DOI: 10.1039/c2jm32343e. Quantitative in situ infrared analysis of reactions between trimethylaluminum and polymers during Al2O3 atomic layer deposition

Quantitative in situ infrared analysis of reactions between trimethylaluminum and polymers during Al2O3 atomic layer deposition

10.1039/c2jm32343e

Crossref journal-article

Royal Society of Chemistry (RSC)

Journal of Materials Chemistry (292)

Bibliography

Gong, B., & Parsons, G. N. (2012). Quantitative in situ infrared analysis of reactions between trimethylaluminum and polymers during Al2O3 atomic layer deposition. Journal of Materials Chemistry, 22(31), 15672.

Authors 2

Bo Gong (first)
Gregory N. Parsons (additional)

References 42 Referenced 118

10.1038/nature03090 / Nature by Nomura (2004)
10.1073/pnas.091588098 / Proc. Natl. Acad. Sci. U. S. A. by Rogers (2001)
10.1126/science.1154367 / Science by Kim (2008)
10.1021/nn800174y / ACS Nano by Kuang (2008)
10.1039/b823001c / J. Mater. Chem. by Krebs (2009)
10.1016/0257-8972(95)02420-4 / Surf. Coat. Technol. by Chatham (1996)
10.1021/cr00099a003 / Chem. Rev. by Hench (1990)
10.1016/0079-6786(88)90005-2 / Prog. Solid State Chem. by Livage (1988)
10.1166/jnn.2005.164 / J. Nanosci. Nanotechnol. by Lee (2005)
10.1016/j.jcis.2007.05.006 / J. Colloid Interface Sci. by Yi (2007)
10.1002/anie.200301652 / Angew. Chem., Int. Ed. by Leskela (2003)
10.1146/annurev.ms.15.080185.001141 / Annu. Rev. Mater. Sci. by Suntola (1985)
10.1021/jp9536763 / J. Phys. Chem. by George (1996)
10.1063/1.1940727 / J. Appl. Phys. by Puurunen (2005)
10.1021/cm040008y / Chem. Mater. by Ferguson (2004)
10.1021/nl048589d / Nano Lett. by Xu (2004)
10.1021/nl062948i / Nano Lett. by Peng (2007)
10.1002/adma.200600728 / Adv. Mater. by Ras (2007)
10.1002/adma.200900136 / Adv. Mater. by Wang (2009)
10.1021/nl060413j / Nano Lett. by Knez (2006)
10.1021/nl061851t / Nano Lett. by Huang (2006)
10.1021/la902830d / Langmuir by Hyde (2010)
10.1088/0957-4484/19/35/355708 / Nanotechnology by Ding (2008)
10.1039/c0jm00355g / J. Mater. Chem. by Spagnola (2010)
10.1021/la904604z / Langmuir by Jur (2010)
10.1126/science.1168162 / Science by Lee (2009)
10.1002/anie.200900426 / Angew. Chem., Int. Ed. by Zhang (2009)
10.1021/am100217m / ACS Appl. Mater. Interfaces by Minton (2010)
10.1021/cm050704d / Chem. Mater. by Wilson (2005)
10.1021/cm200694w / Chem. Mater. by Gong (2011)
{'key': 'c2jm32343e-(cit32)/*[position()=1]', 'first-page': '52', 'volume': '4', 'author': 'Jayaraman', 'year': '2004', 'journal-title': 'J. Nanosci. Nanotechnol.'} / J. Nanosci. Nanotechnol. by Jayaraman (2004)
10.1016/j.polymer.2006.01.084 / Polymer by Ulbricht (2006)
{'key': 'c2jm32343e-(cit34)/*[position()=1]', 'author': 'Gong', 'year': '2011', 'journal-title': 'J. Phys. Chem. B'} / J. Phys. Chem. B by Gong (2011)
10.1016/0584-8539(91)80124-2 / Spectrochim. Acta, Part A by Atiya (1991)
10.1016/0009-2614(85)80672-2 / Chem. Phys. Lett. by Higashi (1985)
10.1016/0039-6028(95)90033-0 / Surf. Sci. by Dillon (1995)
10.1063/1.3258646 / J. Chem. Phys. by Max (2009)
10.1021/j100255a014 / J. Phys. Chem. by Tso (1985)
10.1021/cm0304546 / Chem. Mater. by Groner (2004)
10.1021/la803581k / Langmuir by Li (2009)
10.1021/ma00007a010 / Macromolecules by Brinkhuis (1991)
10.1021/jp804296a / J. Phys. Chem. C by Goldstein (2008)

