DOI: 10.1063/1.102096. Scanning capacitance microscopy on a 25 nm scale

Scanning capacitance microscopy on a 25 nm scale

10.1063/1.102096

Crossref journal-article

AIP Publishing

Applied Physics Letters (317)

Abstract

A near-field capacitance microscope has been demonstrated on a 25 nm scale. A resonant circuit provides the means for sensing the capacitance variations between a sub-100-nm tip and surface with a sensitivity of 1×10−19 F in a 1 kHz bandwidth. Feedback control is used to scan the tip at constant gap across a sample, providing a means of noncontact surface profiling. Images of conducting and nonconducting structures are presented.

Bibliography

Williams, C. C., Hough, W. P., & Rishton, S. A. (1989). Scanning capacitance microscopy on a 25 nm scale. Applied Physics Letters, 55(2), 203â205.

Authors 3

C. C. Williams (first)
W. P. Hough (additional)
S. A. Rishton (additional)

References 11 Referenced 187

10.1103/PhysRevLett.50.120 / Phys. Rev. Lett. (1983)
10.1103/PhysRevLett.56.930 / Phys. Rev. Lett. (1986)
10.1063/1.97800 / Appl. Phys. Lett. (1987)
10.1117/12.944530 / Proc. SPIE (1988)
10.1063/1.94865 / Appl. Phys. Lett. (1984)
10.1016/S0006-3495(86)83640-2 / Biophys. J. (1986)
{'key': '2024020223520192300_r7', 'first-page': '1437', 'volume': '47', 'year': '1985', 'journal-title': 'J. Appl. Phys.'} / J. Appl. Phys. (1985)
10.1088/0022-3735/21/2/003 / J. Phys. E (1988)
10.1063/1.99224 / Appl. Phys. Lett. (1988)
{'key': '2024020223520192300_r10', 'first-page': '194', 'volume': '43', 'year': '1982', 'journal-title': 'RCA Rev.'} / RCA Rev. (1982)
10.1116/1.584032 / J. Vac. Sci. Technol. B (1988)

Dates

Type	When
Created	23 years ago (July 26, 2002, 5:05 a.m.)
Deposited	1 year, 6 months ago (Feb. 2, 2024, 1:52 p.m.)
Indexed	4 months ago (April 21, 2025, 12:25 a.m.)
Issued	36 years, 1 month ago (July 10, 1989)
Published	36 years, 1 month ago (July 10, 1989)
Published Print	36 years, 1 month ago (July 10, 1989)

Funders 0

None

BibTeX

@article{Williams_1989, title={Scanning capacitance microscopy on a 25 nm scale}, volume={55}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.102096}, DOI={10.1063/1.102096}, number={2}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={Williams, C. C. and Hough, W. P. and Rishton, S. A.}, year={1989}, month=jul, pages={203–205} }

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