DOI: 10.1039/c5nr01072a. Low voltage and high ON/OFF ratio field-effect transistors based on CVD MoS<sub>2</sub> and ultra high-k gate dielectric PZT

Low voltage and high ON/OFF ratio field-effect transistors based on CVD MoS2 and ultra high-k gate dielectric PZT

10.1039/c5nr01072a

Crossref journal-article

Royal Society of Chemistry (RSC)

Nanoscale (292)

Abstract

Ultra high-k dielectric enables low-voltage enhancement-mode MoS2 transistor with high ON/OFF ratio, leading to low-power device.

Bibliography

Zhou, C., Wang, X., Raju, S., Lin, Z., Villaroman, D., Huang, B., Chan, H. L.-W., Chan, M., & Chai, Y. (2015). Low voltage and high ON/OFF ratio field-effect transistors based on CVD MoS2 and ultra high-k gate dielectric PZT. Nanoscale, 7(19), 8695â8700.

Authors 9

Changjian Zhou (first)
Xinsheng Wang (additional)
Salahuddin Raju (additional)
Ziyuan Lin (additional)
Daniel Villaroman (additional)
Baoling Huang (additional)
Helen Lai-Wa Chan (additional)
Mansun Chan (additional)
Yang Chai (additional)

References 33 Referenced 131

10.1038/nnano.2010.89 / Nat. Nanotechnol. by Schwierz (2010)
10.1038/nnano.2012.193 / Nat. Nanotechnol. by Wang (2012)
10.1039/C4NR01600A / Nanoscale by Ferrari (2015)
10.1038/nnano.2010.279 / Nat. Nanotechnol. by Radisavljevic (2011)
10.1038/nnano.2013.100 / Nat. Nanotechnol. by Lopez-Sanchez (2013)
10.1021/nl302015v / Nano Lett. by Wang (2012)
{'key': 'C5NR01072A-(cit7)/*[position()=1]', 'first-page': '105', 'author': 'Mak', 'year': '2010', 'journal-title': 'Phys. Rev. Lett.'} / Phys. Rev. Lett. by Mak (2010)
10.1021/nl2018178 / Nano Lett. by Yoon (2011)
10.1109/LED.2013.2291560 / IEEE Electron Device Lett. by Cheng (2014)
The International Technology Roadmap for Semiconductors, http://www.itrs.net/Links/2013ITRS/2013Chapters/2013ERM_Summary.pdf
10.1109/LED.2012.2184520 / IEEE Electron Device Lett. by Liu (2012)
10.1021/nl2021575 / Nano Lett. by Zhang (2012)
10.1021/nl301335q / Nano Lett. by Pu (2012)
10.1063/1.4905634 / Appl. Phys. Lett. by Son (2015)
10.1002/adma.201402008 / Adv. Mater. by Zou (2014)
10.1021/am5032105 / ACS Appl. Mater. Interfaces by Cheng (2014)
10.1002/adma.201104798 / Adv. Mater. by Lee (2012)
10.1021/ja4013485 / J. Am. Chem. Soc. by Wang (2013)
10.1002/smll.201102654 / Small by Zhan (2012)
10.1038/srep01866 / Sci. Rep. by Yu (2013)
10.1038/nmat3633 / Nat. Mater. by van der Zande (2013)
10.1039/C4NR04816D / Nanoscale by Jin (2014)
10.1039/C4NR02451F / Nanoscale by Tan (2014)
10.1039/c4cs00256c / Chem. Soc. Rev. by Shi (2015)
10.1021/nn1003937 / ACS Nano by Lee (2010)
10.1002/adfm.201102111 / Adv. Funct. Mater. by Li (2012)
10.1021/nl903868w / Nano Lett. by Splendiani (2010)
10.1016/S0026-2714(02)00027-6 / Microelectron. Reliab. by Ortiz-Conde (2002)
10.1021/nl303583v / Nano Lett. by Das (2013)
10.1103/RevModPhys.77.1083 / Rev. Mod. Phys. by Dawber (2005)
10.1039/C3EE42454E / Energy Environ. Sci. by Bowen (2014)
10.1109/TUFFC.2009.1060 / IEEE Trans. Ultrason., Ferroelectr., Freq. Control by Roest (2009)
10.1021/nn301572c / ACS Nano by Late (2012)

