DOI: 10.1046/j.1365-2818.2002.01062.x. SMART – a program to measure SEM resolution and imaging performance

SMART – a program to measure SEM resolution and imaging performance

10.1046/j.1365-2818.2002.01062.x

Crossref journal-article

Wiley

Journal of Microscopy (311)

Abstract

SummaryIt is important to be able to measure the parameters, such as spatial resolution, astigmastism, signal‐to‐noise ratio, and drift and instability, that characterize the performance of a scanning electron microscope. These quantities can be determined most reliably by a Fourier analysis of digital micrographs from the instrument, recorded under conditions of interest. A program designed to implement all of the necessary steps in an automated manner has been developed as a ‘macro’ for the popular, and freely available, NIH Image and SCION Image programs.

Bibliography

Joy, D. C. (2002). SMART â a program to measure SEM resolution and imaging performance. Journal of Microscopy, 208(1), 24â34. Portico.

Authors 1

D. C. Joy (first)

References 21 Referenced 88

{'key': 'e_1_2_10_2_1', 'first-page': '297', 'article-title': 'A rapid algorithm for the evaluation of discrete Fourier transforms', 'volume': '19', 'author': 'Cooley J.W.', 'year': '1965', 'journal-title': 'Math. Computat'} / Math. Computat / A rapid algorithm for the evaluation of discrete Fourier transforms by Cooley J.W. (1965)
{'key': 'e_1_2_10_3_1', 'first-page': '406', 'volume-title': 'Proceedings of the 12th International Conference on Electron Microscopy', 'author': 'Dodson T.A.', 'year': '1990'} / Proceedings of the 12th International Conference on Electron Microscopy by Dodson T.A. (1990)
{'key': 'e_1_2_10_4_1', 'first-page': '73', 'article-title': 'On‐line computation of diffractograms for the analysis of SEM images', 'volume': '52', 'author': 'Erasmus S.J.', 'year': '1980', 'journal-title': 'Inst Phys. Conf Series'} / Inst Phys. Conf Series / On‐line computation of diffractograms for the analysis of SEM images by Erasmus S.J. (1980)
10.1007/978-3-642-81381-8_5
{'key': 'e_1_2_10_6_1', 'first-page': '1105', 'article-title': 'Transmission electron diffractograms', 'volume': '74', 'author': 'Frank J.', 'year': '1970', 'journal-title': 'Ber. Busenges. Phys. Chem'} / Ber. Busenges. Phys. Chem / Transmission electron diffractograms by Frank J. (1970)
10.1038/256376a0
10.1007/978-1-4613-0491-3
{'key': 'e_1_2_10_9_1', 'first-page': '327', 'volume-title': 'Proceedings of the 7th SEM Symposium', 'author': 'Joy D.C.', 'year': '1974'} / Proceedings of the 7th SEM Symposium by Joy D.C. (1974)
10.1002/sca.4950180802
10.1116/1.584115
{'key': 'e_1_2_10_12_1', 'first-page': '71', 'article-title': 'A contribution to the evaluation of SEM resolution', 'volume': '3332', 'author': 'Maunly A.', 'year': '1999', 'journal-title': 'SPIE Proc. Microlithogr'} / SPIE Proc. Microlithogr / A contribution to the evaluation of SEM resolution by Maunly A. (1999)
10.1093/oxfordjournals.jmicro.a023869
10.1002/sca.4950230509
{'key': 'e_1_2_10_15_1', 'volume-title': 'The Fast Fourier Transform', 'author': 'Oran B.E.', 'year': '1974'} / The Fast Fourier Transform by Oran B.E. (1974)
10.1002/sca.1998.4950200101
{'key': 'e_1_2_10_17_1', 'first-page': '24', 'article-title': 'Image sharpness measurement in scanning electron microscopy – Part 2', 'volume': '20', 'author': 'Postek M.', 'year': '1997', 'journal-title': 'Scanning'} / Scanning / Image sharpness measurement in scanning electron microscopy – Part 2 by Postek M. (1997)
{'key': 'e_1_2_10_18_1', 'first-page': '28', 'article-title': 'Potential of 0n‐line SEM performance analysis using RM8091', 'volume': '3998', 'author': 'Postek M.', 'year': '2000', 'journal-title': 'Metrology, Inspections and Process Control for MicroLithography, XIV, Proceedings of the SPIE'} / Metrology, Inspections and Process Control for MicroLithography, XIV, Proceedings of the SPIE / Potential of 0n‐line SEM performance analysis using RM8091 by Postek M. (2000)
{'key': 'e_1_2_10_19_1', 'article-title': 'A Rayleigh related method of determining electron microscope resolution', 'volume': '4689', 'author': 'Rosenberg I.', 'year': '2002', 'journal-title': 'Metrology, Inspections and Process Control for MicroLithography, XVII'} / Metrology, Inspections and Process Control for MicroLithography, XVII / A Rayleigh related method of determining electron microscope resolution by Rosenberg I. (2002)
{'key': 'e_1_2_10_20_1', 'first-page': '319', 'volume-title': 'Handbook of Charged Particle Optics', 'author': 'Sato M.', 'year': '1997'} / Handbook of Charged Particle Optics by Sato M. (1997)
10.1002/sca.4950230506
10.1007/978-1-4757-2519-3

Dates

Type	When
Created	22 years, 5 months ago (March 12, 2003, 1:34 a.m.)
Deposited	1 year, 11 months ago (Sept. 27, 2023, 3:17 p.m.)
Indexed	3 weeks, 4 days ago (Aug. 12, 2025, 5:50 p.m.)
Issued	22 years, 11 months ago (Oct. 1, 2002)
Published	22 years, 11 months ago (Oct. 1, 2002)
Published Online	22 years, 11 months ago (Oct. 4, 2002)
Published Print	22 years, 11 months ago (Oct. 1, 2002)

Funders 0

None

BibTeX

@article{Joy_2002, title={SMART – a program to measure SEM resolution and imaging performance}, volume={208}, ISSN={1365-2818}, url={http://dx.doi.org/10.1046/j.1365-2818.2002.01062.x}, DOI={10.1046/j.1365-2818.2002.01062.x}, number={1}, journal={Journal of Microscopy}, publisher={Wiley}, author={Joy, D. C.}, year={2002}, month=oct, pages={24–34} }

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