DOI: 10.1063/1.113549. Site-controlled growth of nanowhiskers

10.1063/1.113549

Crossref journal-article

AIP Publishing

Applied Physics Letters (317)

Abstract

The metalogranic vapor-phase epitaxy (MOVPE) growth of site-controlled nanowhiskers having a single preferential growth direction is accomplished by using a SiO2 window mask. A small window size (200×200 nm in this experiment) is essential for growing a single whisker from a single Au- seed cluster formed inside each window of the mask. The presence of the SiO2 mask greatly influences the MOVPE growth process, especially the growth direction and resultant diameter of the whiskers. This influence may be due to surface migration of the source materials or source gas diffusion near the surface from the masked region to the window region.

Bibliography

Sato, T., Hiruma, K., Shirai, M., Tominaga, K., Haraguchi, K., Katsuyama, T., & Shimada, T. (1995). Site-controlled growth of nanowhiskers. Applied Physics Letters, 66(2), 159â161.

Authors 7

T. Sato (first)
K. Hiruma (additional)
M. Shirai (additional)
K. Tominaga (additional)
K. Haraguchi (additional)
T. Katsuyama (additional)
T. Shimada (additional)

References 9 Referenced 44

{'key': '2024020308233967200_r1', 'first-page': 'L735', 'article-title': 'Jpn. J. Appl. Phys.', 'volume': '19', 'year': '1980'} / Jpn. J. Appl. Phys. (1980)
{'key': '2024020308233967200_r2', 'first-page': '635', 'article-title': 'Appl. Phys. Lett.', 'volume': '41', 'year': '1982'} / Appl. Phys. Lett. (1982)
{'key': '2024020308233967200_r3', 'first-page': '1660', 'article-title': 'J. Vac. Sci. Technol. B', 'volume': '11', 'year': '1993'} / J. Vac. Sci. Technol. B (1993)
{'key': '2024020308233967200_r4'}
{'key': '2024020308233967200_r5', 'first-page': '3163', 'article-title': 'J. Appl. Phys.', 'volume': '73', 'year': '1993'} / J. Appl. Phys. (1993)
{'key': '2024020308233967200_r6', 'first-page': '334', 'article-title': 'J. Cryst. Growth', 'volume': '77', 'year': '1986'} / J. Cryst. Growth (1986)
{'key': '2024020308233967200_r7'}
{'key': '2024020308233967200_r8', 'first-page': '3149', 'article-title': 'J. Electrochem. Soc.', 'volume': '134', 'year': '1987'} / J. Electrochem. Soc. (1987)
{'key': '2024020308233967200_r9', 'first-page': '73', 'article-title': 'J. Cryst. Growth', 'volume': '73', 'year': '1985'} / J. Cryst. Growth (1985)

Dates

Type	When
Created	23 years, 1 month ago (July 26, 2002, 9:39 a.m.)
Deposited	1 year, 6 months ago (Feb. 3, 2024, 3:23 a.m.)
Indexed	3 weeks, 4 days ago (Aug. 5, 2025, 8:53 a.m.)
Issued	30 years, 7 months ago (Jan. 9, 1995)
Published	30 years, 7 months ago (Jan. 9, 1995)
Published Print	30 years, 7 months ago (Jan. 9, 1995)

Funders 0

None

BibTeX

@article{Sato_1995, title={Site-controlled growth of nanowhiskers}, volume={66}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.113549}, DOI={10.1063/1.113549}, number={2}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={Sato, T. and Hiruma, K. and Shirai, M. and Tominaga, K. and Haraguchi, K. and Katsuyama, T. and Shimada, T.}, year={1995}, month=jan, pages={159–161} }

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