Abstract
AbstractHigh-quality two-dimensional atomic layered p–n heterostructures are essential for high-performance integrated optoelectronics. The studies to date have been largely limited to exfoliated and restacked flakes, and the controlled growth of such heterostructures remains a significant challenge. Here we report the direct van der Waals epitaxial growth of large-scale WSe2/SnS2 vertical bilayer p–n junctions on SiO2/Si substrates, with the lateral sizes reaching up to millimeter scale. Multi-electrode field-effect transistors have been integrated on a single heterostructure bilayer. Electrical transport measurements indicate that the field-effect transistors of the junction show an ultra-low off-state leakage current of 10−14 A and a highest on–off ratio of up to 107. Optoelectronic characterizations show prominent photoresponse, with a fast response time of 500 μs, faster than all the directly grown vertical 2D heterostructures. The direct growth of high-quality van der Waals junctions marks an important step toward high-performance integrated optoelectronic devices and systems.
Bibliography
Yang, T., Zheng, B., Wang, Z., Xu, T., Pan, C., Zou, J., Zhang, X., Qi, Z., Liu, H., Feng, Y., Hu, W., Miao, F., Sun, L., Duan, X., & Pan, A. (2017). Van der Waals epitaxial growth and optoelectronics of large-scale WSe2/SnS2 vertical bilayer pân junctions. Nature Communications, 8(1).
Authors
15
- Tiefeng Yang (first)
- Biyuan Zheng (additional)
- Zhen Wang (additional)
- Tao Xu (additional)
- Chen Pan (additional)
- Juan Zou (additional)
- Xuehong Zhang (additional)
- Zhaoyang Qi (additional)
- Hongjun Liu (additional)
- Yexin Feng (additional)
- Weida Hu (additional)
- Feng Miao (additional)
- Litao Sun (additional)
- Xiangfeng Duan (additional)
- Anlian Pan (additional)
References
69
Referenced
425
-
Novoselov, K. S. et al. Two-dimensional atomic crystals. Proc. Natl. Acad. Sci. USA
102, 10451–10453 (2005).
(
10.1073/pnas.0502848102
) / Proc. Natl. Acad. Sci. USA by KS Novoselov (2005) -
Zhang, Y., Tan, Y. W., Stormer, H. L. & Kim, P. Experimental observation of the quantum Hall effect and Berry’s phase in graphene. Nature
438, 201–204 (2005).
(
10.1038/nature04235
) / Nature by Y Zhang (2005) -
Liao, L. et al. High-speed graphene transistors with a self-aligned nanowire gate. Nature
467, 305–308 (2010).
(
10.1038/nature09405
) / Nature by L Liao (2010) -
Mak, K. F., Lee, C., Hone, J., Shan, J. & Heinz, T. F. Atomically thin MoS2: a new direct-gap semiconductor. Phys. Rev. Lett.
105, 136805 (2010).
(
10.1103/PhysRevLett.105.136805
) / Phys. Rev. Lett. by KF Mak (2010) -
Splendiani, A. et al. Emerging photoluminescence in monolayer MoS2. Nano Lett.
10, 1271–1275 (2010).
(
10.1021/nl903868w
) / Nano Lett. by A Splendiani (2010) -
Radisavljevic, B., Radenovic, A., Brivio, J., Giacometti, V. & Kis, A. Single-layer MoS2 transistors. Nat. Nanotechnol.
6, 147–150 (2011).
(
10.1038/nnano.2010.279
) / Nat. Nanotechnol. by B Radisavljevic (2011) -
Zeng, H., Dai, J., Yao, W., Xiao, D. & Cui, X. Valley polarization in MoS2 monolayers by optical pumping. Nat. Nanotechnol.
7, 490–493 (2012).
(
10.1038/nnano.2012.95
) / Nat. Nanotechnol. by H Zeng (2012) -
Lopez-Sanchez, O., Lembke, D., Kayci, M., Radenovic, A. & Kis, A. Ultrasensitive photodetectors based on monolayer MoS2. Nat. Nanotechnol.
8, 497–501 (2013).
(
10.1038/nnano.2013.100
) / Nat. Nanotechnol. by O Lopez-Sanchez (2013) -
Cheng, R. et al. Electroluminescence and photocurrent generation from atomically sharp WSe2/MoS2 heterojunction p–n diodes. Nano Lett.
14, 5590–5597 (2014).
