Abstract
Phase-change materials (PCMs) are an important class of materials that reversibly and rapidly change their structure from a stable crystalline to a metastable amorphous phase under the influence of an optical or electrical pulse. This chapter provides a comprehensive review of research in nanowire phase-change memory, a prospective candidate for universal memory. Traditionally, crystal-to-amorphous transformation in PCM thin-film devices was carried out through the application of electrical pulses, which joule heat to melt and quench the crystalline phase, whereas the amorphous-to-crystalline transformation was carried out by the application of electric pulses that heat the amorphous phase above the crystallization temperature. Problems with this ‘thermal’ strategy of switching in thin-film PCM that restrict continued scaling are briefly reviewed, and research in self-assembled 1D-PCM devices that show better scaling properties than their thin-film counterparts is highlighted. Upon repeated switching, device performance of all the PCM devices degrades owing to issues of electromigration, and this effect is enhanced with top-down processing and polycrystallinity of thin-films. Bottom-up synthesized single-crystalline nanowires, owing to their lateral and confined geometry show better scaling, retention, and endurance behavior (switching properties) in comparison to thin-film PCM devices. A detailed review on the synthesis of single-crystalline nanowires and switching properties of nanowire devices is provided. Revolutionary and exciting applications such as multilevel switching using core/shell nanowire devices are discussed, and it is shown that the drift of electrical properties in amorphous phase – an important challenge to overcome to realize multilevel switching capability – is stress dependent, and is less pronounced in nanowire devices owing to their better stress–relaxation mechanisms. The melt-quench mechanism of crystal to amorphous switching in PCM is challenged, and a dislocation-templated and carrier-wind force driven amorphization based mechanism, which directly makes use of the unique bonding and structure in crystalline PCM for phase-change, is discussed through a detailed review of in situ electron microscopy based experiments on PCM nanowire devices.
References
163
Referenced
1
- http://spectrum.ieee.org/semiconductors/memory/the-quest-for-a-universal-memory
{'key': '2023052001105186600_BK9781849738156-00111-cit2', 'volume-title': 'Solid State Electronic Devices', 'year': '2009'}
/ Solid State Electronic Devices (2009)10.1109/JPROC.2010.2070050
/ Proc. IEEE by Wong (2010){'key': '2023052001105186600_BK9781849738156-00111-cit4', 'volume-title': 'Ferroelectrics for Digital Information Storage and Switching', 'year': '1952'}
/ Ferroelectrics for Digital Information Storage and Switching (1952)10.1126/science.1110549
/ Science by Akerman (2005)10.1016/j.jmmm.2007.12.019
