DOI: 10.1063/1.1144495. The Novolever: A new cantilever for scanning force microscopy microfabricated from polymeric materials

The Novolever: A new cantilever for scanning force microscopy microfabricated from polymeric materials

10.1063/1.1144495

Crossref journal-article

AIP Publishing

Review of Scientific Instruments (317)

Abstract

A new force sensor element based on multilayer thin film technology and adapted for optical readout in a conventional scanning force microscope has been developed. The use of polymers as cantilever materials enables the introduction of mechanical properties otherwise not accessible with microfabrication based on Si technology. The fully batched fabricated cantilevered force transducer is based on the photoresist novolak and incorporates an integrated EBD tip. Bending experiments on microstructures indicate that the Young’s modulus of novolak is about two orders of magnitude lower than for Si. Therefore, in using a cantilever design similar to that with Si it is possible to fabricate more flexible structures from polymeric materials. The new force sensors have been tested and their performance has been evaluated on different samples.

Bibliography

Pechmann, R., KÃ¶hler, J. M., Fritzsche, W., Schaper, A., & Jovin, T. M. (1994). The Novolever: A new cantilever for scanning force microscopy microfabricated from polymeric materials. Review of Scientific Instruments, 65(12), 3702â3706.

Authors 5

R. Pechmann (first)
J. M. Köhler (additional)
W. Fritzsche (additional)
A. Schaper (additional)
T. M. Jovin (additional)

References 16 Referenced 24

{'key': '2023070718525936200_r1'}
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10.1116/1.576520 / J. Vac. Sci. Technol. A (1990)
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10.1016/S0006-3495(93)81433-4 / Biophys. J. (1993)
10.1126/science.8153628 / Science (1994)
{'key': '2023070718525936200_r10', 'first-page': '277', 'volume': '3', 'year': '1991', 'journal-title': 'Exp. Tech. Phys.'} / Exp. Tech. Phys. (1991)
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10.1021/la00032a046 / Langmuir (1993)
{'key': '2023070718525936200_r15'}
{'key': '2023070718525936200_r16'}

Dates

Type	When
Created	23 years, 1 month ago (July 26, 2002, 9:58 a.m.)
Deposited	2 years, 1 month ago (July 7, 2023, 3:06 p.m.)
Indexed	1 year, 6 months ago (Feb. 11, 2024, 5:37 a.m.)
Issued	30 years, 8 months ago (Dec. 1, 1994)
Published	30 years, 8 months ago (Dec. 1, 1994)
Published Print	30 years, 8 months ago (Dec. 1, 1994)

Funders 0

None

BibTeX

@article{Pechmann_1994, title={The Novolever: A new cantilever for scanning force microscopy microfabricated from polymeric materials}, volume={65}, ISSN={1089-7623}, url={http://dx.doi.org/10.1063/1.1144495}, DOI={10.1063/1.1144495}, number={12}, journal={Review of Scientific Instruments}, publisher={AIP Publishing}, author={Pechmann, R. and Köhler, J. M. and Fritzsche, W. and Schaper, A. and Jovin, T. M.}, year={1994}, month=dec, pages={3702–3706} }

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