Abstract
We used simple thermal coevaporation of yttrium, barium, and copper in an oxygen atmosphere to produce thin films of the 90 K superconductor, YBa2Cu3O7−δ, on silicon, magnesium oxide, and strontium titanate. The films were deposited on 650 °C substrates and were superconducting when removed from the evaporator. A short post-anneal at 480 °C produced films on bare Si with transition temperatures (R=0) of 85 K. Films as thin as 0.13 μm, superconducting at 91 K (on MgO) and 89 K (on SrTiO3), were obtained with no post-anneal.
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@article{Berberich_1988, title={Low-temperature preparation of superconducting YBa2Cu3O7−δ films on Si, MgO, and SrTiO3 by thermal coevaporation}, volume={53}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.100647}, DOI={10.1063/1.100647}, number={10}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={Berberich, P. and Tate, J. and Dietsche, W. and Kinder, H.}, year={1988}, month=sep, pages={925–926} }