/ J. Magn. Magn. Mater. by Ralph (2008){'key': '2023052001105186600_BK9781849738156-00111-cit7'}
10.1103/PhysRevLett.21.1450
/ Phys. Rev. Lett. by Ovshinsky (1968)10.1038/nmat2009
/ Nat. Mater. by Wuttig (2007)10.1146/annurev.ms.02.080172.003405
/ Annu. Rev. Mater. Sci. by Fritzsche (1972)10.1557/mrs2004.236
/ MRS Bull. by Hudgens (2004)10.1063/1.3210792
/ Appl. Phys. Lett. / et al., ‘Threshold field of phase change memory materials measured using phase-change bridge devices’ by Krebs (2009)10.7567/JJAPS.26S4.61
/ Jpn. J. Appl. Phys. by Yamada (1987)10.1063/1.348620
/ J. Appl. Phys. by Yamada (1991)10.1063/1.365627
/ J. Appl. Phys. by Tominaga (1997)10.1109/ITHERM.2006.1645408
/ Thermal and Thermomechanical Phenomena in Electronics Systems, 2006. ITHERM '06. The Tenth Intersociety Conference on / Phase change randam access memory, thermal analysis (2006)10.1038/nmat1359
/ Nat. Mater. by Wuttig (2005)10.1147/rd.524.0465
/ IBM J. Res. Dev. by Raoux (2008){'key': '2023052001105186600_BK9781849738156-00111-cit18', 'volume-title': 'Physics of Amorphous Solids', 'year': '1998'}
/ Physics of Amorphous Solids (1998)10.1080/00107516908204405
/ Contemp. Biophys. by Turnbull (1969)10.1002/adfm.201002274
/ Adv. Funct. Mater. by Matsunaga (2011)10.1063/1.2359354
/ Appl. Phys. Lett. by Lyeo (2006){'key': '2023052001105186600_BK9781849738156-00111-cit22', 'first-page': '202', 'volume': '1', 'author': 'Gill', 'year': '2002', 'journal-title': 'IEEE Int. Solid. State Circuits Conf. Digest Technical Papers'}
/ IEEE Int. Solid. State Circuits Conf. Digest Technical Papers by Gill (2002)10.1088/0957-4484/23/20/205201
/ Nanotech. by Lee (2012)10.1038/nmat1350
/ Nat. Mater. by Lankhorst (2005){'key': '2023052001105186600_BK9781849738156-00111-cit25', 'article-title': 'Ultra-thin Phase-change Bridge Memory Device using GeSb', 'volume-title': "IEDM '06 Conf. Pub.", 'year': '2006'}
/ IEDM '06 Conf. Pub. / Ultra-thin Phase-change Bridge Memory Device using GeSb (2006)10.1063/1.1868860
/ J. Appl. Phys. by van Pieterson (2005)10.1557/PROC-0918-H05-05-G06-05
/ MRS Proceedings by Yeo (2006)10.1063/1.97617
/ Appl. Phys. Lett. by Chen (1986)10.1116/1.2388956
/ J. Vac. Sci. Technol., A by Chung (2007)10.1007/s00339-005-3358-2
/ Appl. Phys. A by Wang (2005)10.1109/LED.2006.874130
/ IEEE Electron Device Lett. by Yoon (2006)10.1143/JJAP.32.5241
/ Jpn. J. Appl. Phys. by Iwasaki (1993)10.1016/j.mee.2005.07.007
/ Microelectron. Eng. by Liu (2005)10.1002/adma.201004746
/ Adv. Mater. by Han (2011)10.1063/1.2793505
/ Appl. Phys. Lett. by Yu (2007)10.1149/1.2205120
/ Electrochem. Solid-State Lett. by Ryu (2006)10.1063/1.2844878
/ Appl. Phys. Lett. by Kim (2008)10.1063/1.3168551
/ Appl. Phys. Lett. by Jang (2009)10.1063/1.1604172
/ Appl. Phys. Lett. by van Pieterson (2003)10.1088/0022-3719/20/10/012
/ J. Phys. C: Solid State Phys. by Chattopadhyay (1987)10.1021/ic051677w
/ Inorg. Chem. by Matsunaga (2006){'key': '2023052001105186600_BK9781849738156-00111-cit42', 'volume-title': 'Solid State Physics', 'year': '1976'}
