DOI: 10.1063/1.1144892. Effect of PZT and PMN actuator hysteresis and creep on nanoindentation measurements using force microscopy

Effect of PZT and PMN actuator hysteresis and creep on nanoindentation measurements using force microscopy

10.1063/1.1144892

Crossref journal-article

AIP Publishing

Review of Scientific Instruments (317)

Abstract

Nanoindentation measurements performed using the atomic force microscope (AFM) are significantly affected, both with regard to indentation curve shape and quantitative values of the measurements (70% variation in measured modulus), by the well-known effects of hysteresis and creep in the lead zirconate titanate (PZT) piezoceramic actuators used to control the positioning and motion of the mechanical components of the AFM. A capacitance-based displacement calibrator has been built and it was discovered that the response of PZT ceramics may vary (up to 66%) depending upon the conditions under which the piezoceramic is calibrated. By replacing the PZT actuators with lead magnesium niobate (PMN) electrostrictive actuators, nanoindentation measurements have been obtained using the AFM that are both reproducible and quantitative.

Bibliography

Hues, S. M., Draper, C. F., Lee, K. P., & Colton, R. J. (1994). Effect of PZT and PMN actuator hysteresis and creep on nanoindentation measurements using force microscopy. Review of Scientific Instruments, 65(5), 1561â1565.

Authors 4

Steven M. Hues (first)
Charles F. Draper (additional)
Kenneth P. Lee (additional)
Richard J. Colton (additional)

References 17 Referenced 57

10.1103/PhysRevLett.56.930 / Phys. Rev. Lett. (1986)
10.1116/1.576168 / J. Vac. Sci. Technol. A (1989)
{'key': '2024021013261354000_r3'}
10.1088/0022-3735/22/10/001 / J. Phys. E (1989)
{'key': '2024021013261354000_r5', 'first-page': '22', 'volume': '15', 'year': '1989', 'journal-title': 'MRS Bull.'} / MRS Bull. (1989)
{'key': '2024021013261354000_r6'}
{'key': '2024021013261354000_r7', 'first-page': '647', 'volume': '65', 'year': '1986', 'journal-title': 'Ceram. Bull.'} / Ceram. Bull. (1986)
10.1364/AO.17.003088 / Appl. Opt. (1978)
10.1147/rd.304.0417 / IBM J. Res. Dev. (1986)
10.1063/1.1141989 / Rev. Sci. Instrum. (1991)
10.1016/0924-4247(93)80138-7 / Sensors and Actuators A (1993)
10.1088/0957-4484/4/2/002 / Nanotechnology (1993)
{'key': '2024021013261354000_r13', 'first-page': '647', 'volume': '23', 'year': '1980', 'journal-title': 'Ferroelectrics'} / Ferroelectrics (1980)
{'key': '2024021013261354000_r14', 'first-page': '647', 'volume': '65', 'year': '1986', 'journal-title': 'Ceram. Bull.'} / Ceram. Bull. (1986)
{'key': '2024021013261354000_r15', 'first-page': '711', 'volume': '3', 'year': '1990', 'journal-title': 'Proc. 1990 IEEE Symp. Ultrason.'} / Proc. 1990 IEEE Symp. Ultrason. (1990)
10.1063/1.327724 / J. Appl. Phys. (1980)
10.1016/0039-6028(87)90160-9 / Surf. Sci. (1987)

Dates

Type	When
Created	23 years ago (July 26, 2002, 9:58 a.m.)
Deposited	1 year, 6 months ago (Feb. 10, 2024, 10:01 a.m.)
Indexed	3 months, 3 weeks ago (April 29, 2025, 4:28 a.m.)
Issued	31 years, 3 months ago (May 1, 1994)
Published	31 years, 3 months ago (May 1, 1994)
Published Print	31 years, 3 months ago (May 1, 1994)

Funders 0

None

BibTeX

@article{Hues_1994, title={Effect of PZT and PMN actuator hysteresis and creep on nanoindentation measurements using force microscopy}, volume={65}, ISSN={1089-7623}, url={http://dx.doi.org/10.1063/1.1144892}, DOI={10.1063/1.1144892}, number={5}, journal={Review of Scientific Instruments}, publisher={AIP Publishing}, author={Hues, Steven M. and Draper, Charles F. and Lee, Kenneth P. and Colton, Richard J.}, year={1994}, month=may, pages={1561–1565} }

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