(
10.1021/nl502075n
) / Nano Lett. by R Cheng (2014) -
Duan, X. et al. Lateral epitaxial growth of two-dimensional layered semiconductor heterojunctions. Nat. Nanotechnol.
9, 1024–1030 (2014).
(
10.1038/nnano.2014.222
) / Nat. Nanotechnol. by X Duan (2014) -
Wu, S. et al. Monolayer semiconductor nanocavity lasers with ultra-low thresholds. Nature
520, 69–72 (2015).
(
10.1038/nature14290
) / Nature by S Wu (2015) -
Duan, X. et al. Synthesis of WS2xSe2-2x alloy nanosheets with composition-tunable electronic properties. Nano Lett.
16, 264–269 (2016).
(
10.1021/acs.nanolett.5b03662
) / Nano Lett. by X Duan (2016) -
Fan, X. et al. Broken symmetry induced strong nonlinear optical effects in spiral WS2 nanosheets. ACS Nano
11, 4892–4898 (2017).
(
10.1021/acsnano.7b01457
) / ACS Nano by X Fan (2017) -
Li, H. et al. Composition-modulated two-dimensional semiconductor lateral heterostructures via layer-selected atomic substitution. ACS Nano
11, 961–967 (2017).
(
10.1021/acsnano.6b07580
) / ACS Nano by H Li (2017) -
Kang, J., Tongay, S., Zhou, J., Li, J. & Wu, J. Band offsets and heterostructures of two-dimensional semiconductors. Appl. Phys. Lett.
102, 012111 (2013).
(
10.1063/1.4774090
) / Appl. Phys. Lett. by J Kang (2013) -
Chiu, M. H. et al. Determination of band alignment in the single-layer MoS2/WSe2 heterojunction. Nat. Commun.
6, 7666 (2015).
(
10.1038/ncomms8666
) / Nat. Commun. by MH Chiu (2015) -
Yan, R. et al. Esaki diodes in van der Waals heterojunctions with broken-gap energy band alignment. Nano Lett.
15, 5791–5798 (2015).
(
10.1021/acs.nanolett.5b01792
) / Nano Lett. by R Yan (2015) -
Chiu, M. H. et al. Band alignment of 2D transition metal dichalcogenide heterojunctions. Adv. Funct. Mater.
27, 1603756 (2017).
(
10.1002/adfm.201603756
) / Adv. Funct. Mater. by MH Chiu (2017) -
Nourbakhsh, A., Zubair, A., Dresselhaus, M. S. & Palacios, T. Transport properties of a MoS2/WSe2 heterojunction transistor and its potential for application. Nano Lett.
16, 1359–1366 (2016).
(
10.1021/acs.nanolett.5b04791
) / Nano Lett. by A Nourbakhsh (2016) -
Shim, J. et al. Phosphorene/rhenium disulfide heterojunction-based negative differential resistance device for multi-valued logic. Nat. Commun.
7, 13413 (2016).
(
10.1038/ncomms13413
) / Nat. Commun. by J Shim (2016) -
Zhang, K. et al. Interlayer transition and infrared photodetection in atomically thin type-II MoTe2/MoS2 van der Waals heterostructures. ACS Nano
10, 3852–3858 (2016).
(
10.1021/acsnano.6b00980
) / ACS Nano by K Zhang (2016) -
Xiao, D., Liu, G. B., Feng, W., Xu, X. & Yao, W. Coupled spin and valley physics in monolayers of MoS2 and other group-VI dichalcogenides. Phys. Rev. Lett.
108, 196802 (2012).
(
10.1103/PhysRevLett.108.196802
) / Phys. Rev. Lett. by D Xiao (2012) -
Lee, B. et al. Fano resonance and spectrally modified photoluminescence enhancement in monolayer MoS2 integrated with plasmonic nanoantenna array. Nano Lett.
15, 3646–3653 (2015).
(
10.1021/acs.nanolett.5b01563
) / Nano Lett. by B Lee (2015) -
Roy, T. et al. Dual-gated MoS2/WSe2 van der Waals tunnel diodes and transistors. ACS Nano
9, 2071–2079 (2015).
(
10.1021/nn507278b
) / ACS Nano by T Roy (2015) -
Yu, W. J. et al. Highly efficient gate-tunable photocurrent generation in vertical heterostructures of layered materials. Nat. Nanotechnol.
8, 952–958 (2013).
(
10.1038/nnano.2013.219
) / Nat. Nanotechnol. by WJ Yu (2013) -
Massicotte, M. et al. Picosecond photoresponse in van der Waals heterostructures. Nat. Nanotechnol.