/ Solid State Physics (1976)10.1063/1.1502915
/ J. Appl. Phys. by Kooi (2002)10.1103/PhysRevB.73.045210
/ Phys. Rev. B: Condens. Matter Mater. Phys by Edwards (2006){'key': '2023052001105186600_BK9781849738156-00111-cit45', 'volume-title': 'Nature of Chemical Bond', 'year': '1939'}
/ Nature of Chemical Bond (1939)10.1038/nchem.1007
/ Nat. Chem. by Kolobov (2011)10.1038/nmat2226
/ Nat. Mater. by Shportko (2008)10.1038/nmat2330
/ Nat. Mater. by Lencer (2008)10.1063/1.3665067
/ Appl. Phys. Lett. by Matsunaga (2011){'key': '2023052001105186600_BK9781849738156-00111-cit50', 'first-page': 'L329', 'volume': '17', 'author': 'Edwards', 'year': '2005', 'journal-title': 'J. Phys.: Condens. Matter'}
/ J. Phys.: Condens. Matter by Edwards (2005)10.1088/0022-3719/12/21/011
/ J. Phys. C: Solid State Phys. by Littlewood (1979)10.1088/0022-3719/12/21/012
/ J. Phys. C: Solid State Phys. by Littlewood (1979){'key': '2023052001105186600_BK9781849738156-00111-cit53', 'first-page': '2961', 'author': 'Pirovano', 'year': '2003', 'journal-title': 'IEEE, IEDM'}
/ IEEE, IEDM by Pirovano (2003)10.1016/j.sse.2005.10.046
/ Solid-State Electron. by Lacaita (2006){'key': '2023052001105186600_BK9781849738156-00111-cit55', 'first-page': '452', 'volume': '51', 'author': 'Pirovano', 'year': '2004', 'journal-title': 'IEEE, IEDM'}
/ IEEE, IEDM by Pirovano (2004)10.1126/science.1201938
/ Science by Xiong (2011){'key': '2023052001105186600_BK9781849738156-00111-cit57', 'first-page': '385', 'volume': '5', 'author': 'Tyson', 'year': '2000', 'journal-title': 'Aero. Conf. IEEE'}
/ Aero. Conf. IEEE by Tyson (2000)10.1143/JJAP.44.2701
/ Jpn. J. Appl. Phys. by Kim (2005){'key': '2023052001105186600_BK9781849738156-00111-cit59', 'first-page': '96', 'author': 'Cho', 'year': '2005', 'journal-title': 'Symposium on VLSI Technology, Digest of Technical Papers'}
/ Symposium on VLSI Technology, Digest of Technical Papers by Cho (2005){'key': '2023052001105186600_BK9781849738156-00111-cit60', 'first-page': '120', 'author': 'Happ', 'year': '2006', 'journal-title': 'Symposium on VLSI Technology, Digest of Technical Papers'}
/ Symposium on VLSI Technology, Digest of Technical Papers by Happ (2006){'key': '2023052001105186600_BK9781849738156-00111-cit61', 'volume-title': 'Full Integration of Higly Manufacturable 512 Mb PRAM based on 90 nm Technology, IEDM, IEEE', 'year': '2006'}
/ Full Integration of Higly Manufacturable 512 Mb PRAM based on 90 nm Technology, IEDM, IEEE (2006){'key': '2023052001105186600_BK9781849738156-00111-cit62', 'first-page': '100', 'author': 'Breitwisch', 'year': '2007', 'journal-title': 'Symposium on VLSI Technology, Digest of Technical Papers'}
/ Symposium on VLSI Technology, Digest of Technical Papers by Breitwisch (2007){'key': '2023052001105186600_BK9781849738156-00111-cit63', 'first-page': '127', 'author': 'Raoux', 'year': '2006', 'journal-title': 'Proc. European Symp. on Phase Change and Ovonic Science.'}
/ Proc. European Symp. on Phase Change and Ovonic Science. by Raoux (2006)10.1063/1.2163010
