DOI: 10.1063/1.108284. Fatal electromigration voids in narrow aluminum-copper interconnect

Fatal electromigration voids in narrow aluminum-copper interconnect

10.1063/1.108284

Crossref journal-article

AIP Publishing

Applied Physics Letters (317)

Abstract

The shape and crystallography of fatal electromigration voids in near-bamboo Al-2 wt % Cu thin-film conductors were studied with transmission electron microscopy. Fatal voids were typically slit shaped and intragranular. Voids formed with {111} faces and with the slit length parallel to a 〈022〉 direction. The void faces were inclined and resided in grains of varying surface crystallographic orientation. Void morphology was independent of initial precipitate condition.

Bibliography

Rose, J. H. (1992). Fatal electromigration voids in narrow aluminum-copper interconnect. Applied Physics Letters, 61(18), 2170â2172.

Authors 1

J. H. Rose (first)

References 12 Referenced 90

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{'key': '2024020304423082200_r4', 'first-page': '518', 'volume': '5', 'year': '1987', 'journal-title': 'J. Vac. Sci. Technol. B'} / J. Vac. Sci. Technol. B (1987)
{'key': '2024020304423082200_r5'}
{'key': '2024020304423082200_r6'}
10.1063/1.1660116 / J. Appl. Phys. (1971)
10.1007/BF02673335 / J. Electron. Mater. (1990)
10.1109/EDL.1986.26513 / IEEE Electron. Device Lett. (1986)
{'key': '2024020304423082200_r10'}
10.1063/1.107035 / Appl. Phys. Lett. (1992)
{'key': '2024020304423082200_r12'}

Dates

Type	When
Created	23 years, 1 month ago (July 26, 2002, 8:49 a.m.)
Deposited	1 year, 6 months ago (Feb. 2, 2024, 11:42 p.m.)
Indexed	3 weeks ago (Aug. 6, 2025, 9:59 a.m.)
Issued	32 years, 9 months ago (Nov. 2, 1992)
Published	32 years, 9 months ago (Nov. 2, 1992)
Published Print	32 years, 9 months ago (Nov. 2, 1992)

Funders 0

None

BibTeX

@article{Rose_1992, title={Fatal electromigration voids in narrow aluminum-copper interconnect}, volume={61}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.108284}, DOI={10.1063/1.108284}, number={18}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={Rose, J. H.}, year={1992}, month=nov, pages={2170–2172} }

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