11, 42–46 (2016).
(
10.1038/nnano.2015.227
) / Nat. Nanotechnol. by M Massicotte (2016) -
Zhang, C. et al. Interlayer couplings, Moiré patterns, and 2D electronic superlattices in MoS2/WSe2 hetero-bilayers. Sci. Adv.
3, e1601459 (2017).
(
10.1126/sciadv.1601459
) / Sci. Adv. by C Zhang (2017) -
Wang, X., Cheng, Z., Xu, K., Tsang, H. K. & Xu, J.-B. High-responsivity graphene/silicon-heterostructure waveguide photodetectors. Nat. Photon.
7, 888–891 (2013).
(
10.1038/nphoton.2013.241
) / Nat. Photon. by X Wang (2013) -
Zhang, E. et al. Tunable positive to negative magnetoresistance in atomically thin WTe2. Nano Lett.
17, 878–885 (2017).
(
10.1021/acs.nanolett.6b04194
) / Nano Lett. by E Zhang (2017) -
Wu, B. et al. Precise, self-limited epitaxy of ultrathin organic semiconductors and heterojunctions tailored by van der Waals interactions. Nano Lett.
16, 3754–3759 (2016).
(
10.1021/acs.nanolett.6b01108
) / Nano Lett. by B Wu (2016) -
Roy, K. et al. Graphene-MoS2 hybrid structures for multifunctional photoresponsive memory devices. Nat. Nanotechnol.
8, 826–830 (2013).
(
10.1038/nnano.2013.206
) / Nat. Nanotechnol. by K Roy (2013) -
Yu, W. J. et al. Vertically stacked multi-heterostructures of layered materials for logic transistors and complementary inverters. Nat. Mater.
12, 246–252 (2013).
(
10.1038/nmat3518
) / Nat. Mater. by WJ Yu (2013) -
Ross, J. S. et al. Interlayer exciton optoelectronics in a 2D heterostructure p–n junction. Nano Lett.
17, 638–643 (2017).
(
10.1021/acs.nanolett.6b03398
) / Nano Lett. by JS Ross (2017) -
Wang, Y. et al. Light induced double ‘on’ state anti-ambipolar behavior and self-driven photoswitching in p-WSe2/n-SnS2 heterostructures. 2D Mater.
4, 025097 (2017).
(
10.1088/2053-1583/aa6efd
) / 2D Mater. by Y Wang (2017) -
Zhang, X. et al. Vertical heterostructures of layered metal chalcogenides by van der Waals epitaxy. Nano Lett.
14, 3047–3054 (2014).
(
10.1021/nl501000k
) / Nano Lett. by X Zhang (2014) -
Gong, Y. et al. Vertical and in-plane heterostructures from WS2/MoS2 monolayers. Nat. Mater.
13, 1135–1142 (2014).
(
10.1038/nmat4091
) / Nat. Mater. by Y Gong (2014) -
Gong, Y. et al. Two-step growth of two-dimensional WSe2/MoSe2 heterostructures. Nano Lett.
15, 6135–6141 (2015).
(
10.1021/acs.nanolett.5b02423
) / Nano Lett. by Y Gong (2015) -
Lin, Y. C. et al. Atomically thin resonant tunnel diodes built from synthetic van der Waals heterostructures. Nat. Commun.
6, 7311 (2015).
(
10.1038/ncomms8311
) / Nat. Commun. by YC Lin (2015) -
He, Y. et al. Strain-induced electronic structure changes in stacked van der Waals heterostructures. Nano Lett.
16, 3314–3320 (2016).
(
10.1021/acs.nanolett.6b00932
) / Nano Lett. by Y He (2016) -
Li, B. et al. Direct vapor phase growth and optoelectronic application of large band offset SnS2/MoS2 vertical bilayer heterostructures with high lattice mismatch. Adv. Elec. Mater.
2, 1600298 (2016).
(
10.1002/aelm.201600298
) / Adv. Elec. Mater. by B Li (2016) -
Li, X. et al. Two-dimensional GaSe/MoSe2 misfit bilayer heterojunctions by van der Waals epitaxy. Sci. Adv.
2, e1501882 (2016).
(
10.1126/sciadv.1501882
) / Sci. Adv. by X Li (2016) -
Zhou, X. et al. Vertical heterostructures based on SnSe2/MoS2 for high performance photodetectors. 2D Mater.
4, 025048 (2017).
