DOI: 10.1063/1.1134564. Apparatus for studies of matrix-isolated sputtered products

Apparatus for studies of matrix-isolated sputtered products

10.1063/1.1134564

Crossref journal-article

AIP Publishing

Review of Scientific Instruments (317)

Abstract

A system making use of matrix isolation techniques in the elucidation of the sputtering process has been developed and is described. A stable beam of positive ions produced with a commercially available sputter ion gun impinges on a target. The matrix-isolated back-sputtered products are collected on a cryogenically cooled optical plate for spectroscopic observation. The system can be used to identify atomic and molecular sputtered products and to measure sputtering yields. For demonstration purposes, the spectra of sputtered gold atoms in a deuterium matrix and sputtered molybdenum atoms in an argon matrix are shown.

Bibliography

Bates, J., Gruen, D. M., & Varma, R. (1976). Apparatus for studies of matrix-isolated sputtered products. Review of Scientific Instruments, 47(12), 1506â1510.

Authors 3

J. Bates (first)
D. M. Gruen (additional)
R. Varma (additional)

References 21 Referenced 7

10.1016/S0065-2741(13)70008-3 / Adv. High Temp. Chem. (1969)
{'key': '2024020523305629200_r2'}
10.1063/1.1674816 / J. Chem. Phys. (1971)
10.1063/1.1678089 / J. Chem. Phys. (1972)
10.1063/1.1681277 / J. Chem. Phys. (1974)
10.1063/1.1680081 / J. Chem. Phys. (1973)
{'key': '2024020523305629200_r7'}
10.1063/1.1670015 / J. Chem. Phys. (1968)
10.1063/1.1673230 / J. Chem. Phys. (1970)
{'key': '2024020523305629200_r10', 'first-page': '301', 'volume': '4', 'year': '1972', 'journal-title': 'High Temp. Sci.'} / High Temp. Sci. (1972)
10.1063/1.1680811 / J. Chem. Phys. (1974)
10.1366/000370274774332849 / Appl. Spectrosc. (1974)
10.13182/NT76-A31595 / Nucl. Technol. (1976)
{'key': '2024020523305629200_r14'}
{'key': '2024020523305629200_r15'}
10.1063/1.1678944 / J. Chem. Phys. (1973)
10.1063/1.1685342 / Rev. Sci. lnstrum. (1971)
10.1063/1.1134607 / Rev. Sci. lnstrum. (1976)
{'key': '2024020523305629200_r19'}
10.1063/1.432151 / J. Chem. Phys. (1976)
10.1103/PhysRev.184.383 / Phys. Rev. (1969)

Dates

Type	When
Created	22 years, 5 months ago (March 10, 2003, 12:42 p.m.)
Deposited	1 year, 6 months ago (Feb. 5, 2024, 7:11 p.m.)
Indexed	1 year, 6 months ago (Feb. 9, 2024, 9:43 p.m.)
Issued	48 years, 8 months ago (Dec. 1, 1976)
Published	48 years, 8 months ago (Dec. 1, 1976)
Published Print	48 years, 8 months ago (Dec. 1, 1976)

Funders 0

None

BibTeX

@article{Bates_1976, title={Apparatus for studies of matrix-isolated sputtered products}, volume={47}, ISSN={1089-7623}, url={http://dx.doi.org/10.1063/1.1134564}, DOI={10.1063/1.1134564}, number={12}, journal={Review of Scientific Instruments}, publisher={AIP Publishing}, author={Bates, J. and Gruen, D. M. and Varma, R.}, year={1976}, month=dec, pages={1506–1510} }

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