Abstract
We have developed a 3.6 μm scan range atomic force microscope that scans the cantilever instead of the sample, while the optical-lever detection apparatus remains stationary. The design permits simpler, more adaptable sample mounting, and generally improves ease of use. Software workarounds alleviate the minor effects of spurious signal variations that arise as a result of scanning the cantilever. The performance of the microscope matches that of scanned-sample instruments.
References
15
Referenced
21
10.1103/PhysRevLett.56.930
/ Phys. Rev. Lett. (1986)10.1063/1.100061
/ Appl. Phys. Lett. (1988)10.1063/1.342563
/ J. Appl. Phys. (1989)10.1063/1.1143303
/ Rev. Sci. Instrum. (1992)10.1016/S0039-6028(87)80411-9
/ Surf. Sci. (1987)10.1116/1.575440
/ J. Vac. Sci. Technol. A (1988)10.1116/1.576401
/ J. Vac. Sci. Technol. A (1990){'key': '2024020519050224600_r6'}
{'key': '2024020519050224600_r7'}
{'key': '2024020519050224600_r8'}
{'key': '2024020519050224600_r9'}
{'key': '2024020519050224600_r10'}
{'key': '2024020519050224600_r11'}
{'key': '2024020519050224600_r12'}
10.1116/1.586061
/ J. Vac. Sci. Technol. B (1992)
Dates
Type | When |
---|---|
Created | 23 years ago (July 26, 2002, 9:58 a.m.) |
Deposited | 1 year, 6 months ago (Feb. 5, 2024, 3:10 p.m.) |
Indexed | 1 year, 6 months ago (Feb. 11, 2024, 2:58 a.m.) |
Issued | 32 years, 4 months ago (April 1, 1993) |
Published | 32 years, 4 months ago (April 1, 1993) |
Published Print | 32 years, 4 months ago (April 1, 1993) |
@article{Baselt_1993, title={Scanned-cantilever atomic force microscope}, volume={64}, ISSN={1089-7623}, url={http://dx.doi.org/10.1063/1.1144142}, DOI={10.1063/1.1144142}, number={4}, journal={Review of Scientific Instruments}, publisher={AIP Publishing}, author={Baselt, David R. and Baldeschwieler, John D.}, year={1993}, month=apr, pages={908–911} }