DOI: 10.1063/1.1143265. Diamond force microscope tips fabricated by chemical vapor deposition

Diamond force microscope tips fabricated by chemical vapor deposition

10.1063/1.1143265

Crossref journal-article

AIP Publishing

Review of Scientific Instruments (317)

Abstract

A chemical vapor deposition method is described for fabricating force microscope cantilevers with single-crystal diamond tips. The ≂1-μm-diam diamond tips have corner radii of 30 nm, and have been used to study diamond–diamond friction on well-characterized surfaces in UHV. The tip size and orientation can be determined by electron microscopy without altering the surface atomic structure.

Bibliography

Germann, G. J., McClelland, G. M., Mitsuda, Y., Buck, M., & Seki, H. (1992). Diamond force microscope tips fabricated by chemical vapor deposition. Review of Scientific Instruments, 63(9), 4053â4055.

Authors 5

G. J. Germann (first)
G. M. McClelland (additional)
Y. Mitsuda (additional)
M. Buck (additional)
H. Seki (additional)

References 24 Referenced 23

{'key': '2024020712325309500_r1', 'first-page': '23', 'volume': '43', 'year': '1990', 'journal-title': 'Phys. Today'} / Phys. Today (1990)
{'key': '2024020712325309500_r2'}
10.1063/1.98374 / Appl. Phys. Lett. (1987)
10.1063/1.339435 / J. Appl. Phys. (1987)
10.1111/j.1365-2818.1988.tb01388.x / J. Microscopy (1988)
{'key': '2024020712325309500_r3c'}
10.1116/1.585191 / J. Vac. Sci. Technol. B (1991)
10.1143/JJAP.29.1854 / Jpn. J. Appl. Phys. (1990)
10.1146/annurev.ms.17.080187.001113 / Ann. Rev. Mater. Sci. (1987)
10.1016/0146-3535(88)90001-9 / Prog. Crystal Growth Charact. (1988)
10.1088/0268-1242/4/8/001 / Semicond. Sci. Technol. (1989)
{'key': '2024020712325309500_r7a'}
{'key': '2024020712325309500_r8'}
10.1007/BF00547459 / J. Mater. Sci. (1988)
{'key': '2024020712325309500_r10'}
10.1103/PhysRevB.43.1520 / Phys. Rev. B (1991)
10.1016/0039-6028(91)90732-8 / Surf. Sci. (1991)
10.1002/pol.1967.160050201 / J. Polym. Sci. A-2 (1967)
{'key': '2024020712325309500_r12a'}
10.1016/0039-6028(90)90517-C / Surf. Sci. (1990)
10.1016/0039-6028(86)90665-5 / Surf. Sci. (1986)
10.1063/1.1141354 / Rev. Sci. Instrum. (1990)
{'key': '2024020712325309500_r16', 'first-page': '2588', 'volume': '52', 'year': '1989', 'journal-title': 'Appl. Phys. Lett.'} / Appl. Phys. Lett. (1989)
{'key': '2024020712325309500_r17'}

Dates

Type	When
Created	23 years, 1 month ago (July 26, 2002, 9:57 a.m.)
Deposited	1 year, 6 months ago (Feb. 7, 2024, 2:09 p.m.)
Indexed	1 year, 6 months ago (Feb. 7, 2024, 2:40 p.m.)
Issued	33 years ago (Sept. 1, 1992)
Published	33 years ago (Sept. 1, 1992)
Published Print	33 years ago (Sept. 1, 1992)

Funders 0

None

BibTeX

@article{Germann_1992, title={Diamond force microscope tips fabricated by chemical vapor deposition}, volume={63}, ISSN={1089-7623}, url={http://dx.doi.org/10.1063/1.1143265}, DOI={10.1063/1.1143265}, number={9}, journal={Review of Scientific Instruments}, publisher={AIP Publishing}, author={Germann, G. J. and McClelland, G. M. and Mitsuda, Y. and Buck, M. and Seki, H.}, year={1992}, month=sep, pages={4053–4055} }

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