Abstract
A high-sensitivity fiber-optic displacement sensor for atomic force microscopy is described. The sensor is based on the optical interference occurring in the micron-sized cavity formed between the cleaved end of a single-mode optical fiber and the microscope cantilever. As a result of using a diode laser light source and all-fiber construction, the sensor is compact, mechanically robust, and exhibits good low-frequency noise behavior. Peak-to-peak noise in a dc to 1 kHz bandwidth is less than 0.1 Å. Images are presented demonstrating atomic resolution of graphite and magnetic force imaging of bits written on a magnetic disk.
References
24
Referenced
533
10.1103/PhysRevLett.56.930
/ Phys. Rev. Lett. (1986)10.1209/0295-5075/3/12/006
/ Europhys. Lett. (1987)10.1063/1.98374
/ Appl. Phys. Lett. (1987)10.1126/science.2928794
/ Science (1989)10.1063/1.339105
/ J. Appl. Phys. (1987){'key': '2024020300290265400_r6', 'first-page': '1942', 'volume': '59', 'year': '1988', 'journal-title': 'Phys. Rev. Lett.'}
/ Phys. Rev. Lett. (1988){'key': '2024020300290265400_r7'}
10.1063/1.338807
/ J. Appl. Phys. (1987)10.1063/1.97800
/ Appl. Phys. Lett. (1987)10.1063/1.99952
/ Appl. Phys. Lett. (1988)10.1063/1.99224
/ Appl. Phys. Lett. (1988)10.1063/1.100162
/ Appl. Phys. Lett. (1988){'key': '2024020300290265400_r13'}
10.1063/1.1139958
/ Rev. Sci. Instrum. (1988)10.1063/1.1140543
/ Rev. Sci. Instrum. (1989)10.1063/1.100061
/ Appl. Phys. Lett. (1988)10.1063/1.342563
/ J. Appl. Phys. (1989)10.1364/OL.13.001057
/ Opt. Lett. (1988){'key': '2024020300290265400_r19'}
{'key': '2024020300290265400_r20'}
10.1063/1.1137721
/ Rev. Sci. Instrum. (1984)10.1063/1.92254
/ Appl. Phys. Lett. (1981){'key': '2024020300290265400_r23', 'first-page': '1251', 'volume': 'QE-17', 'year': '1981', 'journal-title': 'IEEE J. Quantum Electron.'}
/ IEEE J. Quantum Electron. (1981){'key': '2024020300290265400_r24'}
Dates
Type | When |
---|---|
Created | 23 years ago (July 26, 2002, 9:05 a.m.) |
Deposited | 1 year, 6 months ago (Feb. 2, 2024, 7:29 p.m.) |
Indexed | 8 hours ago (Aug. 23, 2025, 12:58 a.m.) |
Issued | 35 years, 8 months ago (Dec. 18, 1989) |
Published | 35 years, 8 months ago (Dec. 18, 1989) |
Published Print | 35 years, 8 months ago (Dec. 18, 1989) |
@article{Rugar_1989, title={Improved fiber-optic interferometer for atomic force microscopy}, volume={55}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.101987}, DOI={10.1063/1.101987}, number={25}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={Rugar, D. and Mamin, H. J. and Guethner, P.}, year={1989}, month=dec, pages={2588–2590} }