Dates

Type	When
Created	10 years, 4 months ago (April 13, 2015, 7:01 a.m.)
Deposited	1 year, 4 months ago (April 17, 2024, 1:50 p.m.)
Indexed	2 weeks, 3 days ago (Aug. 6, 2025, 9:14 a.m.)
Issued	10 years, 7 months ago (Jan. 1, 2015)
Published	10 years, 7 months ago (Jan. 1, 2015)
Published Online	10 years, 7 months ago (Jan. 1, 2015)

Funders 0

None

BibTeX

@article{Zhou_2015, title={Low voltage and high ON/OFF ratio field-effect transistors based on CVD MoS2 and ultra high-k gate dielectric PZT}, volume={7}, ISSN={2040-3372}, url={http://dx.doi.org/10.1039/c5nr01072a}, DOI={10.1039/c5nr01072a}, number={19}, journal={Nanoscale}, publisher={Royal Society of Chemistry (RSC)}, author={Zhou, Changjian and Wang, Xinsheng and Raju, Salahuddin and Lin, Ziyuan and Villaroman, Daniel and Huang, Baoling and Chan, Helen Lai-Wa and Chan, Mansun and Chai, Yang}, year={2015}, pages={8695–8700} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        8,
        6
      ]
    ],
    "date-time": "2025-08-06T13:14:00Z",
    "timestamp": 1754486040252,
    "version": "3.37.3"
  },
  "reference-count": 33,
  "publisher": "Royal Society of Chemistry (RSC)",
  "issue": "19",
  "content-domain": {
    "domain": [
      "rsc.org"
    ],
    "crossmark-restriction": true
  },
  "abstract": "<p>Ultra high-<italic>k</italic> dielectric enables low-voltage enhancement-mode MoS<sub>2</sub> transistor with high ON/OFF ratio, leading to low-power device.</p>",
  "DOI": "10.1039/c5nr01072a",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2015,
        4,
        13
      ]
    ],
    "date-time": "2015-04-13T11:01:41Z",
    "timestamp": 1428922901000
  },
  "page": "8695-8700",
  "update-policy": "https://doi.org/10.1039/rsc_crossmark_policy",
  "source": "Crossref",
  "is-referenced-by-count": 131,
  "title": "Low voltage and high ON/OFF ratio field-effect transistors based on CVD MoS<sub>2</sub> and ultra high-k gate dielectric PZT",
  "prefix": "10.1039",
  "volume": "7",
  "author": [
    {
      "given": "Changjian",
      "family": "Zhou",
      "sequence": "first",
      "affiliation": [
        {
          "name": "Department of Applied Physics"
        },
        {
          "name": "The Hong Kong Polytechnic University"
        },
        {
          "name": "Kowloon, China"
        },
        {
          "name": "Department of Electronic and Computer Engineering"
        },
        {
          "name": "The Hong Kong University of Science and Technology"
        }
      ]
    },
    {
      "given": "Xinsheng",
      "family": "Wang",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Department of Applied Physics"
        },
        {
          "name": "The Hong Kong Polytechnic University"
        },
        {
          "name": "Kowloon, China"
        }
      ]
    },
    {
      "given": "Salahuddin",
      "family": "Raju",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Department of Electronic and Computer Engineering"
        },
        {
          "name": "The Hong Kong University of Science and Technology"
        },
        {
          "name": "Kowloon, China"
        }
      ]
    },
    {
      "given": "Ziyuan",
      "family": "Lin",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Department of Applied Physics"
        },
        {
          "name": "The Hong Kong Polytechnic University"
        },
        {
          "name": "Kowloon, China"
        }
      ]
    },
    {
      "given": "Daniel",
      "family": "Villaroman",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Department of Mechanical and Aerospace Engineering"
        },
        {
          "name": "The Hong Kong University of Science and Technology"
        },
        {
          "name": "Kowloon, China"
        }
      ]
    },
    {
      "given": "Baoling",
      "family": "Huang",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Department of Mechanical and Aerospace Engineering"
        },
        {
          "name": "The Hong Kong University of Science and Technology"
        },
        {
          "name": "Kowloon, China"