/ J. Appl. Phys. by Satoh (2006)10.1038/nmat1627
/ Nat. Mater. by Hamann (2006)10.1143/JJAP.43.L818
/ Jpn. J. Appl. Phys. by Gotoh (2004)10.1149/1.2409482
/ J. Electrochem. Soc. by Park (2007)10.1016/j.apsusc.2004.03.129
/ Appl. Surf. Sci. by Alberici (2004)10.1016/j.apsusc.2007.07.098
/ Appl. Surf. Sci. by Yoon (2007)10.1016/j.mee.2008.08.004
/ Microelectron. Eng. by Raoux (2008)10.1063/1.2450656
/ Appl. Phys. Lett. by Cabral (2007)10.1063/1.2719148
/ Appl. Phys. Lett. by Krusin-Elbaum (2007)10.1063/1.2899967
/ Appl. Phys. Lett. by Nam (2008)10.1063/1.3127223
/ Appl. Phys. Lett. by Kim (2009)10.1063/1.3168517
/ Appl. Phys. Lett. by Kang (2009)10.1063/1.3184584
/ Appl. Phys. Lett. by Yang (2009){'key': '2023052001105186600_BK9781849738156-00111-cit77', 'first-page': '204', 'volume': '1', 'author': 'Abrikosov', 'year': '1965', 'journal-title': 'Izv. Akad. Auk. SSSR Neorg. Mater.'}
/ Izv. Akad. Auk. SSSR Neorg. Mater. by Abrikosov (1965)10.1002/adma.200700904
/ Adv. Mater. by Pandian (2007){'key': '2023052001105186600_BK9781849738156-00111-cit79', 'first-page': '315', 'author': 'Castro', 'year': '2007', 'journal-title': 'Tech. Dig. – Int. Electron Devices Meet.'}
/ Tech. Dig. – Int. Electron Devices Meet. by Castro (2007){'key': '2023052001105186600_BK9781849738156-00111-cit80', 'volume-title': 'Kinetics of Materials', 'year': '2005'}
/ Kinetics of Materials (2005)10.1063/1.1753975
/ Appl. Phys. Lett. by Ellis (1964)10.1063/1.1363692
/ Appl. Phys. Lett. by Cui (2001)10.1557/jmr.2011.96
/ J. Mater. Res. by Schwalbach (2011)10.1063/1.3676451
/ J. Appl. Phys. by Schwalbach (2012)10.1021/nl1027815
/ Nano Lett. by Teresoff (2011)10.1103/PhysRevLett.102.206101
/ Phys. Rev. Lett. by Teresoff (2009)10.1126/science.1163494
/ Science by Kim (2008)10.1021/jp903637d
/ J. Phys. Chem. by Jennings (2009)10.1021/nl9009765
/ Nano Lett. by Chung (2009){'key': '2023052001105186600_BK9781849738156-00111-cit90', 'first-page': '199', 'volume': '7', 'author': 'Jung', 'year': '2009', 'journal-title': 'Nano Lett.'}
/ Nano Lett. by Jung (2009)10.1038/nnano.2007.291
/ Nat. Nanotechnol. by Lee (2007)10.1021/nl5007036
/ Nano Lett. by Nukala (2014)10.1021/nl900620n
/ Nano Lett. by Jung (2009)10.1016/j.jcrysgro.2010.09.065
/ J. Cryst. Growth by Longo (2011)10.1021/nl204301h
/ Nano Lett. by Longo (2012)10.1039/c2nr32907g
/ Nanoscale by Rotunno (2013){'key': '2023052001105186600_BK9781849738156-00111-cit97', 'volume-title': 'Phase Transformations in Metals and Alloys', 'year': '1986'}
/ Phase Transformations in Metals and Alloys (1986)10.1021/ja0625071
/ J. Am. Chem. Soc. by Yu (2006)10.1021/nl061102b
/ Nano Lett. by Meister (2006)10.1063/1.2388890
/ Appl. Phys. Lett. by Sun (2006)10.1021/ja711481b
/ J. Am. Chem. Soc. by Lee (2008)10.1063/1.2397558
/ Appl. Phys. Lett. by Lee (2006)10.1021/ja065938s
/ J. Am. Chem. Soc. by Jung (2006){'key': '2023052001105186600_BK9781849738156-00111-cit104', 'volume-title': 'Non-Volatile Semiconductor Memory Workshop, IEEE', 'year': '2007'}
