DOI: 10.1063/1.106870. Real-time monitoring of a surface reaction in germanium film growth

Real-time monitoring of a surface reaction in germanium film growth

10.1063/1.106870

Crossref journal-article

AIP Publishing

Applied Physics Letters (317)

Abstract

Epitaxial germanium film growth by a surface reaction was investigated using a pulsed molecular jet. Time-resolved reflectometry was utilized for in situ monitoring of both the formation and the evolution of a chemisorbed layer of digermane. The rate of chemisorption was independent of temperature. Evolution of the adsorption layers occurred by a temperature dependent first order process, believed to be molecular hydrogen desorption. Digital growth of germanium films was demonstrated by periodically refilling the active surface sites liberated by molecular hydrogen desorption between two successive gas pulses. Epitaxial germanium films over 150 nm thick were grown on Si (100) substrates.

Bibliography

Eres, D., & Sharp, J. W. (1992). Real-time monitoring of a surface reaction in germanium film growth. Applied Physics Letters, 60(22), 2764â2766.

Authors 2

Djula Eres (first)
J. W. Sharp (additional)

References 12 Referenced 10

{'key': '2024020304050357500_r1'}
{'key': '2024020304050357500_r2', 'first-page': '253', 'volume': '204', 'year': '1991', 'journal-title': 'Mater. Res. Soc. Symp. Proc.'} / Mater. Res. Soc. Symp. Proc. (1991)
10.1063/1.105636 / Appl. Phys. Lett. (1991)
{'key': '2024020304050357500_r4'}
{'key': '2024020304050357500_r5'}
10.1016/0039-6028(71)90272-X / Surf. Sci. (1971)
{'key': '2024020304050357500_r7'}
{'key': '2024020304050357500_r8'}
10.1063/1.458587 / J. Chem. Phys. (1990)
{'key': '2024020304050357500_r10', 'first-page': '319', 'volume': '204', 'year': '1991', 'journal-title': 'Mater. Res. Soc. Symp. Proc.'} / Mater. Res. Soc. Symp. Proc. (1991)
{'key': '2024020304050357500_r11'}
{'key': '2024020304050357500_r12'}

Dates

Type	When
Created	23 years, 1 month ago (July 26, 2002, 9:33 a.m.)
Deposited	1 year, 7 months ago (Feb. 2, 2024, 11:05 p.m.)
Indexed	1 year, 7 months ago (Feb. 5, 2024, 5:08 p.m.)
Issued	33 years, 3 months ago (June 1, 1992)
Published	33 years, 3 months ago (June 1, 1992)
Published Print	33 years, 3 months ago (June 1, 1992)

Funders 0

None

BibTeX

@article{Eres_1992, title={Real-time monitoring of a surface reaction in germanium film growth}, volume={60}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.106870}, DOI={10.1063/1.106870}, number={22}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={Eres, Djula and Sharp, J. W.}, year={1992}, month=jun, pages={2764–2766} }

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