(
10.1088/2053-1583/aa6422
) / 2D Mater. by X Zhou (2017) -
Huang, J. et al. Large-area synthesis of highly crystalline WSe2 monolayers and device applications. ACS Nano
8, 923–930 (2014).
(
10.1021/nn405719x
) / ACS Nano by J Huang (2014) -
Zhou, X., Zhang, Q., Gan, L., Li, H. & Zhai, T. Large-size growth of ultrathin SnS2 nanosheets and high performance for phototransistors. Adv. Funct. Mater.
26, 4405–4413 (2016).
(
10.1002/adfm.201600318
) / Adv. Funct. Mater. by X Zhou (2016) -
Wang, Y., Huang, L. & Wei, Z. Photoresponsive field-effect transistors based on multilayer SnS2 nanosheets. J. Semicond.
38, 034001 (2017).
(
10.1088/1674-4926/38/3/034001
) / J. Semicond. by Y Wang (2017) -
Tongay, S. et al. Tuning interlayer coupling in large-area heterostructures with CVD-grown MoS2 and WS2 monolayers. Nano Lett.
14, 3185–3190 (2014).
(
10.1021/nl500515q
) / Nano Lett. by S Tongay (2014) -
Shi, J. et al. Temperature-mediated selective growth of MoS2/WS2 and WS2/MoS2 vertical stacks on Au foils for direct photocatalytic applications. Adv. Mater.
28, 10664–10672 (2016).
(
10.1002/adma.201603174
) / Adv. Mater. by J Shi (2016) -
Yu, Y. et al. Equally efficient interlayer exciton relaxation and improved absorption in epitaxial and nonepitaxial MoS2/WS2 heterostructures. Nano Lett.
15, 486–491 (2015).
(
10.1021/nl5038177
) / Nano Lett. by Y Yu (2015) -
Fu, L. et al. Direct growth of MoS2/h-BN heterostructures via a sulfide-resistant alloy. ACS Nano
10, 2063–2070 (2016).
(
10.1021/acsnano.5b06254
) / ACS Nano by L Fu (2016) -
You, Y. et al. Observation of biexcitons in monolayer WSe2. Nat. Phys.
11, 477–481 (2015).
(
10.1038/nphys3324
) / Nat. Phys. by Y You (2015) -
Tonndorf, P. et al. Photoluminescence emission and Raman response of monolayer MoS2, MoSe2, and WSe2. Opt. Express.
21, 4908–4916 (2013).
(
10.1364/OE.21.004908
) / Opt. Express. by P Tonndorf (2013) -
Gonzalez, J. M. & Oleynik, I. I. Layer-dependent properties of SnS2 and SnSe2 two-dimensional materials. Phys. Rev. B.
94, 125443 (2016).
(
10.1103/PhysRevB.94.125443
) / Phys. Rev. B. by JM Gonzalez (2016) -
Hong, X. et al. Ultrafast charge transfer in atomically thin MoS2/WS2 heterostructures. Nat. Nanotechnol.
9, 682–686 (2014).
(
10.1038/nnano.2014.167
) / Nat. Nanotechnol. by X Hong (2014) -
Furchi, M. M., Pospischil, A., Libisch, F., Burgdorfer, J. & Mueller, T. Photovoltaic effect in an electrically tunable van der Waals heterojunction. Nano Lett.
14, 4785–4791 (2014).
(
10.1021/nl501962c
) / Nano Lett. by MM Furchi (2014) -
Burton, L. A. et al. Electronic and optical properties of single crystal SnS2: an earth-abundant disulfide photocatalyst. J. Mater. Chem. A.
4, 1312–1318 (2016).
(
10.1039/C5TA08214E
) / J. Mater. Chem. A. by LA Burton (2016) -
Liu, J., Xia, C., Li, H. & Pan, A. High on/off ratio photosensitive field effect transistors based on few layer SnS2. Nanotechnology
27, 34LT01 (2016).
(
10.1088/0957-4484/27/34/34LT01
) / Nanotechnology by J Liu (2016) -
Zhou, H. et al. Large area growth and electrical properties of p-type WSe2 atomic layers. Nano Lett.
15, 709–713 (2015).
(
10.1021/nl504256y
) / Nano Lett. by H Zhou (2015) -
Lee, Y. H. et al. Synthesis and transfer of single-layer transition metal disulfides on diverse surfaces. Nano Lett.
13, 1852–1857 (2013).
