DOI: 10.1063/1.113382. Effect of intrinsic growth stress on the Raman spectra of vacuum-arc-deposited amorphous carbon films

Effect of intrinsic growth stress on the Raman spectra of vacuum-arc-deposited amorphous carbon films

10.1063/1.113382

Crossref journal-article

AIP Publishing

Applied Physics Letters (317)

Abstract

Amorphous carbon (a-C) films grown by vacuum-arc deposition techniques contain substantial amounts of compressive, residual, growth stress (over 10 GPa). The magnitude of the stress can be controlled by changing the incoming energy of the ions. It is observed that stress shifts the Raman scattering feature in these films to higher frequency by as much as 20 cm−1. The Raman spectra of adhering and delaminated films are used to measure the magnitude of the stress-induced shift, which is −1.9 cm−1/GPa for compressive biaxial stress. The observed value is compared to that expected from disordered diamond and graphite structures.

Bibliography

Ager, J. W., Anders, S., Anders, A., & Brown, I. G. (1995). Effect of intrinsic growth stress on the Raman spectra of vacuum-arc-deposited amorphous carbon films. Applied Physics Letters, 66(25), 3444â3446.

Authors 4

Joel W. Ager (first)
Simone Anders (additional)
Andre Anders (additional)
Ian G. Brown (additional)

References 16 Referenced 99

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{'key': '2024020309091207700_r2', 'first-page': '7862', 'article-title': 'J. Appl. Phys.', 'volume': '69', 'year': '1991'} / J. Appl. Phys. (1991)
{'key': '2024020309091207700_r3', 'first-page': '592', 'article-title': 'Appl. Phys. Lett.', 'volume': '56', 'year': '1991'} / Appl. Phys. Lett. (1991)
{'key': '2024020309091207700_r4'}
{'key': '2024020309091207700_r5', 'first-page': '2601', 'article-title': 'Phys. Rev. B', 'volume': '48', 'year': '1993'} / Phys. Rev. B (1993)
{'key': '2024020309091207700_r6'}
{'key': '2024020309091207700_r7', 'first-page': '388', 'article-title': 'Surf. Coat. Technol.', 'volume': '68/69', 'year': '1994'} / Surf. Coat. Technol. (1994)
{'key': '2024020309091207700_r8', 'first-page': '2231', 'article-title': 'J. Appl. Phys.', 'volume': '69', 'year': '1991'} / J. Appl. Phys. (1991)
{'key': '2024020309091207700_r9'}
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Dates

Type	When
Created	23 years, 1 month ago (July 26, 2002, 9:39 a.m.)
Deposited	1 year, 7 months ago (Feb. 3, 2024, 4:09 a.m.)
Indexed	5 months, 2 weeks ago (March 19, 2025, 12:52 p.m.)
Issued	30 years, 2 months ago (June 19, 1995)
Published	30 years, 2 months ago (June 19, 1995)
Published Print	30 years, 2 months ago (June 19, 1995)

Funders 0

None

BibTeX

@article{Ager_1995, title={Effect of intrinsic growth stress on the Raman spectra of vacuum-arc-deposited amorphous carbon films}, volume={66}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.113382}, DOI={10.1063/1.113382}, number={25}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={Ager, Joel W. and Anders, Simone and Anders, Andre and Brown, Ian G.}, year={1995}, month=jun, pages={3444–3446} }

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