DOI: 10.1063/1.108758. Microscale elastic-strain determination by backscatter Kikuchi diffraction in the scanning electron microscope

Microscale elastic-strain determination by backscatter Kikuchi diffraction in the scanning electron microscope

10.1063/1.108758

Crossref journal-article

AIP Publishing

Applied Physics Letters (317)

Abstract

It is shown that backscatter Kikuchi diffraction in the scanning electron microscope can be used for the determination of elastic strain with μm resolution. From the shift of Kikuchi bands in backscatter Kikuchi diffraction patterns of epitaxial Si1−xGex layers on Si(100) the perpendicular elastic strain was determined to be 2.5% for x=0.34 and at 1.0% for x=0.16 with an accuracy of about 0.1%. The values found on a μm scale were in good agreement with high-resolution x-ray diffraction measurements averaging over mm distances.

Bibliography

Troost, K. Z., van der Sluis, P., & Gravesteijn, D. J. (1993). Microscale elastic-strain determination by backscatter Kikuchi diffraction in the scanning electron microscope. Applied Physics Letters, 62(10), 1110â1112.

Authors 3

K. Z. Troost (first)
P. van der Sluis (additional)
D. J. Gravesteijn (additional)

References 12 Referenced 113

10.1080/14786437308225827 / Philos. Mag. (1973)
10.1088/0022-3735/14/2/011 / J. Phys. E (1981)
{'key': '2024020305144888200_r3'}
10.1107/S0021889888013342 / J. Appl. Cryst. (1989)
10.1016/0956-7151(91)90225-P / Acta Metall. Mater. (1991)
{'key': '2024020305144888200_r5', 'first-page': '304', 'volume': '39', 'year': '1991', 'journal-title': 'Acta Metall. Mater.'} / Acta Metall. Mater. (1991)
10.1107/S0021889890010834 / J. Appl. Cryst. (1991)
{'key': '2024020305144888200_r7'}
{'key': '2024020305144888200_r7a'}
{'key': '2024020305144888200_r8'}
{'key': '2024020305144888200_r9'}
{'key': '2024020305144888200_r10'}

Dates

Type	When
Created	23 years ago (July 26, 2002, 9:38 a.m.)
Deposited	1 year, 6 months ago (Feb. 3, 2024, 12:14 a.m.)
Indexed	4 weeks ago (July 24, 2025, 8:30 a.m.)
Issued	32 years, 5 months ago (March 8, 1993)
Published	32 years, 5 months ago (March 8, 1993)
Published Print	32 years, 5 months ago (March 8, 1993)

