DOI: 10.1063/1.102436. I n s i t u grown YBa2Cu3O7−d thin films from single-target magnetron sputtering

I n s i t u grown YBa2Cu3O7−d thin films from single-target magnetron sputtering

10.1063/1.102436

Crossref journal-article

AIP Publishing

Applied Physics Letters (317)

Abstract

Using single-target off-axis sputter deposition, high quality superconducting films of YBa2Cu3O7−δ were made in situ. These films have properties which are distinctly different from those of bulk ceramics and of post-deposition annealed films. Their superconducting resistive transitions remain sharp regardless of the value of Tc between 75 and 86 K. Normal-state conductivities are as high or higher than the best single crystals. Critical current densities as high as 6×107 A/cm2 at 4.2 K. Tc (R=0) falls off with film thickness down to 10 K for 35–40 Å films. All of the above properties are relatively insensitive to compositional variation. The results can be explained if the in situ growth results in well-formed CuO2 planes with defects occurring elsewhere.

Bibliography

Eom, C. B., Sun, J. Z., Yamamoto, K., Marshall, A. F., Luther, K. E., Geballe, T. H., & Laderman, S. S. (1989). I nâs i t u grown YBa2Cu3O7âd thin films from single-target magnetron sputtering. Applied Physics Letters, 55(6), 595â597.

Authors 7

C. B. Eom (first)
J. Z. Sun (additional)
K. Yamamoto (additional)
A. F. Marshall (additional)
K. E. Luther (additional)
T. H. Geballe (additional)
S. S. Laderman (additional)

References 8 Referenced 396

10.1111/j.1551-2916.1987.tb00097.x / Adv. Ceram. Mater. (1987)
{'key': '2024020223583345000_r2'}
10.1103/PhysRevB.37.7928 / Phys. Rev. B (1988)
10.1103/PhysRevB.38.834 / Phys. Rev. B (1988)
10.1103/PhysRevB.38.6543 / Phys. Rev. B (1988)
{'key': '2024020223583345000_r6', 'first-page': '560', 'volume': '153–155', 'year': '1988', 'journal-title': 'Physica C'} / Physica C (1988)
10.1063/1.98682 / Appl. Phys. Lett. (1987)
10.1109/20.92795 / IEEE Trans. Magn. (1989)

Dates

Type	When
Created	23 years ago (July 26, 2002, 9:02 a.m.)
Deposited	1 year, 6 months ago (Feb. 2, 2024, 6:58 p.m.)
Indexed	2 weeks, 6 days ago (July 31, 2025, 11:45 p.m.)
Issued	36 years ago (Aug. 7, 1989)
Published	36 years ago (Aug. 7, 1989)
Published Print	36 years ago (Aug. 7, 1989)

Funders 0

None

BibTeX

@article{Eom_1989, title={I n‚Äàs i t u grown YBa2Cu3O7‚àíd thin films from single-target magnetron sputtering}, volume={55}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.102436}, DOI={10.1063/1.102436}, number={6}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={Eom, C. B. and Sun, J. Z. and Yamamoto, K. and Marshall, A. F. and Luther, K. E. and Geballe, T. H. and Laderman, S. S.}, year={1989}, month=aug, pages={595‚Äì597} }

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