DOI: 10.1063/1.111108. Formation of probe microscope tips in silicon by focused ion beams

Formation of probe microscope tips in silicon by focused ion beams

10.1063/1.111108

Crossref journal-article

AIP Publishing

Applied Physics Letters (317)

Abstract

A combination of lithographic patterning, liquid phase anisotropic etching, and focused ion beam milling has been used to prototype the production of scanning probe microscope tips in single-crystal silicon. The results show that tips with geometry equivalent to those made with iridium or tungsten wires can be made without the deleterious random effects of grain structure. The tips subtend a maximum cone angle of 20° and protrude 3.5 μm above the surface of a Si pyramid bounded by (111) planes.

Bibliography

Vasile, M. J., Biddick, C., & Huggins, H. (1994). Formation of probe microscope tips in silicon by focused ion beams. Applied Physics Letters, 64(5), 575â576.

Authors 3

Michael J. Vasile (first)
Christopher Biddick (additional)
Harold Huggins (additional)

References 15 Referenced 16

10.1116/1.577708 / J. Vac. Sci. Technol. A (1992)
10.1116/1.585850 / J. Vac. Sci. Technol. B (1991)
10.1063/1.1142334 / Rev. Sci. Instrum. (1991)
10.1116/1.585846 / J. Vac. Sci. Technol. B (1991)
10.1063/1.102841 / Appl. Phys. Lett. (1990)
10.1109/84.128051 / J. Microelectromech. Syst. (1992)
10.1116/1.576520 / J. Vac. Sci. Technol. A (1990)
10.1116/1.585195 / J. Vac. Sci. Technol. B (1991)
10.1063/1.107468 / Appl. Phys. Lett. (1992)
{'key': '2024020306475835200_r10', 'first-page': '1178', 'volume': 'ED-25', 'year': '1978', 'journal-title': 'IEEE Trans. Electron Devices'} / IEEE Trans. Electron Devices (1978)
{'key': '2024020306475835200_r11', 'first-page': '1185', 'volume': 'ED-25', 'year': '1978', 'journal-title': 'IEEE Trans. Electron Devices'} / IEEE Trans. Electron Devices (1978)
{'key': '2024020306475835200_r12', 'first-page': '1036', 'volume': 'A21-A23', 'year': '1990', 'journal-title': 'Sensors and Actuators'} / Sensors and Actuators (1990)
10.1149/1.2086334 / J. Electrochem. Soc. (1990)
10.1109/10.83588 / IEEE Trans. Biomed. Eng. (1991)
10.1007/BF02368134 / Annals Biomed. Eng. (1992)

Dates

Type	When
Created	23 years, 1 month ago (July 26, 2002, 9:38 a.m.)
Deposited	1 year, 6 months ago (Feb. 3, 2024, 1:48 a.m.)
Indexed	1 year, 6 months ago (Feb. 3, 2024, 2:10 a.m.)
Issued	31 years, 6 months ago (Jan. 31, 1994)
Published	31 years, 6 months ago (Jan. 31, 1994)
Published Print	31 years, 6 months ago (Jan. 31, 1994)

Funders 0

None

BibTeX

@article{Vasile_1994, title={Formation of probe microscope tips in silicon by focused ion beams}, volume={64}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.111108}, DOI={10.1063/1.111108}, number={5}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={Vasile, Michael J. and Biddick, Christopher and Huggins, Harold}, year={1994}, month=jan, pages={575–576} }

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