Abstract
Data are presented characterizing a new process for fabrication of vertical-cavity surface-emitting lasers based on the selective conversion of high Al composition epitaxial AlGaAs to a stable native oxide using ‘‘wet oxidation.’’ The native oxide is used to form a ring contact to the laser active region. The resulting laser active regions have dimensions of 8, 4, and 2 μm. The lowest threshold laser is achieved with the 8-μm active region, with a minimum threshold current of 225-μA continuous wave at room temperature.
References
14
Referenced
457
10.1063/1.346527
/ J. Appl. Phys. (1990)10.1063/1.103759
/ Appl. Phys. Lett. (1990)10.1063/1.108700
/ Appl. Phys. Lett. (1993)10.1063/1.354868
/ J. Appl. Phys. (1993)10.1063/1.110728
/ Appl. Phys. Lett. (1993)10.1063/1.103361
/ Appl. Phys. Lett. (1990)10.1109/68.238244
/ IEEE Photon. Technol. Lett. (1993)10.1109/68.275477
/ IEEE Photon. Technol. Lett. (1994)10.1149/1.2221592
/ J. Electrochem. Soc. (1993)10.1063/1.347557
/ J. Appl. Phys. (1991)10.1063/1.109494
/ Appl. Phys. Lett. (1993)10.1063/1.104326
/ Appl. Phys. Lett. (1991)10.1109/68.118001
/ IEEE Photon. Technol. Lett. (1991)10.1109/68.275408
/ IEEE Photon. Technol. Lett. (1994)
Dates
Type | When |
---|---|
Created | 23 years, 1 month ago (July 26, 2002, 9:38 a.m.) |
Deposited | 1 year, 6 months ago (Feb. 3, 2024, 2:33 a.m.) |
Indexed | 6 days, 6 hours ago (Aug. 23, 2025, 9:16 p.m.) |
Issued | 31 years, 1 month ago (July 4, 1994) |
Published | 31 years, 1 month ago (July 4, 1994) |
Published Print | 31 years, 1 month ago (July 4, 1994) |
@article{Huffaker_1994, title={Native-oxide defined ring contact for low threshold vertical-cavity lasers}, volume={65}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.113087}, DOI={10.1063/1.113087}, number={1}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={Huffaker, D. L. and Deppe, D. G. and Kumar, K. and Rogers, T. J.}, year={1994}, month=jul, pages={97–99} }