DOI: 10.1063/1.111318. Structure and stability of sputter deposited beta-tungsten thin films

Structure and stability of sputter deposited beta-tungsten thin films

10.1063/1.111318

Crossref journal-article

AIP Publishing

Applied Physics Letters (317)

Abstract

The structure and stability of thin tungsten films prepared by radio frequency magnetron sputter deposition have been studied by x-ray diffraction and x-ray photoelectron spectroscopy. The structure of these films has been found to systematically evolve from the metastable A15 β-W phase to the equilibrium A2 α-W phase with decreasing oxygen impurity concentration. Within the β-W phase a decrease in the concentration of incorporated oxygen results in a monotonic decrease in the lattice parameter of the unit cell until the β-W phase eventually becomes unstable, and the α-W phase is formed.

Bibliography

Weerasekera, I. A., Shah, S. I., Baxter, D. V., & Unruh, K. M. (1994). Structure and stability of sputter deposited beta-tungsten thin films. Applied Physics Letters, 64(24), 3231â3233.

Authors 4

I. A. Weerasekera (first)
S. Ismat Shah (additional)
David V. Baxter (additional)
K. M. Unruh (additional)

References 16 Referenced 119

{'key': '2024020307240529200_r1', 'first-page': '224', 'volume': '17', 'year': '1955', 'journal-title': 'Phys. Lett.'} / Phys. Lett. (1955)
{'key': '2024020307240529200_r1a', 'first-page': '260', 'volume': '15', 'year': '1965', 'journal-title': 'Phys. Rev. Lett.'} / Phys. Rev. Lett. (1965)
10.1063/1.1651982 / Appl. Phys. Lett. (1968)
10.1063/1.1656012 / J. Appl. Phys. (1968)
10.1016/0040-6090(87)90206-9 / Thin Solid Films (1987)
10.1116/1.576301 / J. Vac. Sci. Technol. A (1989)
10.1016/0169-4332(89)90918-5 / Appl. Sur. Sci. (1989)
10.1557/JMR.1991.0080 / J. Mater. Res. (1991)
10.1116/1.578686 / J. Vac. Sci. Technol. A (1993)
10.1116/1.575583 / J. Vac. Sci. Technol. A (1988)
10.1116/1.585277 / J. Vac. Sci. Technol. B (1991)
10.1116/1.578075 / J. Vac. Sci. Technol. A (1992)
10.1016/0040-6090(73)90107-7 / Thin Solid Films (1973)
{'key': '2024020307240529200_r7'}
10.1143/JJAP.32.1759 / Jpn. J. Appl. Phys. (1993)
{'key': '2024020307240529200_r9', 'first-page': '218', 'volume': '56', 'year': '1984', 'journal-title': 'J. Appl. Phys.'} / J. Appl. Phys. (1984)

Dates

Type	When
Created	23 years, 1 month ago (July 26, 2002, 9:38 a.m.)
Deposited	1 year, 6 months ago (Feb. 3, 2024, 2:24 a.m.)
Indexed	1 month ago (July 23, 2025, 8:22 a.m.)
Issued	31 years, 2 months ago (June 13, 1994)
Published	31 years, 2 months ago (June 13, 1994)
Published Print	31 years, 2 months ago (June 13, 1994)