Dates

Type	When
Created	13 years, 2 months ago (May 31, 2012, 6:02 a.m.)
Deposited	1 year, 4 months ago (April 17, 2024, 8:41 a.m.)
Indexed	1 month, 1 week ago (July 20, 2025, 12:16 a.m.)
Issued	13 years, 7 months ago (Jan. 1, 2012)
Published	13 years, 7 months ago (Jan. 1, 2012)
Published Print	13 years, 7 months ago (Jan. 1, 2012)

Funders 0

None

BibTeX

@article{Gong_2012, title={Quantitative in situ infrared analysis of reactions between trimethylaluminum and polymers during Al2O3 atomic layer deposition}, volume={22}, ISSN={1364-5501}, url={http://dx.doi.org/10.1039/c2jm32343e}, DOI={10.1039/c2jm32343e}, number={31}, journal={Journal of Materials Chemistry}, publisher={Royal Society of Chemistry (RSC)}, author={Gong, Bo and Parsons, Gregory N.}, year={2012}, pages={15672} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        7,
        20
      ]
    ],
    "date-time": "2025-07-20T04:16:33Z",
    "timestamp": 1752984993878
  },
  "reference-count": 42,
  "publisher": "Royal Society of Chemistry (RSC)",
  "issue": "31",
  "content-domain": {
    "domain": [],
    "crossmark-restriction": false
  },
  "published-print": {
    "date-parts": [
      [
        2012
      ]
    ]
  },
  "DOI": "10.1039/c2jm32343e",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2012,
        5,
        31
      ]
    ],
    "date-time": "2012-05-31T10:02:15Z",
    "timestamp": 1338458535000
  },
  "page": "15672",
  "source": "Crossref",
  "is-referenced-by-count": 118,
  "title": "Quantitative in situ infrared analysis of reactions between trimethylaluminum and polymers during Al2O3 atomic layer deposition",
  "prefix": "10.1039",
  "volume": "22",
  "author": [
    {
      "given": "Bo",
      "family": "Gong",
      "sequence": "first",
      "affiliation": []
    },
    {
      "given": "Gregory N.",
      "family": "Parsons",
      "sequence": "additional",
      "affiliation": []
    }
  ],
  "member": "292",
  "reference": [
    {
      "key": "c2jm32343e-(cit1)/*[position()=1]",
      "doi-asserted-by": "crossref",
      "first-page": "488",
      "DOI": "10.1038/nature03090",
      "volume": "432",
      "author": "Nomura",
      "year": "2004",
      "journal-title": "Nature"
    },
    {
      "key": "c2jm32343e-(cit2)/*[position()=1]",
      "doi-asserted-by": "crossref",
      "first-page": "4835",
      "DOI": "10.1073/pnas.091588098",
      "volume": "98",
      "author": "Rogers",
      "year": "2001",
      "journal-title": "Proc. Natl. Acad. Sci. U. S. A."
    },
    {
      "key": "c2jm32343e-(cit3)/*[position()=1]",
      "doi-asserted-by": "crossref",
      "first-page": "507",
      "DOI": "10.1126/science.1154367",
      "volume": "320",
      "author": "Kim",
      "year": "2008",
      "journal-title": "Science"
    },
    {
      "key": "c2jm32343e-(cit4)/*[position()=1]",
      "doi-asserted-by": "crossref",
      "first-page": "1113",
      "DOI": "10.1021/nn800174y",
      "volume": "2",
      "author": "Kuang",
      "year": "2008",
      "journal-title": "ACS Nano"
    },
    {
      "key": "c2jm32343e-(cit5)/*[position()=1]",
      "doi-asserted-by": "crossref",
      "first-page": "5442",
      "DOI": "10.1039/b823001c",
      "volume": "19",
      "author": "Krebs",
      "year": "2009",
      "journal-title": "J. Mater. Chem."
    },
    {
      "key": "c2jm32343e-(cit6)/*[position()=1]",
      "doi-asserted-by": "crossref",
      "first-page": "1",
      "DOI": "10.1016/0257-8972(95)02420-4",
      "volume": "78",
      "author": "Chatham",
      "year": "1996",