        }
      ]
    },
    {
      "given": "Helen Lai-Wa",
      "family": "Chan",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Department of Applied Physics"
        },
        {
          "name": "The Hong Kong Polytechnic University"
        },
        {
          "name": "Kowloon, China"
        }
      ]
    },
    {
      "given": "Mansun",
      "family": "Chan",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Department of Electronic and Computer Engineering"
        },
        {
          "name": "The Hong Kong University of Science and Technology"
        },
        {
          "name": "Kowloon, China"
        }
      ]
    },
    {
      "given": "Yang",
      "family": "Chai",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Department of Applied Physics"
        },
        {
          "name": "The Hong Kong Polytechnic University"
        },
        {
          "name": "Kowloon, China"
        }
      ]
    }
  ],
  "member": "292",
  "published-online": {
    "date-parts": [
      [
        2015
      ]
    ]
  },
  "reference": [
    {
      "key": "C5NR01072A-(cit1)/*[position()=1]",
      "doi-asserted-by": "crossref",
      "first-page": "487",
      "DOI": "10.1038/nnano.2010.89",
      "volume": "5",
      "author": "Schwierz",
      "year": "2010",
      "journal-title": "Nat. Nanotechnol."
    },
    {
      "key": "C5NR01072A-(cit2)/*[position()=1]",
      "doi-asserted-by": "crossref",
      "first-page": "699",
      "DOI": "10.1038/nnano.2012.193",
      "volume": "7",
      "author": "Wang",
      "year": "2012",
      "journal-title": "Nat. Nanotechnol."
    },
    {
      "key": "C5NR01072A-(cit3)/*[position()=1]",
      "doi-asserted-by": "crossref",
      "first-page": "4598",
      "DOI": "10.1039/C4NR01600A",
      "volume": "7",
      "author": "Ferrari",
      "year": "2015",
      "journal-title": "Nanoscale"
    },
    {
      "key": "C5NR01072A-(cit4)/*[position()=1]",
      "doi-asserted-by": "crossref",
      "first-page": "147",
      "DOI": "10.1038/nnano.2010.279",
      "volume": "6",
      "author": "Radisavljevic",
      "year": "2011",
      "journal-title": "Nat. Nanotechnol."
    },
    {
      "key": "C5NR01072A-(cit5)/*[position()=1]",
      "doi-asserted-by": "crossref",
      "first-page": "497",
      "DOI": "10.1038/nnano.2013.100",
      "volume": "8",
      "author": "Lopez-Sanchez",
      "year": "2013",
      "journal-title": "Nat. Nanotechnol."
    },
    {
      "key": "C5NR01072A-(cit6)/*[position()=1]",
      "doi-asserted-by": "crossref",
      "first-page": "4674",
      "DOI": "10.1021/nl302015v",
      "volume": "12",
      "author": "Wang",
      "year": "2012",
      "journal-title": "Nano Lett."
    },
    {
      "key": "C5NR01072A-(cit7)/*[position()=1]",
      "first-page": "105",
      "author": "Mak",
      "year": "2010",
      "journal-title": "Phys. Rev. Lett."
    },
    {
      "key": "C5NR01072A-(cit8)/*[position()=1]",
      "doi-asserted-by": "crossref",
      "first-page": "3768",
      "DOI": "10.1021/nl2018178",
      "volume": "11",
      "author": "Yoon",
      "year": "2011",
      "journal-title": "Nano Lett."
    },
    {
      "key": "C5NR01072A-(cit9)/*[position()=1]",
      "doi-asserted-by": "crossref",
      "first-page": "274",
      "DOI": "10.1109/LED.2013.2291560",
      "volume": "35",
      "author": "Cheng",
      "year": "2014",
      "journal-title": "IEEE Electron Device Lett."
    },
    {
      "key": "C5NR01072A-(cit10)/*[position()=1]",
      "unstructured": "The International Technology Roadmap for Semiconductors, http://www.itrs.net/Links/2013ITRS/2013Chapters/2013ERM_Summary.pdf"
    },
    {
      "key": "C5NR01072A-(cit11)/*[position()=1]",
      "doi-asserted-by": "crossref",
      "first-page": "546",
      "DOI": "10.1109/LED.2012.2184520",
      "volume": "33",
      "author": "Liu",
      "year": "2012",
      "journal-title": "IEEE Electron Device Lett."
    },
    {
      "key": "C5NR01072A-(cit12)/*[position()=1]",
      "doi-asserted-by": "crossref",
      "first-page": "1136",
