DOI: 10.1063/1.102008. Determination of tilted superlattice structure by atomic force microscopy

Determination of tilted superlattice structure by atomic force microscopy

10.1063/1.102008

Crossref journal-article

AIP Publishing

Applied Physics Letters (317)

Abstract

We have analyzed the structure of tilted superlattices on atomically stepped surfaces by using atomic force microscopy to detect ridges of GaAs formed by the selective oxidation and removal of intervening AlAs regions. Oxides were removed in a liquid cell of the atomic force microscope while scanning. We have demonstrated plan views which reveal the superlattice length and width uniformity, but the method is also in principle suited for cross-sectional samples.

Bibliography

Chalmers, S. A., Gossard, A. C., Weisenhorn, A. L., Gould, S. A. C., Drake, B., & Hansma, P. K. (1989). Determination of tilted superlattice structure by atomic force microscopy. Applied Physics Letters, 55(24), 2491â2493.

Authors 6

S. A. Chalmers (first)
A. C. Gossard (additional)
A. L. Weisenhorn (additional)
S. A. C. Gould (additional)
B. Drake (additional)
P. K. Hansma (additional)

References 30 Referenced 38

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Dates

Type	When
Created	23 years, 1 month ago (July 26, 2002, 9:05 a.m.)
Deposited	1 year, 6 months ago (Feb. 2, 2024, 7:25 p.m.)
Indexed	1 year, 6 months ago (Feb. 7, 2024, 2:43 p.m.)
Issued	35 years, 8 months ago (Dec. 11, 1989)
Published	35 years, 8 months ago (Dec. 11, 1989)
Published Print	35 years, 8 months ago (Dec. 11, 1989)

