DOI: 10.1063/1.1144509. A femtojoule calorimeter using micromechanical sensors

A femtojoule calorimeter using micromechanical sensors

10.1063/1.1144509

Crossref journal-article

AIP Publishing

Review of Scientific Instruments (317)

Abstract

We describe a highly sensitive new type of calorimeter based on the deflection of a ‘‘bimetallic’’ micromechanical sensor as a function of temperature. The temperature changes can be due to ambient changes, giving a temperature sensor or, more importantly, due to the heat absorbed by a coating on the sensor, giving a heat sensor. As an example we show the results of using the sensor as a photothermal spectrometer. The small dimensions and low thermal mass of the sensor make it highly sensitive and we demonstrate a sensitivity of roughly 100 pW. By applying a simple model of the system the ultimate sensitivity is expected to be of the order of 10 pW. The thermal response time of the cantilever can also be determined, giving an estimate of the minimum detectable energy of the sensor. This we find to be 150 fJ and again from our model, expect a minimum value of the order of 20 fJ.

Bibliography

Barnes, J. R., Stephenson, R. J., Woodburn, C. N., OâShea, S. J., Welland, M. E., Rayment, T., Gimzewski, J. K., & Gerber, Ch. (1994). A femtojoule calorimeter using micromechanical sensors. Review of Scientific Instruments, 65(12), 3793â3798.

Authors 8

J. R. Barnes (first)
R. J. Stephenson (additional)
C. N. Woodburn (additional)
S. J. O’Shea (additional)
M. E. Welland (additional)
T. Rayment (additional)
J. K. Gimzewski (additional)
Ch. Gerber (additional)

References 12 Referenced 241

10.1016/0009-2614(93)E1419-H / Chem. Phys. Lett. (1994)
10.1103/PhysRevLett.56.930 / Phys. Rev. Lett. (1986)
{'key': '2023070718520794800_r3'}
10.1116/1.576520 / J. Vac. Sci. Technol. A (1990)
{'key': '2023070718520794800_r5'}
{'key': '2023070718520794800_r6'}
{'key': '2023070718520794800_r7'}
{'key': '2023070718520794800_r8'}
{'key': '2023070718520794800_r9'}
{'key': '2023070718520794800_r10'}
10.1063/1.100061 / Appl. Phys. Lett. (1988)
{'key': '2023070718520794800_r12'}

Dates

Type	When
Created	23 years, 1 month ago (July 26, 2002, 9:41 a.m.)
Deposited	2 years, 1 month ago (July 7, 2023, 3:05 p.m.)
Indexed	4 days, 23 hours ago (Aug. 23, 2025, 12:58 a.m.)
Issued	30 years, 8 months ago (Dec. 1, 1994)
Published	30 years, 8 months ago (Dec. 1, 1994)
Published Print	30 years, 8 months ago (Dec. 1, 1994)

