
      "family": "LeClair",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Air Force Research Laboratory, Materials & Manufacturing Directorate, Wright\u2013Patterson Air Force Base, Ohio"
        }
      ]
    },
    {
      "given": "G.",
      "family": "Ponchak",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "NASA Lewis Research Center, Cleveland, Ohio"
        }
      ]
    }
  ],
  "member": "317",
  "reference": [
    {
      "key": "2024020616394107500_r1",
      "doi-asserted-by": "crossref",
      "first-page": "510",
      "DOI": "10.1038/237510a0",
      "volume": "237",
      "year": "1972",
      "journal-title": "Nature (London)"
    },
    {
      "key": "2024020616394107500_r2",
      "first-page": "583",
      "volume": "3",
      "year": "1993",
      "journal-title": "Meas. Sci. Technol."
    },
    {
      "key": "2024020616394107500_r3",
      "doi-asserted-by": "crossref",
      "first-page": "1736",
      "DOI": "10.1063/1.120020",
      "volume": "71",
      "year": "1997",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020616394107500_r4",
      "doi-asserted-by": "crossref",
      "first-page": "1872",
      "DOI": "10.1063/1.120444",
      "volume": "71",
      "year": "1997",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020616394107500_r5"
    }
  ],
  "container-title": "Review of Scientific Instruments",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://pubs.aip.org/aip/rsi/article-pdf/70/3/1725/19230123/1725_1_online.pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "syndication"
    },
    {
      "URL": "https://pubs.aip.org/aip/rsi/article-pdf/70/3/1725/19230123/1725_1_online.pdf",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2024,
        2,
        6
      ]
    ],
    "date-time": "2024-02-06T20:42:24Z",
    "timestamp": 1707252144000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://pubs.aip.org/rsi/article/70/3/1725/435855/0-4-m-spatial-resolution-with-1-GHz-30-cm"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        1999,
        3,
        1
      ]
    ]
  },
  "references-count": 5,
  "journal-issue": {
    "issue": "3",
    "published-print": {
      "date-parts": [
        [
          1999,
          3,
          1
        ]
      ]
    }
  },
  "URL": "http://dx.doi.org/10.1063/1.1149658",
  "relation": {},
  "ISSN": [
    "0034-6748",
    "1089-7623"
  ],
  "subject": [],
  "published-other": {
    "date-parts": [
      [
        1999,
        3
      ]
    ]
  },
  "published": {
    "date-parts": [
      [
        1999,
        3,
        1
      ]
    ]
  }
}