DOI: 10.1063/1.1147948. Ion energy spread and current measurements of the rf-driven multicusp ion source

Ion energy spread and current measurements of the rf-driven multicusp ion source

10.1063/1.1147948

Crossref journal-article

AIP Publishing

Review of Scientific Instruments (317)

Abstract

Axial energy spread and useful beam current of positive ion beams have been carried out using a radio frequency (rf)-driven multicusp ion source. Operating the source with a 13.56 MHz induction discharge, the axial energy spread is found to be approximately 3.2 eV. The extractable beam current of the rf-driven source is found to be comparable to that of filament-discharge sources. With a 0.6 mm diameter extraction aperture, a positive hydrogen ion beam current density of 80 mA/cm2 can be obtained at a rf input power of 2.5 kW. The expected source lifetime is much longer than that of filament discharges.

Bibliography

Lee, Y., Gough, R. A., Kunkel, W. B., Leung, K. N., Perkins, L. T., Pickard, D. S., Sun, L., Vujic, J., Williams, M. D., & Wutte, D. (1997). Ion energy spread and current measurements of the rf-driven multicusp ion source. Review of Scientific Instruments, 68(3), 1398â1402.

Authors 10

Y. Lee (first)
R. A. Gough (additional)
W. B. Kunkel (additional)
K. N. Leung (additional)
L. T. Perkins (additional)
D. S. Pickard (additional)
L. Sun (additional)
J. Vujic (additional)
M. D. Williams (additional)
D. Wutte (additional)

References 9 Referenced 18

{'key': '2023070714165900600_r1', 'first-page': '96', 'volume': 'Oct.', 'year': '1991', 'journal-title': 'Sci. Am.'} / Sci. Am. (1991)
10.1016/0168-9002(96)00095-2 / Nucl. Instrum. Methods Phys. Res. A (1996)
{'key': '2023070714165900600_r3'}
10.1143/JJAP.33.2189 / J. Appl. Phys. (1994)
{'key': '2023070714165900600_r5'}
10.1063/1.1146062 / Rev. Sci. Instrum. (1995)
{'key': '2023070714165900600_r7', 'first-page': '473', 'volume': '67', 'year': '1995', 'journal-title': 'Rev. Sci. Instrum.'} / Rev. Sci. Instrum. (1995)
{'key': '2023070714165900600_r8'}
{'key': '2023070714165900600_r9'}

Dates

Type	When
Created	23 years ago (July 26, 2002, 8:03 a.m.)
Deposited	2 years, 1 month ago (July 7, 2023, 10:20 a.m.)
Indexed	1 year ago (July 29, 2024, 12:29 a.m.)
Issued	28 years, 5 months ago (March 1, 1997)
Published	28 years, 5 months ago (March 1, 1997)
Published Print	28 years, 5 months ago (March 1, 1997)

Funders 0

None

BibTeX

@article{Lee_1997, title={Ion energy spread and current measurements of the rf-driven multicusp ion source}, volume={68}, ISSN={1089-7623}, url={http://dx.doi.org/10.1063/1.1147948}, DOI={10.1063/1.1147948}, number={3}, journal={Review of Scientific Instruments}, publisher={AIP Publishing}, author={Lee, Y. and Gough, R. A. and Kunkel, W. B. and Leung, K. N. and Perkins, L. T. and Pickard, D. S. and Sun, L. and Vujic, J. and Williams, M. D. and Wutte, D.}, year={1997}, month=mar, pages={1398–1402} }

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