DOI: 10.1063/1.101585. Laser writing of high-purity gold lines

10.1063/1.101585

Crossref journal-article

AIP Publishing

Applied Physics Letters (317)

Abstract

Gold tracks of better than 98% purity have been deposited onto oxidized silicon wafers from gaseous methyl(triethylphosphine) gold(I), AuMe(Et3 P), by using 514 nm radiation from a focused cw argon ion laser. Room-temperature resistivities of 4.2 μΩ cm, comparable with bulk gold, were attained at a writing speed of 35 μm s−1 . The track profiles suggest that deposition is more rapid on the gold surface than on the SiO2 substrate.

Bibliography

Jubber, M., Wilson, J. I. B., Davidson, J. L., Fernie, P. A., & John, P. (1989). Laser writing of high-purity gold lines. Applied Physics Letters, 55(14), 1477â1479.

Authors 5

M. Jubber (first)
J. I. B. Wilson (additional)
J. L. Davidson (additional)
P. A. Fernie (additional)
P. John (additional)

References 19 Referenced 19

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10.1116/1.583481 / J. Vac. Sci. Technol. B (1986)
10.1149/1.2100254 / J. Electrochem. Soc. (1987)
10.1063/1.95981 / Appl. Phys. Lett. (1985)
{'key': '2024020300101560000_r5', 'first-page': '165', 'volume': '75', 'year': '1987', 'journal-title': 'Mater. Res. Soc. Symp. Proc.'} / Mater. Res. Soc. Symp. Proc. (1987)
10.1063/1.339737 / J. Appl. Phys. (1987)
10.1063/1.337442 / J. Appl. Phys. (1986)
10.1063/1.98971 / Appl. Phys. Lett. (1987)
10.1063/1.95698 / Appl. Phys. Lett. (1985)
10.1063/1.100398 / Appl. Phys. Lett. (1988)
10.1063/1.97418 / Appl. Phys. Lett. (1986)
{'key': '2024020300101560000_r12', 'first-page': '146', 'volume': '1', 'year': '1986', 'journal-title': 'Chemtronics'} / Chemtronics (1986)
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{'key': '2024020300101560000_r14'}
{'key': '2024020300101560000_r15', 'first-page': '165', 'volume': '134', 'year': '1987', 'journal-title': 'NATO ASI Series E'} / NATO ASI Series E (1987)
{'key': '2024020300101560000_r16'}
{'key': '2024020300101560000_r17'}
{'key': '2024020300101560000_r18'}
10.1016/0022-328X(87)80355-8 / J. Organomet. Chem. (1987)

Dates

Type	When
Created	23 years, 1 month ago (July 26, 2002, 8:51 a.m.)
Deposited	1 year, 6 months ago (Feb. 2, 2024, 7:10 p.m.)
Indexed	1 year, 6 months ago (Feb. 3, 2024, 3:17 a.m.)
Issued	35 years, 10 months ago (Oct. 2, 1989)
Published	35 years, 10 months ago (Oct. 2, 1989)
Published Print	35 years, 10 months ago (Oct. 2, 1989)

Funders 0

None

BibTeX

@article{Jubber_1989, title={Laser writing of high-purity gold lines}, volume={55}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.101585}, DOI={10.1063/1.101585}, number={14}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={Jubber, M. and Wilson, J. I. B. and Davidson, J. L. and Fernie, P. A. and John, P.}, year={1989}, month=oct, pages={1477–1479} }

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