      "journal-title": "Surf. Coat. Technol."
    },
    {
      "key": "c2jm32343e-(cit7)/*[position()=1]",
      "doi-asserted-by": "crossref",
      "first-page": "33",
      "DOI": "10.1021/cr00099a003",
      "volume": "90",
      "author": "Hench",
      "year": "1990",
      "journal-title": "Chem. Rev."
    },
    {
      "key": "c2jm32343e-(cit8)/*[position()=1]",
      "doi-asserted-by": "crossref",
      "first-page": "259",
      "DOI": "10.1016/0079-6786(88)90005-2",
      "volume": "18",
      "author": "Livage",
      "year": "1988",
      "journal-title": "Prog. Solid State Chem."
    },
    {
      "key": "c2jm32343e-(cit9)/*[position()=1]",
      "doi-asserted-by": "crossref",
      "first-page": "1088",
      "DOI": "10.1166/jnn.2005.164",
      "volume": "5",
      "author": "Lee",
      "year": "2005",
      "journal-title": "J. Nanosci. Nanotechnol."
    },
    {
      "key": "c2jm32343e-(cit10)/*[position()=1]",
      "doi-asserted-by": "crossref",
      "first-page": "705",
      "DOI": "10.1016/j.jcis.2007.05.006",
      "volume": "313",
      "author": "Yi",
      "year": "2007",
      "journal-title": "J. Colloid Interface Sci."
    },
    {
      "key": "c2jm32343e-(cit11)/*[position()=1]",
      "doi-asserted-by": "crossref",
      "first-page": "5548",
      "DOI": "10.1002/anie.200301652",
      "volume": "42",
      "author": "Leskela",
      "year": "2003",
      "journal-title": "Angew. Chem., Int. Ed."
    },
    {
      "key": "c2jm32343e-(cit12)/*[position()=1]",
      "doi-asserted-by": "crossref",
      "first-page": "177",
      "DOI": "10.1146/annurev.ms.15.080185.001141",
      "volume": "15",
      "author": "Suntola",
      "year": "1985",
      "journal-title": "Annu. Rev. Mater. Sci."
    },
    {
      "key": "c2jm32343e-(cit13)/*[position()=1]",
      "doi-asserted-by": "crossref",
      "first-page": "13121",
      "DOI": "10.1021/jp9536763",
      "volume": "100",
      "author": "George",
      "year": "1996",
      "journal-title": "J. Phys. Chem."
    },
    {
      "key": "c2jm32343e-(cit14)/*[position()=1]",
      "doi-asserted-by": "crossref",
      "first-page": "121301",
      "DOI": "10.1063/1.1940727",
      "volume": "97",
      "author": "Puurunen",
      "year": "2005",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "c2jm32343e-(cit16)/*[position()=1]",
      "doi-asserted-by": "crossref",
      "first-page": "5602",
      "DOI": "10.1021/cm040008y",
      "volume": "16",
      "author": "Ferguson",
      "year": "2004",
      "journal-title": "Chem. Mater."
    },
    {
      "key": "c2jm32343e-(cit17)/*[position()=1]",
      "doi-asserted-by": "crossref",
      "first-page": "2223",
      "DOI": "10.1021/nl048589d",
      "volume": "4",
      "author": "Xu",
      "year": "2004",
      "journal-title": "Nano Lett."
    },
    {
      "key": "c2jm32343e-(cit18)/*[position()=1]",
      "doi-asserted-by": "crossref",
      "first-page": "719",
      "DOI": "10.1021/nl062948i",
      "volume": "7",
      "author": "Peng",
      "year": "2007",
      "journal-title": "Nano Lett."
    },
    {
      "key": "c2jm32343e-(cit19)/*[position()=1]",
      "doi-asserted-by": "crossref",
      "first-page": "102",
      "DOI": "10.1002/adma.200600728",
      "volume": "19",
      "author": "Ras",
      "year": "2007",
      "journal-title": "Adv. Mater."
    },
    {
      "key": "c2jm32343e-(cit20)/*[position()=1]",
      "doi-asserted-by": "crossref",
      "first-page": "2763",
      "DOI": "10.1002/adma.200900136",
      "volume": "21",
      "author": "Wang",