Funders 0

None

BibTeX

@article{Troost_1993, title={Microscale elastic-strain determination by backscatter Kikuchi diffraction in the scanning electron microscope}, volume={62}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.108758}, DOI={10.1063/1.108758}, number={10}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={Troost, K. Z. and van der Sluis, P. and Gravesteijn, D. J.}, year={1993}, month=mar, pages={1110–1112} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        7,
        24
      ]
    ],
    "date-time": "2025-07-24T12:30:00Z",
    "timestamp": 1753360200046
  },
  "reference-count": 12,
  "publisher": "AIP Publishing",
  "issue": "10",
  "content-domain": {
    "domain": [
      "pubs.aip.org"
    ],
    "crossmark-restriction": true
  },
  "published-print": {
    "date-parts": [
      [
        1993,
        3,
        8
      ]
    ]
  },
  "abstract": "<jats:p>It is shown that backscatter Kikuchi diffraction in the scanning electron microscope can be used for the determination of elastic strain with \u03bcm resolution. From the shift of Kikuchi bands in backscatter Kikuchi diffraction patterns of epitaxial Si1\u2212xGex layers on Si(100) the perpendicular elastic strain was determined to be 2.5% for x=0.34 and at 1.0% for x=0.16 with an accuracy of about 0.1%. The values found on a \u03bcm scale were in good agreement with high-resolution x-ray diffraction measurements averaging over mm distances.</jats:p>",
  "DOI": "10.1063/1.108758",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2002,
        7,
        26
      ]
    ],
    "date-time": "2002-07-26T13:38:28Z",
    "timestamp": 1027690708000
  },
  "page": "1110-1112",
  "update-policy": "http://dx.doi.org/10.1063/aip-crossmark-policy-page",
  "source": "Crossref",
  "is-referenced-by-count": 113,
  "title": "Microscale elastic-strain determination by backscatter Kikuchi diffraction in the scanning electron microscope",
  "prefix": "10.1063",
  "volume": "62",
  "author": [
    {
      "given": "K. Z.",
      "family": "Troost",
      "sequence": "first",
      "affiliation": [
        {
          "name": "Philips Research Laboratories, P.O. Box 80000, 5600 JA Eindhoven, The Netherlands"
        }
      ]
    },
    {
      "given": "P.",
      "family": "van der Sluis",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Philips Research Laboratories, P.O. Box 80000, 5600 JA Eindhoven, The Netherlands"
        }
      ]
    },
    {
      "given": "D. J.",
      "family": "Gravesteijn",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Philips Research Laboratories, P.O. Box 80000, 5600 JA Eindhoven, The Netherlands"
        }
      ]
    }
  ],
  "member": "317",
  "reference": [
    {
      "key": "2024020305144888200_r1",
      "doi-asserted-by": "crossref",
      "first-page": "1193",
      "DOI": "10.1080/14786437308225827",
      "volume": "27",
      "year": "1973",
      "journal-title": "Philos. Mag."
    },
    {
      "key": "2024020305144888200_r2",
      "doi-asserted-by": "crossref",
      "first-page": "175",
      "DOI": "10.1088/0022-3735/14/2/011",
      "volume": "14",
      "year": "1981",
      "journal-title": "J. Phys. E"
    },
    {
      "key": "2024020305144888200_r3"
    },
    {
      "key": "2024020305144888200_r3a",
      "doi-asserted-by": "crossref",
      "first-page": "189",
      "DOI": "10.1107/S0021889888013342",
      "volume": "22",
      "year": "1989",
      "journal-title": "J. Appl. Cryst."
    },
    {
      "key": "2024020305144888200_r4",
      "doi-asserted-by": "crossref",
      "first-page": "1377",
      "DOI": "10.1016/0956-7151(91)90225-P",
      "volume": "39",
      "year": "1991",
      "journal-title": "Acta Metall. Mater."
    },
    {
      "key": "2024020305144888200_r5",
      "first-page": "304",
      "volume": "39",
      "year": "1991",
      "journal-title": "Acta Metall. Mater."
    },
    {
      "key": "2024020305144888200_r6",
      "doi-asserted-by": "crossref",
      "first-page": "102",
      "DOI": "10.1107/S0021889890010834",
      "volume": "24",
      "year": "1991",
      "journal-title": "J. Appl. Cryst."
    },
    {
      "key": "2024020305144888200_r7"
    },
    {
      "key": "2024020305144888200_r7a"
    },
    {
      "key": "2024020305144888200_r8"
    },
    {
      "key": "2024020305144888200_r9"
    },
    {
      "key": "2024020305144888200_r10"
    }
  ],
  "container-title": "Applied Physics Letters",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://pubs.aip.org/aip/apl/article-pdf/62/10/1110/18494148/1110_1_online.pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "syndication"
    },
    {
      "URL": "https://pubs.aip.org/aip/apl/article-pdf/62/10/1110/18494148/1110_1_online.pdf",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2024,
        2,
        3
      ]
    ],
    "date-time": "2024-02-03T05:14:55Z",
    "timestamp": 1706937295000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://pubs.aip.org/apl/article/62/10/1110/61550/Microscale-elastic-strain-determination-by"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        1993,
        3,
        8
      ]
    ]
  },
  "references-count": 12,
  "journal-issue": {
    "issue": "10",
    "published-print": {
      "date-parts": [
        [
          1993,
          3,
          8
        ]
      ]
    }
  },
  "URL": "http://dx.doi.org/10.1063/1.108758",
  "relation": {},
  "ISSN": [
    "0003-6951",
    "1077-3118"
  ],
  "subject": [],
  "published-other": {
    "date-parts": [
      [
        1993,
        3,
        8
      ]
    ]
  },
  "published": {
    "date-parts": [
      [
        1993,
        3,
        8
      ]
    ]
  }
}