DOI: 10.1063/1.100472. Laser-driven chemical vapor deposition of platinum at atmospheric pressure and room temperature from <i>C</i> <i>p</i>Pt(CH3)3

Laser-driven chemical vapor deposition of platinum at atmospheric pressure and room temperature from C pPt(CH3)3

10.1063/1.100472

Crossref journal-article

AIP Publishing

Applied Physics Letters (317)

Abstract

Photolysis of CpPt(Me)3(Cp=η5-C5H5, Me=CH3) at room temperature and atmospheric pressure produces thin films and patterned structures of platinum metal on solid substrates. The platinum films are characterized by Auger electron spectroscopy, x-ray diffraction, and scanning electron microscopy. Substrates can also be prepatterned by laser irradiation and then developed into a shiny platinum deposit at a later time.

Bibliography

Koplitz, L. V., Shuh, D. K., Chen, Y.-J., Williams, R. S., & Zink, J. I. (1988). Laser-driven chemical vapor deposition of platinum at atmospheric pressure and room temperature from C pPt(CH3)3. Applied Physics Letters, 53(18), 1705â1707.

Authors 5

Lynn Vogel Koplitz (first)
David K. Shuh (additional)
Y.-J. Chen (additional)
R. Stanley Williams (additional)
Jeffrey I. Zink (additional)

References 12 Referenced 27

10.1149/1.2403534 / J. Electrochem. Soc. (1973)
10.1149/1.2134328 / J. Electrochem. Soc. (1975)
10.1016/0040-6090(74)90300-9 / Thin Solid Films (1974)
{'key': '2024020222562642400_r4'}
10.1021/ja00216a073 / J. Am. Chem. Soc. (1988)
10.1007/BF00617497 / Appl. Phys. A (1985)
{'key': '2024020222562642400_r7', 'first-page': '1', 'volume': '6', 'year': '1988', 'journal-title': 'J. Vac. Sci. Technol. B'} / J. Vac. Sci. Technol. B (1988)
{'key': '2024020222562642400_r8'}
10.1016/S0022-328X(00)80295-8 / J. Organomet. Chem. (1970)
10.1016/S0020-1693(00)90955-1 / Inorg. Chim. Acta (1980)
{'key': '2024020222562642400_r11'}
10.1021/ja00400a026 / J. Am. Chem. Soc. (1981)

Dates

Type	When
Created	23 years, 1 month ago (July 26, 2002, 8:48 a.m.)
Deposited	1 year, 6 months ago (Feb. 2, 2024, 6:13 p.m.)
Indexed	1 year, 1 month ago (June 29, 2024, 8:52 p.m.)
Issued	36 years, 9 months ago (Oct. 31, 1988)
Published	36 years, 9 months ago (Oct. 31, 1988)
Published Print	36 years, 9 months ago (Oct. 31, 1988)

Funders 0

None

BibTeX

@article{Koplitz_1988, title={Laser-driven chemical vapor deposition of platinum at atmospheric pressure and room temperature from C pPt(CH3)3}, volume={53}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.100472}, DOI={10.1063/1.100472}, number={18}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={Koplitz, Lynn Vogel and Shuh, David K. and Chen, Y.-J. and Williams, R. Stanley and Zink, Jeffrey I.}, year={1988}, month=oct, pages={1705–1707} }

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