      "year": "2009",
      "journal-title": "Adv. Mater."
    },
    {
      "key": "c2jm32343e-(cit21)/*[position()=1]",
      "doi-asserted-by": "crossref",
      "first-page": "1172",
      "DOI": "10.1021/nl060413j",
      "volume": "6",
      "author": "Knez",
      "year": "2006",
      "journal-title": "Nano Lett."
    },
    {
      "key": "c2jm32343e-(cit22)/*[position()=1]",
      "doi-asserted-by": "crossref",
      "first-page": "2325",
      "DOI": "10.1021/nl061851t",
      "volume": "6",
      "author": "Huang",
      "year": "2006",
      "journal-title": "Nano Lett."
    },
    {
      "key": "c2jm32343e-(cit23)/*[position()=1]",
      "doi-asserted-by": "crossref",
      "first-page": "2550",
      "DOI": "10.1021/la902830d",
      "volume": "26",
      "author": "Hyde",
      "year": "2010",
      "journal-title": "Langmuir"
    },
    {
      "key": "c2jm32343e-(cit24)/*[position()=1]",
      "doi-asserted-by": "crossref",
      "first-page": "355708",
      "DOI": "10.1088/0957-4484/19/35/355708",
      "volume": "19",
      "author": "Ding",
      "year": "2008",
      "journal-title": "Nanotechnology"
    },
    {
      "key": "c2jm32343e-(cit25)/*[position()=1]",
      "doi-asserted-by": "crossref",
      "first-page": "4213",
      "DOI": "10.1039/c0jm00355g",
      "volume": "20",
      "author": "Spagnola",
      "year": "2010",
      "journal-title": "J. Mater. Chem."
    },
    {
      "key": "c2jm32343e-(cit26)/*[position()=1]",
      "doi-asserted-by": "crossref",
      "first-page": "8239",
      "DOI": "10.1021/la904604z",
      "volume": "26",
      "author": "Jur",
      "year": "2010",
      "journal-title": "Langmuir"
    },
    {
      "key": "c2jm32343e-(cit27)/*[position()=1]",
      "doi-asserted-by": "crossref",
      "first-page": "488",
      "DOI": "10.1126/science.1168162",
      "volume": "324",
      "author": "Lee",
      "year": "2009",
      "journal-title": "Science"
    },
    {
      "key": "c2jm32343e-(cit28)/*[position()=1]",
      "doi-asserted-by": "crossref",
      "first-page": "4982",
      "DOI": "10.1002/anie.200900426",
      "volume": "48",
      "author": "Zhang",
      "year": "2009",
      "journal-title": "Angew. Chem., Int. Ed."
    },
    {
      "key": "c2jm32343e-(cit29)/*[position()=1]",
      "doi-asserted-by": "crossref",
      "first-page": "2515",
      "DOI": "10.1021/am100217m",
      "volume": "2",
      "author": "Minton",
      "year": "2010",
      "journal-title": "ACS Appl. Mater. Interfaces"
    },
    {
      "key": "c2jm32343e-(cit30)/*[position()=1]",
      "doi-asserted-by": "crossref",
      "first-page": "5625",
      "DOI": "10.1021/cm050704d",
      "volume": "17",
      "author": "Wilson",
      "year": "2005",
      "journal-title": "Chem. Mater."
    },
    {
      "key": "c2jm32343e-(cit31)/*[position()=1]",
      "doi-asserted-by": "crossref",
      "first-page": "3476",
      "DOI": "10.1021/cm200694w",
      "volume": "23",
      "author": "Gong",
      "year": "2011",
      "journal-title": "Chem. Mater."
    },
    {
      "key": "c2jm32343e-(cit32)/*[position()=1]",
      "first-page": "52",
      "volume": "4",
      "author": "Jayaraman",
      "year": "2004",
      "journal-title": "J. Nanosci. Nanotechnol."
    },
    {
      "key": "c2jm32343e-(cit33)/*[position()=1]",
      "doi-asserted-by": "crossref",
      "first-page": "2217",
      "DOI": "10.1016/j.polymer.2006.01.084",
      "volume": "47",
      "author": "Ulbricht",
      "year": "2006",
      "journal-title": "Polymer"
    },
    {
