DOI: 10.1063/1.1138408. Characterization of growing thin films by i n s i t u ellipsometry, spectral reflectance and transmittance measurements, and ion-scattering spectroscopy

Characterization of growing thin films by i n s i t u ellipsometry, spectral reflectance and transmittance measurements, and ion-scattering spectroscopy

10.1063/1.1138408

Crossref journal-article

AIP Publishing

Review of Scientific Instruments (317)

Abstract

A versatile ultrahigh-vacuum thin-film deposition and analysis system is described. Films are deposited by electron beam evaporation with the possibility of ion beam bombardment of the growing film. Measurements of the reflectance and/or transmittance of the coating surface can be made simultaneously at 16 wavelengths across the visible or infrared spectrum. Ellipsometric measurements can also be made in situ, at a single wavelength and single angle of incidence, by an ellipsometer which can operate in either an automatic rotating analyzer mode or a manual nulling mode. The system is also equipped with an ion gun producing a submillimeter spot, and with a hemispherical sector, ion energy analyzer for ion scattering spectroscopy studies of the film surface. Results obtained during the deposition of a gold film are presented to demonstrate the capability of the system.

Bibliography

Netterfield, R. P., Martin, P. J., Sainty, W. G., Duffy, R. M., & Pacey, C. G. (1985). Characterization of growing thin films by i nâs i t u ellipsometry, spectral reflectance and transmittance measurements, and ion-scattering spectroscopy. Review of Scientific Instruments, 56(11), 1995â2003.

Authors 5

R. P. Netterfield (first)
P. J. Martin (additional)
W. G. Sainty (additional)
R. M. Duffy (additional)
C. G. Pacey (additional)

References 35 Referenced 44

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10.1016/0040-6090(76)90545-9 / Thin Solid Films (1976)
10.1364/AO.23.002668 / Appl. Opt. (1984)
10.1364/AO.17.003039 / Appl. Opt. (1978)
10.1088/0022-3719/16/24/022 / J. Phys. C (1983)
10.1016/0040-6090(83)90469-8 / Thin Solid Films (1983)
10.1116/1.569569 / J. Vac. Sci. Technol. (1978)
{'key': '2024021021350331600_r10'}
10.1364/AO.15.001969 / Appl. Opt. (1976)
{'issue': '1', 'key': '2024021021350331600_r12', 'first-page': '689', 'volume': '2', 'year': '1974', 'journal-title': 'Jpn. J. Appl. Phys. Suppl.'} / Jpn. J. Appl. Phys. Suppl. (1974)
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10.1364/AO.22.000178 / Appl. Opt. (1983)
10.1364/AO.23.001197 / Appl. Opt. (1984)
10.1016/0039-6028(80)90303-9 / Surf. Sci. (1980)
10.1016/0040-6090(83)90152-9 / Thin Solid Films (1983)
{'key': '2024021021350331600_r19', 'first-page': '68', 'volume': '112', 'year': '1977', 'journal-title': 'Proc. Soc. Photo Opt. Instrum. Eng.'} / Proc. Soc. Photo Opt. Instrum. Eng. (1977)
{'key': '2024021021350331600_r20'}
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{'key': '2024021021350331600_r22'}
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{'key': '2024021021350331600_r24', 'first-page': '248', 'volume': '17', 'year': '1964', 'journal-title': 'Opt. Spectrosc.'} / Opt. Spectrosc. (1964)
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{'key': '2024021021350331600_r27'}
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{'issue': '1', 'key': '2024021021350331600_r32', 'first-page': '559', 'volume': '2', 'year': '1974', 'journal-title': 'Jpn. J. Appl. Phys. Suppl.'} / Jpn. J. Appl. Phys. Suppl. (1974)
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{'key': '2024021021350331600_r35'}

Dates

Type	When
Created	23 years, 1 month ago (July 26, 2002, 9:17 a.m.)
Deposited	1 year, 6 months ago (Feb. 10, 2024, 4:35 p.m.)
Indexed	1 month ago (July 30, 2025, 11:16 a.m.)
Issued	39 years, 10 months ago (Nov. 1, 1985)
Published	39 years, 10 months ago (Nov. 1, 1985)
Published Print	39 years, 10 months ago (Nov. 1, 1985)

Funders 0

None

BibTeX

@article{Netterfield_1985, title={Characterization of growing thin films by i n s i t u ellipsometry, spectral reflectance and transmittance measurements, and ion-scattering spectroscopy}, volume={56}, ISSN={1089-7623}, url={http://dx.doi.org/10.1063/1.1138408}, DOI={10.1063/1.1138408}, number={11}, journal={Review of Scientific Instruments}, publisher={AIP Publishing}, author={Netterfield, R. P. and Martin, P. J. and Sainty, W. G. and Duffy, R. M. and Pacey, C. G.}, year={1985}, month=nov, pages={1995–2003} }

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