Funders 0

None

BibTeX

@article{Chalmers_1989, title={Determination of tilted superlattice structure by atomic force microscopy}, volume={55}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.102008}, DOI={10.1063/1.102008}, number={24}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={Chalmers, S. A. and Gossard, A. C. and Weisenhorn, A. L. and Gould, S. A. C. and Drake, B. and Hansma, P. K.}, year={1989}, month=dec, pages={2491–2493} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2024,
        2,
        7
      ]
    ],
    "date-time": "2024-02-07T19:43:49Z",
    "timestamp": 1707335029242
  },
  "reference-count": 30,
  "publisher": "AIP Publishing",
  "issue": "24",
  "content-domain": {
    "domain": [
      "pubs.aip.org"
    ],
    "crossmark-restriction": true
  },
  "published-print": {
    "date-parts": [
      [
        1989,
        12,
        11
      ]
    ]
  },
  "abstract": "<jats:p>We have analyzed the structure of tilted superlattices on atomically stepped surfaces by using atomic force microscopy to detect ridges of GaAs formed by the selective oxidation and removal of intervening AlAs regions. Oxides were removed in a liquid cell of the atomic force microscope while scanning. We have demonstrated plan views which reveal the superlattice length and width uniformity, but the method is also in principle suited for cross-sectional samples.</jats:p>",
  "DOI": "10.1063/1.102008",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2002,
        7,
        26
      ]
    ],
    "date-time": "2002-07-26T13:05:16Z",
    "timestamp": 1027688716000
  },
  "page": "2491-2493",
  "update-policy": "http://dx.doi.org/10.1063/aip-crossmark-policy-page",
  "source": "Crossref",
  "is-referenced-by-count": 38,
  "title": "Determination of tilted superlattice structure by atomic force microscopy",
  "prefix": "10.1063",
  "volume": "55",
  "author": [
    {
      "given": "S. A.",
      "family": "Chalmers",
      "sequence": "first",
      "affiliation": [
        {
          "name": "Department of Electrical and Computer Engineering and Materials Department, University of California, Santa Barbara, Santa Barbara, California 93106"
        }
      ]
    },
    {
      "given": "A. C.",
      "family": "Gossard",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Department of Electrical and Computer Engineering and Materials Department, University of California, Santa Barbara, Santa Barbara, California 93106"
        }
      ]
    },
    {
      "given": "A. L.",
      "family": "Weisenhorn",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Department of Physics, University of California, Santa Barbara, Santa Barbara, California 93106"
        }
      ]
    },
    {
      "given": "S. A. C.",
      "family": "Gould",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Department of Physics, University of California, Santa Barbara, Santa Barbara, California 93106"
        }
      ]
    },
    {
      "given": "B.",
      "family": "Drake",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Department of Physics, University of California, Santa Barbara, Santa Barbara, California 93106"
        }
      ]
    },
    {
      "given": "P. K.",
      "family": "Hansma",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Department of Physics, University of California, Santa Barbara, Santa Barbara, California 93106"
        }
      ]
    }
  ],
  "member": "317",
  "reference": [
    {
      "key": "2024020300251789000_r1",
      "doi-asserted-by": "crossref",
      "first-page": "L735",
      "DOI": "10.1143/JJAP.19.L735",
      "volume": "19",
      "year": "1980",
      "journal-title": "Jpn. J. Appl. Phys."
    },
    {
      "key": "2024020300251789000_r2",
      "doi-asserted-by": "crossref",
      "first-page": "939",
      "DOI": "10.1063/1.92959",
      "volume": "40",
      "year": "1982",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020300251789000_r3",
      "doi-asserted-by": "crossref",
      "first-page": "1378",
      "DOI": "10.1116/1.584225",
      "volume": "6",
      "year": "1988",
      "journal-title": "J. Vac. Sci. Technol. B"
    },
    {
      "key": "2024020300251789000_r4",
      "doi-asserted-by": "crossref",
      "first-page": "260",
      "DOI": "10.1016/0022-0248(89)90397-7",
      "volume": "95",
      "year": "1989",
      "journal-title": "J. Cryst. Growth"
    },
    {
      "key": "2024020300251789000_r5",
      "doi-asserted-by": "crossref",
      "first-page": "1690",
      "DOI": "10.1063/1.101304",
      "volume": "54",
      "year": "1989",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020300251789000_r6",
      "doi-asserted-by": "crossref",
      "first-page": "1373",
      "DOI": "10.1116/1.584224",
      "volume": "6",
      "year": "1988",
      "journal-title": "J. Vac. Sci. Technol. B"
    },
    {
      "key": "2024020300251789000_r7",
      "first-page": "930",
      "volume": "12",
      "year": "1986",
      "journal-title": "Phys. Rev. Lett."
    },
    {
      "key": "2024020300251789000_r8",
      "doi-asserted-by": "crossref",
      "first-page": "1281",
      "DOI": "10.1209/0295-5075/3/12/006",
      "volume": "3",
      "year": "1987",
      "journal-title": "Europhys. Lett."
    },
    {
      "key": "2024020300251789000_r9",