      "key": "c2jm32343e-(cit34)/*[position()=1]",
      "author": "Gong",
      "year": "2011",
      "journal-title": "J. Phys. Chem. B"
    },
    {
      "key": "c2jm32343e-(cit35)/*[position()=1]",
      "doi-asserted-by": "crossref",
      "first-page": "467",
      "DOI": "10.1016/0584-8539(91)80124-2",
      "volume": "47",
      "author": "Atiya",
      "year": "1991",
      "journal-title": "Spectrochim. Acta, Part A"
    },
    {
      "key": "c2jm32343e-(cit36)/*[position()=1]",
      "doi-asserted-by": "crossref",
      "first-page": "167",
      "DOI": "10.1016/0009-2614(85)80672-2",
      "volume": "115",
      "author": "Higashi",
      "year": "1985",
      "journal-title": "Chem. Phys. Lett."
    },
    {
      "key": "c2jm32343e-(cit37)/*[position()=1]",
      "doi-asserted-by": "crossref",
      "first-page": "230",
      "DOI": "10.1016/0039-6028(95)90033-0",
      "volume": "322",
      "author": "Dillon",
      "year": "1995",
      "journal-title": "Surf. Sci."
    },
    {
      "key": "c2jm32343e-(cit38)/*[position()=1]",
      "doi-asserted-by": "crossref",
      "first-page": "184505",
      "DOI": "10.1063/1.3258646",
      "volume": "131",
      "author": "Max",
      "year": "2009",
      "journal-title": "J. Chem. Phys."
    },
    {
      "key": "c2jm32343e-(cit39)/*[position()=1]",
      "doi-asserted-by": "crossref",
      "first-page": "1612",
      "DOI": "10.1021/j100255a014",
      "volume": "89",
      "author": "Tso",
      "year": "1985",
      "journal-title": "J. Phys. Chem."
    },
    {
      "key": "c2jm32343e-(cit40)/*[position()=1]",
      "doi-asserted-by": "crossref",
      "first-page": "639",
      "DOI": "10.1021/cm0304546",
      "volume": "16",
      "author": "Groner",
      "year": "2004",
      "journal-title": "Chem. Mater."
    },
    {
      "key": "c2jm32343e-(cit41)/*[position()=1]",
      "doi-asserted-by": "crossref",
      "first-page": "1911",
      "DOI": "10.1021/la803581k",
      "volume": "25",
      "author": "Li",
      "year": "2009",
      "journal-title": "Langmuir"
    },
    {
      "key": "c2jm32343e-(cit42)/*[position()=1]",
      "doi-asserted-by": "crossref",
      "first-page": "1496",
      "DOI": "10.1021/ma00007a010",
      "volume": "24",
      "author": "Brinkhuis",
      "year": "1991",
      "journal-title": "Macromolecules"
    },
    {
      "key": "c2jm32343e-(cit43)/*[position()=1]",
      "doi-asserted-by": "crossref",
      "first-page": "19530",
      "DOI": "10.1021/jp804296a",
      "volume": "112",
      "author": "Goldstein",
      "year": "2008",
      "journal-title": "J. Phys. Chem. C"
    }
  ],
  "container-title": "Journal of Materials Chemistry",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "http://pubs.rsc.org/en/content/articlepdf/2012/JM/C2JM32343E",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2024,
        4,
        17
      ]
    ],
    "date-time": "2024-04-17T12:41:04Z",
    "timestamp": 1713357664000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://xlink.rsc.org/?DOI=c2jm32343e"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        2012
      ]
    ]
  },
  "references-count": 42,
  "journal-issue": {
    "issue": "31",
    "published-print": {
      "date-parts": [
        [
          2012
        ]
      ]
    }
  },
  "URL": "http://dx.doi.org/10.1039/c2jm32343e",
  "relation": {},
  "ISSN": [
    "0959-9428",
    "1364-5501"
  ],
  "subject": [],
  "container-title-short": "J. Mater. Chem.",
  "published": {
    "date-parts": [
      [
        2012
      ]
    ]
  }
}