/ Non-Volatile Semiconductor Memory Workshop, IEEE (2007){'key': '2023052001105186600_BK9781849738156-00111-cit105', 'first-page': '20', 'author': 'Lee', 'year': '2004', 'journal-title': 'VLSI Technol. Dig.'}
/ VLSI Technol. Dig. by Lee (2004)10.1063/1.2736271
/ Appl. Phys. Lett. by Sun (2007)10.1021/jp0658804
/ J. Phys. Chem. C by Sun (2007)10.1021/ja905808d
/ J. Am. Chem. Soc. by Yim (2009)10.1080/14786435.2013.765981
/ Philos. Mag. by Piccione (2013)10.1126/science.1220119
/ Science by Nam (2012)10.1063/1.4812367
/ J. Appl. Phys. by Ji (2013){'key': '2023052001105186600_BK9781849738156-00111-cit112', 'first-page': '53', 'volume': '1', 'author': 'Bletskan', 'year': '2005', 'journal-title': 'J. Ovonic Res.'}
/ J. Ovonic Res. by Bletskan (2005)10.1016/j.physe.2007.09.171
/ Phys. E by Lee (2008){'key': '2023052001105186600_BK9781849738156-00111-cit114', 'article-title': 'Influence of Dopants on the Crystallization Temperature, Crystal Structure, Resistance, and Threshold Field for Ge2Sb2Te5 and GeTe Phase Change Material', 'volume-title': 'E/PCOS Conf. Proc.', 'year': '2011'}
/ E/PCOS Conf. Proc. / Influence of Dopants on the Crystallization Temperature, Crystal Structure, Resistance, and Threshold Field for Ge2Sb2Te5 and GeTe Phase Change Material (2011)10.1103/PhysRevB.36.1595
/ Phys. Rev. B: Condens. Matter Mater. Phys by Huber (1987){'key': '2023052001105186600_BK9781849738156-00111-cit116', 'volume-title': 'Electronic Processes in Non-crystalline Materials', 'year': '1979'}
/ Electronic Processes in Non-crystalline Materials (1979)10.1088/0957-4484/22/25/254012
/ Nanotechnology by Jung (2010)10.1143/JJAP.44.7720
/ Jpn. J. Appl. Phys. by Choi (2005)10.1063/1.2430481
/ Appl. Phys. Lett. by Suh (2007)10.1016/j.jnoncrysol.2005.09.007
/ J. Non-Cryst. Solids by Yoon (2005)10.1021/cm062495i
/ Chem. Mater. by Cha (2007)10.1038/nmat3371
/ Nat. Mater. by Polking (2012){'key': '2023052001105186600_BK9781849738156-00111-cit123', 'first-page': '244', 'volume': '133', 'author': 'Polking', 'year': '2010', 'journal-title': 'J. Am. Chem. Soc.'}
/ J. Am. Chem. Soc. by Polking (2010)10.1021/nl048758u
/ Nano Lett. by Zhang (2004)10.1098/rsta.2004.1377
/ Philos. Trans. R. Soc., A by Lauhon (2004)10.1038/nature01141
/ Nature by Lauhon (2002)10.1021/nl801482z
/ Nano Lett. by Jung (2008)10.1143/JJAP.46.L25
/ Jpn. J. Appl. Phys. by Rao (2007)10.1002/adfm.201202383
/ Adv. Funct. Mater. by Wright (2013)10.1021/nl201040y
/ Nano Lett. by Kuzum (2012){'key': '2023052001105186600_BK9781849738156-00111-cit131', 'first-page': '20', 'author': 'Lee', 'year': '2004', 'journal-title': 'Proc. Symp. VLSI Tech. Dig.'}
/ Proc. Symp. VLSI Tech. Dig. by Lee (2004){'key': '2023052001105186600_BK9781849738156-00111-cit132', 'first-page': '173', 'author': 'Hwang', 'year': '2003', 'journal-title': 'Proc. Symp. VLSI Tech. Dig.'}
/ Proc. Symp. VLSI Tech. Dig. by Hwang (2003)10.1143/JJAP.45.3233
/ Jpn. J. Appl. Phys. by Jeong (2006)10.1063/1.3447941