Funders 0

None

BibTeX

@article{Weerasekera_1994, title={Structure and stability of sputter deposited beta-tungsten thin films}, volume={64}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.111318}, DOI={10.1063/1.111318}, number={24}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={Weerasekera, I. A. and Shah, S. Ismat and Baxter, David V. and Unruh, K. M.}, year={1994}, month=jun, pages={3231–3233} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        7,
        23
      ]
    ],
    "date-time": "2025-07-23T12:22:12Z",
    "timestamp": 1753273332103
  },
  "reference-count": 16,
  "publisher": "AIP Publishing",
  "issue": "24",
  "content-domain": {
    "domain": [
      "pubs.aip.org"
    ],
    "crossmark-restriction": true
  },
  "published-print": {
    "date-parts": [
      [
        1994,
        6,
        13
      ]
    ]
  },
  "abstract": "<jats:p>The structure and stability of thin tungsten films prepared by radio frequency magnetron sputter deposition have been studied by x-ray diffraction and x-ray photoelectron spectroscopy. The structure of these films has been found to systematically evolve from the metastable A15 \u03b2-W phase to the equilibrium A2 \u03b1-W phase with decreasing oxygen impurity concentration. Within the \u03b2-W phase a decrease in the concentration of incorporated oxygen results in a monotonic decrease in the lattice parameter of the unit cell until the \u03b2-W phase eventually becomes unstable, and the \u03b1-W phase is formed.</jats:p>",
  "DOI": "10.1063/1.111318",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2002,
        7,
        26
      ]
    ],
    "date-time": "2002-07-26T13:38:29Z",
    "timestamp": 1027690709000
  },
  "page": "3231-3233",
  "update-policy": "http://dx.doi.org/10.1063/aip-crossmark-policy-page",
  "source": "Crossref",
  "is-referenced-by-count": 119,
  "title": "Structure and stability of sputter deposited beta-tungsten thin films",
  "prefix": "10.1063",
  "volume": "64",
  "author": [
    {
      "given": "I. A.",
      "family": "Weerasekera",
      "sequence": "first",
      "affiliation": [
        {
          "name": "Department of Physics and Astronomy, University of Delaware, Newark, Delaware 19716"
        }
      ]
    },
    {
      "given": "S. Ismat",
      "family": "Shah",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Experimental Station, Central Research and Development, E.I. du Pont de Nemours and Co., Wilmington, Delaware 19898-0356"
        }
      ]
    },
    {
      "given": "David V.",
      "family": "Baxter",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Department of Physics, Indiana University, Bloomington, Indiana 47405"
        }
      ]
    },
    {
      "given": "K. M.",
      "family": "Unruh",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Department of Physics and Astronomy, University of Delaware, Newark, Delaware 19716"
        }
      ]
    }
  ],
  "member": "317",
  "reference": [
    {
      "key": "2024020307240529200_r1",
      "first-page": "224",
      "volume": "17",
      "year": "1955",
      "journal-title": "Phys. Lett."
    },
    {
      "key": "2024020307240529200_r1a",
      "first-page": "260",
      "volume": "15",
      "year": "1965",
      "journal-title": "Phys. Rev. Lett."
    },
    {
      "key": "2024020307240529200_r1b",
      "doi-asserted-by": "crossref",
      "first-page": "259",
      "DOI": "10.1063/1.1651982",
      "volume": "12",
      "year": "1968",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020307240529200_r2",
      "doi-asserted-by": "crossref",
      "first-page": "5548",
      "DOI": "10.1063/1.1656012",
      "volume": "39",
      "year": "1968",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2024020307240529200_r3",
      "doi-asserted-by": "crossref",
      "first-page": "469",
      "DOI": "10.1016/0040-6090(87)90206-9",
      "volume": "153",
      "year": "1987",
      "journal-title": "Thin Solid Films"
    },
    {
      "key": "2024020307240529200_r3a",
      "doi-asserted-by": "crossref",
      "first-page": "2966",
      "DOI": "10.1116/1.576301",
      "volume": "7",
      "year": "1989",
      "journal-title": "J. Vac. Sci. Technol. A"
    },
    {
      "key": "2024020307240529200_r3b",
      "doi-asserted-by": "crossref",
      "first-page": "231",
      "DOI": "10.1016/0169-4332(89)90918-5",
      "volume": "36",
      "year": "1989",
      "journal-title": "Appl. Sur. Sci."
    },
    {
      "key": "2024020307240529200_r3c",
      "doi-asserted-by": "crossref",
      "first-page": "80",
      "DOI": "10.1557/JMR.1991.0080",
      "volume": "6",
      "year": "1991",
      "journal-title": "J. Mater. Res."
    },
    {
      "key": "2024020307240529200_r3d",
      "doi-asserted-by": "crossref",
      "first-page": "1470",
      "DOI": "10.1116/1.578686",
      "volume": "11",
      "year": "1993",
      "journal-title": "J. Vac. Sci. Technol. A"
    },
    {
      "key": "2024020307240529200_r4",
      "doi-asserted-by": "crossref",
      "first-page": "2319",
      "DOI": "10.1116/1.575583",
      "volume": "6",
      "year": "1988",
      "journal-title": "J. Vac. Sci. Technol. A"
    },
    {
      "key": "2024020307240529200_r4a",
      "doi-asserted-by": "crossref",
      "first-page": "149",
      "DOI": "10.1116/1.585277",
      "volume": "9",
      "year": "1991",
      "journal-title": "J. Vac. Sci. Technol. B"
    },
    {
      "key": "2024020307240529200_r5",
      "doi-asserted-by": "crossref",
      "first-page": "273",
      "DOI": "10.1116/1.578075",
      "volume": "10",
      "year": "1992",
      "journal-title": "J. Vac. Sci. Technol. A"
    },
    {
      "key": "2024020307240529200_r6",
      "doi-asserted-by": "crossref",
      "first-page": "287",
      "DOI": "10.1016/0040-6090(73)90107-7",
      "volume": "18",
      "year": "1973",
      "journal-title": "Thin Solid Films"
    },
    {
      "key": "2024020307240529200_r7"
    },
    {
      "key": "2024020307240529200_r8",
      "doi-asserted-by": "crossref",
      "first-page": "1759",
      "DOI": "10.1143/JJAP.32.1759",
      "volume": "32",
      "year": "1993",
      "journal-title": "Jpn. J. Appl. Phys."
    },
    {
      "key": "2024020307240529200_r9",
      "first-page": "218",
      "volume": "56",
      "year": "1984",
      "journal-title": "J. Appl. Phys."
    }
  ],
  "container-title": "Applied Physics Letters",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://pubs.aip.org/aip/apl/article-pdf/64/24/3231/18503333/3231_1_online.pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "syndication"
    },
    {
      "URL": "https://pubs.aip.org/aip/apl/article-pdf/64/24/3231/18503333/3231_1_online.pdf",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2024,
        2,
        3
      ]
    ],
    "date-time": "2024-02-03T07:24:33Z",
    "timestamp": 1706945073000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://pubs.aip.org/apl/article/64/24/3231/63538/Structure-and-stability-of-sputter-deposited-beta"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        1994,
        6,
        13
      ]
    ]
  },
  "references-count": 16,
  "journal-issue": {
    "issue": "24",
    "published-print": {
      "date-parts": [
        [
          1994,
          6,
          13
        ]
      ]
    }
  },
  "URL": "http://dx.doi.org/10.1063/1.111318",
  "relation": {},
  "ISSN": [
    "0003-6951",
    "1077-3118"
  ],
  "subject": [],
  "published-other": {
    "date-parts": [
      [
        1994,
        6,
        13
      ]
    ]
  },
  "published": {
    "date-parts": [
      [
        1994,
        6,
        13
      ]
    ]
  }
}