      "doi-asserted-by": "crossref",
      "first-page": "271",
      "DOI": "10.1116/1.575441",
      "volume": "6",
      "year": "1988",
      "journal-title": "J. Vac. Sci. Technol. A"
    },
    {
      "key": "2024020300251789000_r10",
      "doi-asserted-by": "crossref",
      "first-page": "2599",
      "DOI": "10.1063/1.339435",
      "volume": "62",
      "year": "1987",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2024020300251789000_r11",
      "doi-asserted-by": "crossref",
      "first-page": "164",
      "DOI": "10.1063/1.342563",
      "volume": "65",
      "year": "1989",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2024020300251789000_r12",
      "doi-asserted-by": "crossref",
      "first-page": "833",
      "DOI": "10.1063/1.1139788",
      "volume": "59",
      "year": "1988",
      "journal-title": "Rev. Sci. Instrum."
    },
    {
      "key": "2024020300251789000_r13",
      "doi-asserted-by": "crossref",
      "first-page": "1045",
      "DOI": "10.1063/1.100061",
      "volume": "53",
      "year": "1988",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020300251789000_r14",
      "doi-asserted-by": "crossref",
      "first-page": "1178",
      "DOI": "10.1063/1.341881",
      "volume": "64",
      "year": "1988",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2024020300251789000_r15",
      "doi-asserted-by": "crossref",
      "first-page": "1455",
      "DOI": "10.1063/1.97800",
      "volume": "50",
      "year": "1987",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020300251789000_r16",
      "doi-asserted-by": "crossref",
      "first-page": "1563",
      "DOI": "10.1063/1.99952",
      "volume": "53",
      "year": "1988",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020300251789000_r17",
      "doi-asserted-by": "crossref",
      "first-page": "266",
      "DOI": "10.1116/1.575440",
      "volume": "6",
      "year": "1988",
      "journal-title": "J. Vac. Sci. Technol. A"
    },
    {
      "key": "2024020300251789000_r18",
      "doi-asserted-by": "crossref",
      "first-page": "1942",
      "DOI": "10.1103/PhysRevLett.59.1942",
      "volume": "59",
      "year": "1987",
      "journal-title": "Phys. Rev. Lett."
    },
    {
      "key": "2024020300251789000_r19",
      "first-page": "3",
      "volume": "2",
      "year": "1988",
      "journal-title": "Scanning Microsc."
    },
    {
      "key": "2024020300251789000_r20",
      "doi-asserted-by": "crossref",
      "first-page": "2717",
      "DOI": "10.1063/1.100162",
      "volume": "53",
      "year": "1988",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020300251789000_r21",
      "doi-asserted-by": "crossref",
      "first-page": "1586",
      "DOI": "10.1126/science.2928794",
      "volume": "243",
      "year": "1989",
      "journal-title": "Science"
    },
    {
      "key": "2024020300251789000_r22",
      "doi-asserted-by": "crossref",
      "first-page": "332",
      "DOI": "10.1038/332332a0",
      "volume": "332",
      "year": "1988",
      "journal-title": "Nature"
    },
    {
      "key": "2024020300251789000_r23"
    },
    {
      "key": "2024020300251789000_r24",
      "first-page": "319",
      "volume": "33",
      "year": "1988",
      "journal-title": "Bull. Am. Phys. Soc."
    },
    {
      "key": "2024020300251789000_r25"
    },
    {
      "key": "2024020300251789000_r26"
    },
    {
      "key": "2024020300251789000_r27",
      "doi-asserted-by": "crossref",
      "first-page": "609",
      "DOI": "10.1080/10408437508243518",
      "volume": "5",
      "year": "1975",
      "journal-title": "Crit. Rev. Solid State Sci."
    },
    {
      "key": "2024020300251789000_r28"
    },
    {
      "key": "2024020300251789000_r29"
    },
    {
      "key": "2024020300251789000_r30",
      "doi-asserted-by": "crossref",
      "first-page": "R123",
      "DOI": "10.1063/1.331665",
      "volume": "53",
      "year": "1982",
      "journal-title": "J. Appl. Phys."
    }
  ],
  "container-title": "Applied Physics Letters",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://pubs.aip.org/aip/apl/article-pdf/55/24/2491/18474205/2491_1_online.pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "syndication"
    },
    {
      "URL": "https://pubs.aip.org/aip/apl/article-pdf/55/24/2491/18474205/2491_1_online.pdf",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2024,
        2,
        3
      ]
    ],
    "date-time": "2024-02-03T00:25:31Z",
    "timestamp": 1706919931000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://pubs.aip.org/apl/article/55/24/2491/56172/Determination-of-tilted-superlattice-structure-by"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        1989,
        12,
        11
      ]
    ]
  },
  "references-count": 30,
  "journal-issue": {
    "issue": "24",
    "published-print": {
      "date-parts": [
        [
          1989,
          12,
          11
        ]
      ]
    }
  },
  "URL": "http://dx.doi.org/10.1063/1.102008",
  "relation": {},
  "ISSN": [
    "0003-6951",
    "1077-3118"
  ],
  "subject": [],
  "published-other": {
    "date-parts": [
      [
        1989,
        12,
        11
      ]
    ]
  },
  "published": {
    "date-parts": [
      [
        1989,
        12,
        11
      ]
    ]
  }
}