/ Appl. Phys. Lett. by Mitra (2010)10.1109/TED.2004.825805
/ IEEE Trans. Electron Devices by Pirovano (2004)10.1109/TED.2006.888752
/ IEEE Trans. Electron Devices by Ielmini (2007)10.1063/1.2825650
/ J. Appl. Phys. by Karpov (2007)10.1063/1.1610775
/ J. Appl. Phys. by Kalb (2003)10.1021/nl3038097
/ Nano Lett. by Xiong (2013)10.1063/1.4759239
/ J. Appl. Phys. by Oosthoek (2012)10.1038/nmat1215
/ Nat. Mater. by Kolobov (2004)10.1103/PhysRevB.77.035202
/ Phys. Rev. B: Condens. Matter Mater. Phys. by Jovari (2008)10.1063/1.2387870
/ Appl. Phys. Lett. by Kohara (2006)10.1126/science.1177483
/ Science by Lee (2009)10.3139/146.110276
/ Int. J. Mater. Res. by Waser (2010)10.1107/S0108768104022906
/ Acta Crystallogr. by Matsunaga (2004)10.1038/nmat3456
/ Nat. Mater. by Zhang (2012){'key': '2023052001105186600_BK9781849738156-00111-cit148', 'first-page': '055507', 'volume': '96', 'author': 'Sun', 'year': '2006', 'journal-title': 'Phys. Rev B'}
/ Phys. Rev B by Sun (2006)10.1103/PhysRevB.71.224102
/ Phys. Rev. B: Condens. Matter Mater. Phys. by Ogata (2005){'key': '2023052001105186600_BK9781849738156-00111-cit150', 'volume-title': 'Transmission Electron Microscopy: A Textbook for Materials Science', 'year': '1996'}
/ Transmission Electron Microscopy: A Textbook for Materials Science (1996){'key': '2023052001105186600_BK9781849738156-00111-cit151', 'volume-title': 'Introduction to Dislocations', 'year': '2001'}
/ Introduction to Dislocations (2001)10.1016/0001-6160(59)90067-7
/ Acta Metall. by Kimura (1959)10.1126/science.1076652
/ Science by Ogata (2002)10.1103/PhysRevE.53.4655
/ Phys. Rev. E: Stat. Phys., Plasmas, Fluids, Relat. Interdiscip. Top. by Nagel (1996)10.1103/RevModPhys.73.1067
/ Rev. Mod. Phys. by Helbing (2001)10.1557/JMR.1990.0286
/ J. Mater. Res. by Wolf (1990){'key': '2023052001105186600_BK9781849738156-00111-cit157', 'first-page': '395', 'volume': '79', 'author': 'Huang', 'year': '1999', 'journal-title': 'Philos. Mag. Lett.'}
/ Philos. Mag. Lett. by Huang (1999)10.1126/science.1195628
/ Science by Huang (2010)10.1080/09500830310001657353
/ Philos. Mag. Lett. by Huang (2004)10.1021/nl101505q
/ Nano Lett. by Zuev (2010)10.1021/nl104075v
/ Nano Lett. by Polking (2010)10.1016/0025-5408(72)90133-X
/ Mater. Res. Bull. by Snykers (1972)
Dates
Type | When |
---|---|
Created | 10 years, 8 months ago (Dec. 2, 2014, 7:34 a.m.) |
Deposited | 2 years, 3 months ago (May 20, 2023, 1:40 a.m.) |
Indexed | 1 year, 3 months ago (May 5, 2024, 9:09 a.m.) |
Issued | 10 years, 8 months ago (Dec. 5, 2014) |
Published | 10 years, 8 months ago (Dec. 5, 2014) |
Published Print | 10 years, 8 months ago (Dec. 5, 2014) |
@inbook{Nukala_2014, title={Nanowire Phase-Change Memory}, ISBN={9781782625209}, url={http://dx.doi.org/10.1039/9781782625209-00111}, DOI={10.1039/9781782625209-00111}, booktitle={Semiconductor Nanowires}, publisher={The Royal Society of Chemistry}, author={Nukala, Pavan and Agarwal, Ritesh}, year={2014}, month=dec, pages={111–166} }