      "DOI": "10.1021/nl2021575",
      "volume": "12",
      "author": "Zhang",
      "year": "2012",
      "journal-title": "Nano Lett."
    },
    {
      "key": "C5NR01072A-(cit13)/*[position()=1]",
      "doi-asserted-by": "crossref",
      "first-page": "4013",
      "DOI": "10.1021/nl301335q",
      "volume": "12",
      "author": "Pu",
      "year": "2012",
      "journal-title": "Nano Lett."
    },
    {
      "key": "C5NR01072A-(cit14)/*[position()=1]",
      "doi-asserted-by": "crossref",
      "first-page": "021601",
      "DOI": "10.1063/1.4905634",
      "volume": "106",
      "author": "Son",
      "year": "2015",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "C5NR01072A-(cit15)/*[position()=1]",
      "doi-asserted-by": "crossref",
      "first-page": "6255",
      "DOI": "10.1002/adma.201402008",
      "volume": "26",
      "author": "Zou",
      "year": "2014",
      "journal-title": "Adv. Mater."
    },
    {
      "key": "C5NR01072A-(cit16)/*[position()=1]",
      "doi-asserted-by": "crossref",
      "first-page": "11834",
      "DOI": "10.1021/am5032105",
      "volume": "6",
      "author": "Cheng",
      "year": "2014",
      "journal-title": "ACS Appl. Mater. Interfaces"
    },
    {
      "key": "C5NR01072A-(cit17)/*[position()=1]",
      "doi-asserted-by": "crossref",
      "first-page": "2320",
      "DOI": "10.1002/adma.201104798",
      "volume": "24",
      "author": "Lee",
      "year": "2012",
      "journal-title": "Adv. Mater."
    },
    {
      "key": "C5NR01072A-(cit18)/*[position()=1]",
      "doi-asserted-by": "crossref",
      "first-page": "5304",
      "DOI": "10.1021/ja4013485",
      "volume": "135",
      "author": "Wang",
      "year": "2013",
      "journal-title": "J. Am. Chem. Soc."
    },
    {
      "key": "C5NR01072A-(cit19)/*[position()=1]",
      "doi-asserted-by": "crossref",
      "first-page": "966",
      "DOI": "10.1002/smll.201102654",
      "volume": "8",
      "author": "Zhan",
      "year": "2012",
      "journal-title": "Small"
    },
    {
      "key": "C5NR01072A-(cit20)/*[position()=1]",
      "doi-asserted-by": "crossref",
      "first-page": "1866",
      "DOI": "10.1038/srep01866",
      "volume": "3",
      "author": "Yu",
      "year": "2013",
      "journal-title": "Sci. Rep."
    },
    {
      "key": "C5NR01072A-(cit21)/*[position()=1]",
      "doi-asserted-by": "crossref",
      "first-page": "554",
      "DOI": "10.1038/nmat3633",
      "volume": "12",
      "author": "van der Zande",
      "year": "2013",
      "journal-title": "Nat. Mater."
    },
    {
      "key": "C5NR01072A-(cit22)/*[position()=1]",
      "doi-asserted-by": "crossref",
      "first-page": "14453",
      "DOI": "10.1039/C4NR04816D",
      "volume": "6",
      "author": "Jin",
      "year": "2014",
      "journal-title": "Nanoscale"
    },
    {
      "key": "C5NR01072A-(cit23)/*[position()=1]",
      "doi-asserted-by": "crossref",
      "first-page": "10584",
      "DOI": "10.1039/C4NR02451F",
      "volume": "6",
      "author": "Tan",
      "year": "2014",
      "journal-title": "Nanoscale"
    },
    {
      "key": "C5NR01072A-(cit24)/*[position()=1]",
      "doi-asserted-by": "publisher",
      "DOI": "10.1039/c4cs00256c",
      "author": "Shi",
      "year": "2015",
      "journal-title": "Chem. Soc. Rev."
    },
    {
      "key": "C5NR01072A-(cit25)/*[position()=1]",
      "doi-asserted-by": "crossref",
      "first-page": "2695",
      "DOI": "10.1021/nn1003937",
      "volume": "4",
      "author": "Lee",
      "year": "2010",
      "journal-title": "ACS Nano"
    },
    {
      "key": "C5NR01072A-(cit26)/*[position()=1]",
      "doi-asserted-by": "crossref",
      "first-page": "1385",
      "DOI": "10.1002/adfm.201102111",
      "volume": "22",
      "author": "Li",
      "year": "2012",
      "journal-title": "Adv. Funct. Mater."
    },
    {
      "key": "C5NR01072A-(cit27)/*[position()=1]",
      "doi-asserted-by": "crossref",
      "first-page": "1271",
      "DOI": "10.1021/nl903868w",
      "volume": "10",
      "author": "Splendiani",
      "year": "2010",