Funders 0

None

BibTeX

@article{Barnes_1994, title={A femtojoule calorimeter using micromechanical sensors}, volume={65}, ISSN={1089-7623}, url={http://dx.doi.org/10.1063/1.1144509}, DOI={10.1063/1.1144509}, number={12}, journal={Review of Scientific Instruments}, publisher={AIP Publishing}, author={Barnes, J. R. and Stephenson, R. J. and Woodburn, C. N. and O’Shea, S. J. and Welland, M. E. and Rayment, T. and Gimzewski, J. K. and Gerber, Ch.}, year={1994}, month=dec, pages={3793–3798} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        8,
        23
      ]
    ],
    "date-time": "2025-08-23T04:58:54Z",
    "timestamp": 1755925134755
  },
  "reference-count": 12,
  "publisher": "AIP Publishing",
  "issue": "12",
  "content-domain": {
    "domain": [
      "pubs.aip.org"
    ],
    "crossmark-restriction": true
  },
  "published-print": {
    "date-parts": [
      [
        1994,
        12,
        1
      ]
    ]
  },
  "abstract": "<jats:p>We describe a highly sensitive new type of calorimeter based on the deflection of a \u2018\u2018bimetallic\u2019\u2019 micromechanical sensor as a function of temperature. The temperature changes can be due to ambient changes, giving a temperature sensor or, more importantly, due to the heat absorbed by a coating on the sensor, giving a heat sensor. As an example we show the results of using the sensor as a photothermal spectrometer. The small dimensions and low thermal mass of the sensor make it highly sensitive and we demonstrate a sensitivity of roughly 100 pW. By applying a simple model of the system the ultimate sensitivity is expected to be of the order of 10 pW. The thermal response time of the cantilever can also be determined, giving an estimate of the minimum detectable energy of the sensor. This we find to be 150 fJ and again from our model, expect a minimum value of the order of 20 fJ.</jats:p>",
  "DOI": "10.1063/1.1144509",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2002,
        7,
        26
      ]
    ],
    "date-time": "2002-07-26T13:41:21Z",
    "timestamp": 1027690881000
  },
  "page": "3793-3798",
  "update-policy": "http://dx.doi.org/10.1063/aip-crossmark-policy-page",
  "source": "Crossref",
  "is-referenced-by-count": 241,
  "title": "A femtojoule calorimeter using micromechanical sensors",
  "prefix": "10.1063",
  "volume": "65",
  "author": [
    {
      "given": "J. R.",
      "family": "Barnes",
      "sequence": "first",
      "affiliation": [
        {
          "name": "Department of Engineering, Cambridge University, Cambridge CB2 1PZ, United Kingdom"
        }
      ]
    },
    {
      "given": "R. J.",
      "family": "Stephenson",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Department of Engineering, Cambridge University, Cambridge CB2 1PZ, United Kingdom"
        }
      ]
    },
    {
      "given": "C. N.",
      "family": "Woodburn",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Department of Engineering, Cambridge University, Cambridge CB2 1PZ, United Kingdom"
        }
      ]
    },
    {
      "given": "S. J.",
      "family": "O\u2019Shea",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Department of Engineering, Cambridge University, Cambridge CB2 1PZ, United Kingdom"
        }
      ]
    },
    {
      "given": "M. E.",
      "family": "Welland",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Department of Engineering, Cambridge University, Cambridge CB2 1PZ, United Kingdom"
        }
      ]
    },
    {
      "given": "T.",
      "family": "Rayment",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Department of Chemistry, Cambridge University, Cambridge CB2 1EW, United Kingdom"
        }
      ]
    },
    {
      "given": "J. K.",
      "family": "Gimzewski",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "IBM Research Division, Zurich Research Laboratory, CH-8803, R\u00fcschlikon, Switzerland"
        }
      ]
    },
    {
      "given": "Ch.",
      "family": "Gerber",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "IBM Research Division, Zurich Research Laboratory, CH-8803, R\u00fcschlikon, Switzerland"
        }
      ]
    }
  ],
  "member": "317",
  "reference": [
    {
      "key": "2023070718520794800_r1",
      "doi-asserted-by": "crossref",
      "first-page": "589",
      "DOI": "10.1016/0009-2614(93)E1419-H",
      "volume": "217",
      "year": "1994",
      "journal-title": "Chem. Phys. Lett."
    },
    {
      "key": "2023070718520794800_r2",
      "doi-asserted-by": "crossref",
      "first-page": "930",
      "DOI": "10.1103/PhysRevLett.56.930",
      "volume": "56",
      "year": "1986",
      "journal-title": "Phys. Rev. Lett."
    },
    {
      "key": "2023070718520794800_r3"
    },
    {
      "key": "2023070718520794800_r4",
      "doi-asserted-by": "crossref",
      "first-page": "3386",
      "DOI": "10.1116/1.576520",
      "volume": "8",
      "year": "1990",
      "journal-title": "J. Vac. Sci. Technol. A"
    },
    {
      "key": "2023070718520794800_r5"
    },
    {
      "key": "2023070718520794800_r6"
    },
    {
      "key": "2023070718520794800_r7"
    },
    {
      "key": "2023070718520794800_r8"
    },
    {
      "key": "2023070718520794800_r9"
    },
    {
      "key": "2023070718520794800_r10"
    },
    {
      "key": "2023070718520794800_r11",
      "doi-asserted-by": "crossref",
      "first-page": "1045",
      "DOI": "10.1063/1.100061",
      "volume": "53",
      "year": "1988",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2023070718520794800_r12"
    }
  ],
  "updated-by": [
    {
      "updated": {
        "date-parts": [
          [
            1995,
            4,
            1
          ]
        ],
        "date-time": "1995-04-01T00:00:00Z",
        "timestamp": 796694400000
      },
      "DOI": "10.1063/1.1146429",
      "type": "correction",
      "source": "publisher",
      "label": "Correction"
    }
  ],
  "container-title": "Review of Scientific Instruments",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://pubs.aip.org/aip/rsi/article-pdf/65/12/3793/8386821/3793_1_online.pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "syndication"
    },
    {
      "URL": "https://pubs.aip.org/aip/rsi/article-pdf/65/12/3793/8386821/3793_1_online.pdf",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2023,
        7,
        7
      ]
    ],
    "date-time": "2023-07-07T19:05:29Z",
    "timestamp": 1688756729000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://pubs.aip.org/rsi/article/65/12/3793/437125/A-femtojoule-calorimeter-using-micromechanical"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        1994,
        12,
        1
      ]
    ]
  },
  "references-count": 12,
  "journal-issue": {
    "issue": "12",
    "published-print": {
      "date-parts": [
        [
          1994,
          12,
          1
        ]
      ]
    }
  },
  "URL": "http://dx.doi.org/10.1063/1.1144509",
  "relation": {},
  "ISSN": [
    "0034-6748",
    "1089-7623"
  ],
  "subject": [],
  "published-other": {
    "date-parts": [
      [
        1994,
        12
      ]
    ]
  },
  "published": {
    "date-parts": [
      [
        1994,
        12,
        1
      ]
    ]
  }
}