(
10.1021/nl400687n
) / Nano Lett. by YH Lee (2013) -
Zhang, Y. et al. Controlled growth of high-quality monolayer WS2 layers on sapphire and imaging its grain boundary. ACS Nano
7, 8963–8971 (2013).
(
10.1021/nn403454e
) / ACS Nano by Y Zhang (2013) -
Zhang, W., Wang, Q., Chen, Y., Wang, Z. & Wee, A. T. S. Van der Waals stacked 2D layered materials for optoelectronics. 2D Mater.
3, 022001 (2016).
(
10.1088/2053-1583/3/2/022001
) / 2D Mater. by W Zhang (2016) -
Cui, X. et al. Multi-terminal transport measurements of MoS2 using a van der Waals heterostructure device platform. Nat. Nanotechnol.
10, 534–540 (2015).
(
10.1038/nnano.2015.70
) / Nat. Nanotechnol. by X Cui (2015) -
Fang, H. et al. Visible light-assisted high-performance mid-infrared photodetectors based on single InAs nanowire. Nano Lett.
16, 6416–6424 (2016).
(
10.1021/acs.nanolett.6b02860
) / Nano Lett. by H Fang (2016) -
Wang, P. et al. Arrayed van der Waals broadband detectors for dual-band detection. Adv. Mater.
29, 1604439 (2017).
(
10.1002/adma.201604439
) / Adv. Mater. by P Wang (2017) -
Xue, Y. et al. Scalable production of a few-layer MoS2/WS2 vertical heterojunction array and its application for photodetectors. ACS Nano
10, 573–580 (2016).
(
10.1021/acsnano.5b05596
) / ACS Nano by Y Xue (2016) -
Huo, N. et al. Tunable polarity behavior and self-driven photoswitching in p-WSe2/n-WS2 heterojunctions. Small
11, 5430–5438 (2015).
(
10.1002/smll.201501206
) / Small by N Huo (2015) -
Pezeshki, A., Shokouh, S. H., Nazari, T., Oh, K. & Im, S. Electric and photovoltaic behavior of a few-layer alpha-MoTe2/MoS2 dichalcogenide heterojunction. Adv. Mater.
28, 3216–3222 (2016).
(
10.1002/adma.201504090
) / Adv. Mater. by A Pezeshki (2016) -
Yang, S. et al. Self-driven photodetector and ambipolar transistor in atomically thin GaTe-MoS2 p–n vdW heterostructure. ACS Appl. Mater. Inter.
8, 2533–2539 (2016).
(
10.1021/acsami.5b10001
) / ACS Appl. Mater. Inter. by S Yang (2016) -
Chen, J. et al. Chemical vapor deposition of large-sized hexagonal WSe2 crystals on dielectric substrates. Adv. Mater.
27, 6722–6727 (2015).
(
10.1002/adma.201503446
) / Adv. Mater. by J Chen (2015) -
Zhang, W. et al. Role of metal contacts in high-performance phototransistors based on WSe2 monolayers. ACS Nano
8, 8653–8661 (2014).
(
10.1021/nn503521c
) / ACS Nano by W Zhang (2014)
Dates
Type | When |
---|---|
Created | 7 years, 8 months ago (Nov. 28, 2017, 9:52 a.m.) |
Deposited | 2 years, 8 months ago (Dec. 22, 2022, 6:24 p.m.) |
Indexed | 21 hours, 50 minutes ago (Aug. 27, 2025, 11:58 a.m.) |
Issued | 7 years, 8 months ago (Dec. 4, 2017) |
Published | 7 years, 8 months ago (Dec. 4, 2017) |
Published Online | 7 years, 8 months ago (Dec. 4, 2017) |
@article{Yang_2017, title={Van der Waals epitaxial growth and optoelectronics of large-scale WSe2/SnS2 vertical bilayer p–n junctions}, volume={8}, ISSN={2041-1723}, url={http://dx.doi.org/10.1038/s41467-017-02093-z}, DOI={10.1038/s41467-017-02093-z}, number={1}, journal={Nature Communications}, publisher={Springer Science and Business Media LLC}, author={Yang, Tiefeng and Zheng, Biyuan and Wang, Zhen and Xu, Tao and Pan, Chen and Zou, Juan and Zhang, Xuehong and Qi, Zhaoyang and Liu, Hongjun and Feng, Yexin and Hu, Weida and Miao, Feng and Sun, Litao and Duan, Xiangfeng and Pan, Anlian}, year={2017}, month=dec }