      "journal-title": "Nano Lett."
    },
    {
      "key": "C5NR01072A-(cit28)/*[position()=1]",
      "doi-asserted-by": "crossref",
      "first-page": "583",
      "DOI": "10.1016/S0026-2714(02)00027-6",
      "volume": "42",
      "author": "Ortiz-Conde",
      "year": "2002",
      "journal-title": "Microelectron. Reliab."
    },
    {
      "key": "C5NR01072A-(cit29)/*[position()=1]",
      "doi-asserted-by": "crossref",
      "first-page": "100",
      "DOI": "10.1021/nl303583v",
      "volume": "13",
      "author": "Das",
      "year": "2013",
      "journal-title": "Nano Lett."
    },
    {
      "key": "C5NR01072A-(cit30)/*[position()=1]",
      "doi-asserted-by": "crossref",
      "first-page": "1083",
      "DOI": "10.1103/RevModPhys.77.1083",
      "volume": "77",
      "author": "Dawber",
      "year": "2005",
      "journal-title": "Rev. Mod. Phys."
    },
    {
      "key": "C5NR01072A-(cit31)/*[position()=1]",
      "doi-asserted-by": "crossref",
      "first-page": "25",
      "DOI": "10.1039/C3EE42454E",
      "volume": "7",
      "author": "Bowen",
      "year": "2014",
      "journal-title": "Energy Environ. Sci."
    },
    {
      "key": "C5NR01072A-(cit32)/*[position()=1]",
      "doi-asserted-by": "crossref",
      "first-page": "425",
      "DOI": "10.1109/TUFFC.2009.1060",
      "volume": "56",
      "author": "Roest",
      "year": "2009",
      "journal-title": "IEEE Trans. Ultrason., Ferroelectr., Freq. Control"
    },
    {
      "key": "C5NR01072A-(cit33)/*[position()=1]",
      "doi-asserted-by": "crossref",
      "first-page": "5635",
      "DOI": "10.1021/nn301572c",
      "volume": "6",
      "author": "Late",
      "year": "2012",
      "journal-title": "ACS Nano"
    }
  ],
  "container-title": "Nanoscale",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "http://pubs.rsc.org/en/content/articlepdf/2015/NR/C5NR01072A",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2024,
        4,
        17
      ]
    ],
    "date-time": "2024-04-17T17:50:56Z",
    "timestamp": 1713376256000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://xlink.rsc.org/?DOI=C5NR01072A"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        2015
      ]
    ]
  },
  "references-count": 33,
  "journal-issue": {
    "issue": "19",
    "published-print": {
      "date-parts": [
        [
          2015
        ]
      ]
    }
  },
  "URL": "http://dx.doi.org/10.1039/C5NR01072A",
  "relation": {},
  "ISSN": [
    "2040-3364",
    "2040-3372"
  ],
  "subject": [],
  "container-title-short": "Nanoscale",
  "published": {
    "date-parts": [
      [
        2015
      ]
    ]
  },
  "assertion": [
    {
      "value": "This document is CrossCheck deposited",
      "name": "crosscheck",
      "explanation": {
        "URL": "http://www.crossref.org/crosscheck/index.html"
      },
      "group": {
        "name": "crosscheck",
        "label": "CROSSCHECK"
      }
    },
    {
      "value": "Supplementary Information",
      "URL": "http://dx.doi.org/10.1039/C5NR01072A",
      "name": "related_data",
      "group": {
        "name": "related_data",
        "label": "RELATED DATA"
      }
    },
    {
      "value": "The Royal Society of Chemistry has an exclusive publication licence for this journal",
      "name": "copyright_licence",
      "group": {
        "name": "copyright_licensing",
        "label": "COPYRIGHT AND LICENSING"
      }
    },
    {
      "value": "The accepted version of this article will be made freely available after a 12 month embargo period",
      "name": "copyright_licence",
      "label": "OPEN ACCESS",
      "group": {
        "name": "copyright_licensing",
        "label": "COPYRIGHT AND LICENSING"
      }
    },
    {
      "value": "Received 14 February 2015; Accepted 6 April 2015;  Accepted Manuscript published 13 April 2015;  Advance Article published 24 April 2015;  Version of Record published 7 May 2015",
      "order": 1,
      "name": "history",
      "group": {
        "name": "publication_history",
        "label": "PUBLICATION HISTORY"
      }
    }
  ]
}